41 results about "Laser polarization" patented technology

The invention relates to the technical field of optical precision measurement, in particular to an ultra-high time resolution camera time characteristic detection device and method, and the device comprises a laser source which is used for generating pulse laser; the polarization modulation element is arranged on an emergent light path of the laser source and is used for modulating the pulse laser into circularly polarized light; the spectroscope is arranged on an emergent light path of the polarization modulation element and is used for decomposing the circularly polarized light into a first linearly polarized light beam and a second linearly polarized light beam; the first optical path unit is used for guiding the first linearly polarized light beam to the cylindrical optical element along a fixed optical path; the second optical path unit is used for adjusting the optical path of the second linearly polarized light beam and guiding the second linearly polarized light beam to the cylindrical optical element; and the cylindrical optical element is used for receiving the first linearly polarized light beam and the second linearly polarized light beam and respectively projecting the first linearly polarized light beam and the second linearly polarized light beam to an imaging surface of a camera to be detected to form two spatially separated light spots. The objective of the invention is to improve camera time characteristic calibration precision and efficiency.

The invention discloses a femtosecond laser direct-writing Type X structure-based geometric phase fork-shaped grating, a preparation method and application of the femtosecond laser direct-writing Type X structure-based geometric phase fork-shaped grating in vortex light, and belongs to the technical field of laser processing, and the femtosecond laser direct-writing Type X structure-based geometric phase fork-shaped grating comprises design and parameter calculation of a geometric phase fork-shaped grating device, determination of a processing parameter window of a Type X structure and the femtosecond laser direct-writing fork-shaped grating. According to the invention, femtosecond laser is utilized to induce and generate an anisotropic nanopore structure with ultra-high transmittance higher than 97% in fused quartz and other transparent materials, namely a Type X structure, the structure has a birefringence characteristic, and the slow axis angle of the structure is always perpendicular to the laser polarization direction, so that the slow axis angle can be continuously adjusted by adjusting laser polarization. The Type X structure serves as a metasurface unit of the geometric phase fork-shaped grating, geometric phase regulation and control are achieved by controlling slow axis orientation of the Type X structure, and therefore generation and regulation and control of vortex light are achieved. The method is high in efficiency and simple in process.

According to the photoacoustic film thickness measuring system and method provided by the invention, the laser polarization adjusting device or the wafer rotating assembly is introduced into the measuring system, and the polarization state of femtosecond pulse laser or the wafer angle is adjusted according to the signal-to-noise ratio of the measured data; the influence of polarization direction of femtosecond pulse laser and wafer lattice orientation mismatch on measurement stability is eliminated, and the signal-to-noise ratio of a measurement signal is improved.

The invention relates to the technical field of waste liquid crystal panel separation and recovery treatment, and discloses a separation device and method for a polarizing film on a waste liquid crystal panel, and the separation device comprises a working table, a laser polarization separation mechanism, a movable support mechanism and a scraper knife automatic collection mechanism; a clamp is installed on the working table top and used for fixing a liquid crystal panel. The laser polarization separation mechanism comprises a light source assembly and a laser galvanometer cleaning head, and the light source assembly is electrically connected with the laser galvanometer cleaning head; the laser galvanometer cleaning head faces the liquid crystal panel; the movable support mechanism is installed between the working table and the light source assembly, and the laser galvanometer cleaning head is installed at the movable end of the movable support mechanism. And the automatic scraper knife collecting mechanism is mounted on the working table. According to the device, automatic separation of the polarizing film and the glass substrate in the waste liquid crystal panel is achieved, the whole process is efficient and low in pollution, the recycling treatment cost of the liquid crystal panel is reduced, and meanwhile the disassembling efficiency is greatly improved.

The invention relates to the technical field of optical polarization state measurement, in particular to a laser polarization state real-time measurement analyzer which comprises collimators, a non-polarization beam splitter, a 1 / 4 wave plate, a compensation module and a polaroid. The first non-polarization beam splitter divides two light beams into a second non-polarization beam splitter, a 1 / 2 wave plate and a third non-polarization beam splitter respectively, and the second non-polarization beam splitter divides two light beams into a second collimator and a third collimator respectively through a first polaroid and a second polaroid; the third non-polarization beam splitter divides two paths of light beams into a fourth collimator and a 1 / 4 wave plate through a third polaroid, the fourth polaroid enters a fifth collimator, the second collimator, the third collimator, the fourth collimator and the fifth collimator are connected to an oscilloscope through four photoelectric detectors, and the upper computer collects data of the oscilloscope and calculates the real-time polarization state of the laser. The method is simple, high in precision and low in cost, and realizes real-time measurement of the laser polarization state.

The present disclosure describes systems and methods for laser diagnostics systems (e.g., systems and methods for beam combination in heterodyne interferometers and polarimeters). For instance, a laser beam combiner, including a modulator and a wedge combiner, may be implemented in a heterodyne dispersion interferometer. In some cases, a modulator receives laser light (e.g., the laser light having a combination of a vertical polarization component and a horizontal polarization component) and the modulator shifts a frequency of the laser polarization components relative to the other. A wedge combiner having an index of refraction, and the wedge combiner comprises a mirror surface coating a and transmissive surface coating configured to effectively combine different polarization components of the laser light using transmission and reflection techniques, according to embodiments described herein.

This invention belongs to the field of laser pulse polarization control technology, and discloses a high-intensity laser pulse polarization state control system and method. The system includes a laser, a polarization controller, a processing device, and a central control unit. The laser generates and outputs laser pulses; the polarization controller receives the laser pulses emitted by the laser and rapidly adjusts their polarization direction; the processing device applies the polarization-adjusted laser pulses to the processing material; and the central control unit is electrically connected to the laser, polarization controller, and processing device to achieve synchronous control of these components. This invention, employing the aforementioned high-intensity laser pulse polarization state control system and method, achieves a technological breakthrough in ultra-intense laser polarization control through the innovative application of plasma media, possessing high tolerance, high precision, and adaptability, filling a technological gap in this field.

The utility model relates to a kind of device of pulse laser pulse sub-string, including pulse laser, laser attenuation device, laser beam-reducing device, laser polarization device, wave sheet, Pockels cell, output mirror, waveform detection device, and output mirror is to the waveform detection device output first light beam and to the original light path reflection second light beam;Laser polarization device side is also configured full mirror;Pockels cell is connected with high-voltage pulse generator, pulse laser is also connected with digital delay pulse signal generator, and digital delay pulse signal generator is used to send synchronization signal to high-voltage pulse generator to control high-voltage pulse generator to generate voltage pulse when pulse laser emits laser beam reaches Pockels cell.This application realizes the stable control and output of pulse sub-string by the electro-optic modulation characteristics of Pockels cell, compared with traditional method of improving laser repetition frequency, implementation is simple, and use component is less, while guaranteeing stability, reduce cost.

The invention relates to a dual-frequency laser frequency aliasing suppression device which comprises a laser, a depolarization light splitting module, a signal detection module, a polarizer and a polarization light splitting module. In the actual use process of the dual-frequency laser frequency aliasing suppression device, polarization state degradation caused by a non-ideal optical element can be compensated through the arrangement of the depolarization light splitting module and the polarization light splitting module, and the optical axis of the polarization light splitting module is enabled to coincide with the polarization direction of the laser of a certain polarization state of the laser output by the laser; therefore, the frequency aliasing in the P light and the S light emitted by the polarization light splitting module is further reduced to a lower level. The optical path structure is simple, the adjusting speed is high, frequency aliasing after double-frequency laser polarization beam splitting can be effectively restrained, and the optical path structure is suitable for the occasion of double-frequency laser interference measurement.

The present invention relates to a semiconductor device (10) for random number generation, comprising: a substrate (20); a VCSEL (30) which is arranged on the substrate (20); and a first photodetector (40) which is arranged on the same substrate (20) as the VCSEL (30); wherein the semiconductor device (10) has a polarization-selective reflector (50) which is designed to polarization-selectively reflect laser light (60) that has been emitted by the VCSEL (30) and has a first polarization (61) to the first photodetector (40). The present invention also relates to a system (80) and to a corresponding method (100) for random number generation.

The invention provides a pulse laser polarization coherent beam combining system. The pulse laser polarization coherent beam combining system comprises a beam combining device, a polarization beam combiner, a first polarization controller, a second polarization controller and a phase control module. The beam combiner is used for combining the first sub-pulse laser and the second sub-pulse laser which are incident at the same time into main power linearly polarized light and secondary power linearly polarized light, and the energy proportion of the main power linearly polarized light is larger than that of the secondary power linearly polarized light; and the polarization beam combiner is used for receiving the primary power linearly polarized light and the secondary power linearly polarized light, carrying out beam combination and forming coherent output. By arranging a polarization controller and a phase control module, polarization state and phase adjustment is carried out on the primary power linearly polarized light and the secondary power linearly polarized light respectively, so that efficient coherent beam combination of the primary power linearly polarized light and the secondary power linearly polarized light is realized in the polarization beam combiner. According to the system, the strict requirements on the incident sub-pulse laser polarization state and power are relaxed, the beam combining efficiency is improved, the system is suitable for various polarization state inputs, and the universality and practicability of the system are enhanced.

The invention provides a self-excitation type Mx rubidium atom magnetometer device and a working method, the self-excitation type Mx rubidium atom magnetometer device comprises an atom magnetometer probe and an atom magnetometer driving circuit, and the atom magnetometer probe is connected with the atom magnetometer driving circuit; the atom magnetometer probe comprises a VCSEL laser tube, an electro-optical modulator, a 1 / 4 slide, a rubidium atom gas chamber and a photosensitive tube. The atom magnetometer driving circuit comprises a lock-in amplifier, a phase shifter, an EOM driver and a laser tube driver. According to the invention, the atom magnetometer driving circuit synchronously modulates the polarization state and the light intensity of the pumping laser in the rubidium atom magnetometer to form an auto-excitation feedback loop, so that the problem that the radio frequency magnetic field feedback auto-excitation working mode adopted by the traditional Mx magnetometer is not suitable for the rubidium atom magnetometer is solved; and an instable feedback loop is formed.

The invention provides a spectrum synthesis device based on optical fiber laser polarization. A seed laser generator outputs multiple sets of seed laser at the same time, and a first beam splitter divides each set of seed laser into multiple beams of branch laser; the output characteristics of the branch lasers are modulated through the output characteristic controller, the branch lasers are synthesized through the polarization synthesizer to obtain synthesized lasers used for spectrum synthesis, the synthesized lasers are conveyed to the spectrum synthesizer through the coupling optical fiber, and spectrum synthesis is carried out on the multiple sets of lasers with different wavelengths to obtain synthesized lasers used for spectrum synthesis. And secondly, a first signal detector is further arranged on the side wall of the coupling optical fiber, power data of the synthesized laser is detected through the first signal detector, an output characteristic controller is controlled according to the power data, and the output characteristic of the synthesized laser is controlled through the output characteristic controller. The first signal detector can realize detection of synthesized laser power data without using high-power laser splitting, so that the structure of the spectrum synthesis device is simplified.

The utility model discloses a film reflectivity and transmittance testing device, which comprises a first reflecting mirror and a second reflecting mirror, after laser polarization, the laser enters the sample surface of a sample table from the first reflecting mirror through the second reflecting mirror, and a collimator capable of being rotationally adjusted is arranged above the sample table. A first power meter and a second power meter which can be rotationally adjusted are arranged on one side opposite to the second reflecting mirror, and the second power meter and the reflecting mirror are arranged on the same straight line shaft; and a third power meter is arranged in the direction perpendicular to the direction in which the laser enters the first reflecting mirror. According to the utility model, the plurality of electric push rods are arranged to respectively adjust the positions of the linked components, so that a sample curved surface film transmittance and reflectivity scanning structure can be conveniently measured; the collimator and the rotating table are matched for scanning to determine the normal directions of the surface of the sample under different curvatures, so that the equipment cost is reduced while the measurement precision is ensured, and the requirements of high hardness and fatigue resistance of a machined connecting piece on a material are ensured.

The invention discloses a femtosecond laser directional induction etching system and method based on nanopore anchoring. The system comprises a femtosecond laser, a beam expander L1, a half-wave plate L2, a polarization beam splitter L3, a first reflector L4, a second reflector L5, a long-wave-pass dichroscope L6, a non-polarization beam splitter L7, an infinity correction objective lens L8, a semi-reflecting and semi-transmitting mirror L9, a convex lens L10, a third reflector L11, a sleeve lens L12, a power meter and a CCD camera. And in the multi-pulse irradiation process, by means of the local field enhancement effect, a subsequent structure is induced to be etched in the direction perpendicular to laser polarization with the nanopore as the starting point, and controllable machining of the nanostructure with the line width as low as 15 nm on the surface of the dielectric material is achieved. According to the invention, the growth path of the groove structure is determined by the anchoring position of the nanopore and the polarization direction of the laser, so that the method has good processing control capability and system stability.

This invention discloses a laser polarization rotation state control system, method, apparatus, and storage medium. The system includes: a pump source for providing pump light; a wavelength division multiplexing (WDM) coupler connected to the pump source for coupling the pump light; an erbium-doped gain fiber connected to the WDM coupler for absorbing and amplifying the pump light to obtain signal light; an output coupler connected to the erbium-doped gain fiber for outputting and detecting the signal light; a unidirectional polarization-independent isolator connected to the output coupler for controlling the unidirectional operation of the signal light and maintaining its polarization state; an electrically driven polarization controller connected to the unidirectional polarization-independent isolator for controlling the polarization rotation state of the signal light using a SAC reinforcement learning algorithm; and a saturable absorber carbon nanotube, one end connected to the electrically driven polarization controller and the other end connected to the WDM coupler, for passively mode-locking the signal light for laser output. This invention can improve the detection efficiency of laser polarization rotation state.

The present application provides a method and system for automated inspection of a microfabricated feature on a substrate. The disclosure utilizes manipulating laser polarization in combination with the excitation and emission process, in inspection applications. The application specifically discloses selecting the polarization of the laser light by adjusting a polarization manipulator or a quarter-waveplate and / or a half waveplate between the laser source and the substrate to impart polarization to the laser light. The polarization impacts using a polarization selected to improve fluorescence emission of certain features on a substrate. The selection can be made prior to run time or dynamically during the inspection tool runtime. If the polarization is not specifically selected, then the microfabricated features may not emit much fluorescence.

The invention discloses a laser radar anti-interference system and method based on a graph convolutional neural network, and the system comprises a pulse laser polarization Monte Carlo simulation module which is used for researching the transmission characteristics of pulse laser in a smog environment; the echo signal de-noising module is used for de-noising the original echo signal by adopting a full-waveform decomposition and starfish optimization algorithm; the composition module is used for constructing a graph structure by taking three paths of polarization echoes as nodes based on the de-noised echo signals; the graph convolutional neural network module is used for processing the node graph after composition; and the anti-interference output module is used for carrying out signal reconstruction on a result processed by the graph convolutional neural network and outputting an anti-interference signal and noise distribution. According to the method, traditional one-dimensional time domain signals are remodeled into graph structure data, unique advantages of the graph convolutional neural network in non-Euclidean space data processing are fully utilized, and the anti-interference capability of the laser radar in a complex environment is effectively improved.

This invention discloses a linear polarization beam splitting unit and a real-time monitoring device and method for the polarization degree of a linearly polarized laser. The monitoring device includes a polarization modulation unit, a polarization beam splitting unit, a photoelectric detection unit, and a signal processing unit. The polarization beam splitting unit includes a first polarization beam splitter and a second polarization beam splitter. The first polarization beam splitter receives the test light and splits it into a first transmitted light and a first reflected light. The first reflected light serves as the incident light for the second polarization beam splitter, which further splits the first reflected light into a second transmitted light and a second reflected light. This invention completely separates and extracts the main polarization component leaked by the first polarization beam splitter due to factors such as installation angle deviation, thermal drift, and mechanical vibration, using the second polarization beam splitter, directly restoring the true power extreme value of the orthogonal polarization direction of the laser under test.

The utility model relates to a kind of femtosecond laser three frequency multiplication devices, the device includes femtosecond laser, frequency multiplication module, light splitting module, compensation module, polarization module and sum frequency module, femtosecond laser emits first frequency femtosecond laser, and frequency multiplication module is partly frequency multiplied as second frequency femtosecond laser. First frequency femtosecond laser not involved in frequency multiplication is transmitted to polarization module by light splitting module, and second frequency femtosecond laser obtained by frequency multiplication is reflected to compensation module. Polarization module adjusts the polarization direction of first frequency femtosecond laser, so that it is consistent with the polarization state of second frequency femtosecond laser after being processed by compensation module, and is projected to sum frequency module. Compensation module carries out optical path difference compensation to second frequency femtosecond laser, to ensure that it is time synchronization when first frequency femtosecond laser and second frequency femtosecond laser propagate to sum frequency module. Sum frequency module is frequency multiplied as third frequency femtosecond laser and is outputted to two kinds of femtosecond laser, and the third frequency conversion of femtosecond laser is realized.

This invention relates to the field of microwave electric field measurement technology, and provides a microwave atomic probe and its fabrication method, as well as a microwave electric field measurement system. The microwave atomic probe is constructed by sequentially connecting a probe light transmission fiber, a probe light collimator assembly, an atomic gas cell, a coupling light collimator assembly, and a coupling light transmission fiber. The probe light transmission fiber and the coupling light transmission fiber are photonic crystal fibers. The probe light transmission fiber includes a first pigtail ferrule, which is connected to the probe light collimator assembly to horizontally collimate the emitted laser. The coupling light transmission fiber includes a second pigtail ferrule, which is connected to the coupling light collimator assembly. The atomic gas cell is located between the probe light collimator assembly and the coupling light collimator assembly. This invention ensures stable probe light polarization, achieves higher probe light collection efficiency, and effectively solves the problem of signal abrupt changes caused by unstable laser polarization.

The specification discloses a polarization control laser power quantum stabilization device, method and laser emitting equipment to improve the stability of laser power. The device comprises a laser power adjusting unit configured to adjust the laser polarization state of linearly polarized light output by a laser by using a polarization controller, and output the to-be-stabilized power laser after polarization maintaining transmission; and a feedback control unit configured to take the to-be-stabilized power laser as a monitoring object, introduce it into an atomic clock, change the output frequency of the atomic clock, and adjust the laser polarization state in the laser power adjusting unit based on the deviation between the output frequency and a given output frequency by using a feedback control method to stabilize the power of the output laser. The device has strong environmental interference resistance, reduces the influence of laser polarization change in the traditional method on power stability, improves the sensitivity and response capability of the system to small changes in stable power, and more accurately controls the stable laser power.

The invention relates to an optical fiber end cap output system with an adjustable polarization direction and a control method and application thereof. The system comprises an optical fiber end cap, a conductive metal module, a current generation module, a control terminal module, a polarization direction indication module, a protection packaging module and a polarization maintaining optical fiber. The current generation module is connected with the conductive metal module through a wire to form a closed-loop circuit, the control terminal module controls the current generation module to generate specific current, the conductive metal module generates a specific target magnetic field around the optical fiber end cap after being powered on, and the polarization direction of linear polarization laser in the optical fiber end cap is changed through the magnetic field. And the converted laser polarization direction is displayed in real time through the polarization direction indication module. The system provided by the invention can dynamically and accurately regulate and control the polarization direction of the laser output by the linear polarization fiber laser, can accurately display the polarization direction in real time, and has very high application value in the fields of laser processing, laser communication, quantum optics, coherent combination and the like.

This invention discloses an adaptive three-beam interferometric super-resolution microscopy system and method. The light source module generates laser light, which sequentially passes through a polarization beam splitting module and an electro-optic phase modulation module, outputting three phase-modulated laser beams. These three beams undergo optical path compensation by a path compensation module, then enter a laser polarization vector modulation module for polarization modulation. After modulation, they pass through a laser beam combining module and enter an aberration correction module. After aberration correction, the three beams illuminate the sample on the displacement stage. The fluorescence excited by the sample passes through the aberration correction module again for aberration correction, and then passes through a filtering imaging module to obtain an image. The acquisition and control module synchronously controls the electro-optic phase modulation module, the laser polarization vector modulation module, and the aberration correction module, and receives the image captured by the filtering imaging module. Ultimately, this achieves high-speed, real-time super-resolution microscopy and high-quality aberration correction, improving the three-dimensional resolution of the image, especially along the axial direction, and reducing artifacts in the image.

The invention discloses a multichannel spectrum detection system and method. The system comprises a light source (1), at least one phase modulator, at least one polarization beam splitting unit, at least one beam combining unit (7), a spectrometer (8) and a control unit (9). The phase modulator is arranged on an emergent light path of the light source (1) and / or a pre-stage polarization beam splitting light path and is used for switching a laser polarization state; and the polarization beam splitting unit splits the laser to different light paths according to the modulated polarization state. A plurality of detection channels are formed through one-time or multi-time modulation and beam splitting, and pulse laser is distributed in a time division multiplexing mode; spectral signals of all the channels are collected by a spectrograph (8) after being combined by a beam combining unit (7); and the control unit (9) separates and analyzes the data of each channel according to the switching time sequence. According to the invention, time division multiplexing of a single set of core hardware among multiple channels is realized, the system cost is reduced, high time sequence precision synchronous detection is ensured, and the method is suitable for industrial online multi-target monitoring.

The present application provides a method and system for automated inspection of a microfabricated feature on a substrate. The disclosure utilizes manipulating laser polarization in combination with the excitation and emission process, in inspection applications. The application specifically discloses selecting the polarization of the laser light by adjusting a polarization manipulator or a quarter- waveplate and / or a half waveplate between the laser source and the substrate to impart polarization to the laser light. The polarization impacts using a polarization selected to improve fluorescence emission of certain features on a substrate. The selection can be made prior to run time or dynamically during the inspection tool runtime. If the polarization is not specifically selected, then the microfabricated features may not emit much fluorescence.

The invention discloses a terahertz pulse train transmitting device which comprises a femtosecond laser, a half-wave plate, a beam splitter, a first reflector, a second reflector, a third reflector, a fourth reflector, a time delayer, a beam combiner and a terahertz source. The femtosecond laser outputs a linearly polarized femtosecond laser pulse, and after the femtosecond laser pulse passes through the half-wave plate, the polarization direction of the femtosecond laser pulse is changed to 45 degrees, and the femtosecond laser pulse enters the beam splitter; the beam splitter divides the pulse into two beams of laser with equal energy, and the polarization directions are orthogonal; the first laser beam sequentially passes through the first reflector and the second reflector and then enters the beam combiner, and the second laser beam sequentially passes through the third reflector, the time delayer and the fourth reflector and then enters the beam combiner; the time delay between the two laser beams is adjusted through a time delayer, and the two combined laser beams have the same propagation direction; the structure is cascaded for three times, and finally, eight femtosecond laser pulses with different time delays excite the terahertz source to generate a terahertz pulse string. The problem that an existing terahertz source is low in repetition frequency is solved.

The invention relates to the technical field of laser, and provides a composite Raman laser intensity adjusting device, which comprises a fundamental frequency laser, a Raman resonant cavity, a Raman crystal and a composite light intensity adjuster, and is characterized in that the fundamental frequency laser is used for emitting horizontal polarization pump light; the Raman resonant cavity is used for forming Raman laser oscillation; the Raman crystal is located in the Raman resonant cavity and generates Raman laser under pumping of the horizontal polarization pump light; the composite light intensity regulator is located in the Raman resonant cavity and comprises a substrate, a first surface of the substrate is plated with a Raman laser polarization beam splitting film, and a second surface of the substrate is plated with a Raman laser antireflection film; the composite light intensity regulator is configured to change the polarization state when the Raman laser passes through the substrate; the polarization state proportion of the Raman laser is regulated and controlled through the composite light intensity regulator, the output coupling rate is dynamically changed, the laser intensity is flexibly regulated, and the ratio of intra-cavity gain to output loss is optimized to obtain optimal output.

The invention discloses a laser coupling system and laser processing equipment. The laser coupling system comprises a first laser source, a second laser source and a third laser source which are used for providing three beams of laser; the polarization preprocessing module is used for adjusting the polarization states of lasers emitted by the first laser source and the second laser source to be in a preset relation and combining the lasers into first combined light, and the first combined light comprises laser components of the first polarization state and the second polarization state; the electric control polarization switching module is arranged on a light path of the first combined light beam and used for receiving signals and modulating the overall polarization state of the first combined light beam; the polarization beam splitting and combining module is provided with a main input end, an auxiliary input end and an output end, the main input end receives the modulated light beam, the auxiliary input end receives the laser emitted by the third laser source, and second combined beam light is formed through selective coupling. According to the technical scheme, coupling of the main laser and the auxiliary laser can be flexibly switched, under the condition that the total energy is lower than the energy needed by the single-beam main laser to reach the threshold value, nonlinear absorption and modification of the material can be efficiently triggered, and precise machining threshold value breakthrough under lower energy input is achieved.

The invention relates to the technical field of laser measurement, and discloses a 3D measurement system, method and device, and the system comprises a polarized light field generation module which is used for outputting gradient linear polarization collimation laser with the polarization direction gradually changing along a preset direction; the polarization image collector is used for collecting a polarization light field image including a target light spot, and the target light spot is generated by irradiating the gradient linear polarization collimation laser onto a measured object; the processor is connected with the polarization image collector and is used for acquiring a polarization light field image; calculating according to the measured value of each pixel point in the polarized light field image to obtain a characteristic point coordinate of which the polarization included angle between the actual polarization angle and the target polarization angle is equal to a preset angle; generating a feature point trajectory according to the feature point coordinates, and obtaining a target image comprising the feature point trajectory; and performing 3D measurement on the measured object based on the target image. According to the invention, the 3D measurement precision can be obviously improved.