73 results about "Laser polarization" patented technology

The invention relates to the technical field of optical precision measurement, in particular to an ultra-high time resolution camera time characteristic detection device and method, and the device comprises a laser source which is used for generating pulse laser; the polarization modulation element is arranged on an emergent light path of the laser source and is used for modulating the pulse laser into circularly polarized light; the spectroscope is arranged on an emergent light path of the polarization modulation element and is used for decomposing the circularly polarized light into a first linearly polarized light beam and a second linearly polarized light beam; the first optical path unit is used for guiding the first linearly polarized light beam to the cylindrical optical element along a fixed optical path; the second optical path unit is used for adjusting the optical path of the second linearly polarized light beam and guiding the second linearly polarized light beam to the cylindrical optical element; and the cylindrical optical element is used for receiving the first linearly polarized light beam and the second linearly polarized light beam and respectively projecting the first linearly polarized light beam and the second linearly polarized light beam to an imaging surface of a camera to be detected to form two spatially separated light spots. The objective of the invention is to improve camera time characteristic calibration precision and efficiency.

The invention discloses a femtosecond laser direct-writing Type X structure-based geometric phase fork-shaped grating, a preparation method and application of the femtosecond laser direct-writing Type X structure-based geometric phase fork-shaped grating in vortex light, and belongs to the technical field of laser processing, and the femtosecond laser direct-writing Type X structure-based geometric phase fork-shaped grating comprises design and parameter calculation of a geometric phase fork-shaped grating device, determination of a processing parameter window of a Type X structure and the femtosecond laser direct-writing fork-shaped grating. According to the invention, femtosecond laser is utilized to induce and generate an anisotropic nanopore structure with ultra-high transmittance higher than 97% in fused quartz and other transparent materials, namely a Type X structure, the structure has a birefringence characteristic, and the slow axis angle of the structure is always perpendicular to the laser polarization direction, so that the slow axis angle can be continuously adjusted by adjusting laser polarization. The Type X structure serves as a metasurface unit of the geometric phase fork-shaped grating, geometric phase regulation and control are achieved by controlling slow axis orientation of the Type X structure, and therefore generation and regulation and control of vortex light are achieved. The method is high in efficiency and simple in process.

The invention discloses a self-adaptive three-beam interference super-resolution microscopic imaging system and method, a light source module generates laser which sequentially passes through a polarization beam splitting module and an electro-optic phase modulation module, three beams of laser subjected to phase modulation are output, and the three beams of laser pass through an optical path compensation module to complete optical path compensation; then the laser enters the laser polarization vector modulation module for polarization modulation, the modulated laser enters the aberration correction module through the laser beam combining module, three beams of light irradiate a sample on a displacement table after aberration correction, fluorescence excited by the sample passes through the aberration correction module again to complete aberration correction, and then an image is obtained through the filtering imaging module. And the acquisition control module synchronously controls the electro-optic phase modulation module, the laser polarization vector polarization modulation module and the aberration correction module and receives an image shot by the filtering imaging module, so that high-speed real-time super-resolution microscopic imaging and high-quality aberration correction are finally realized, the three-dimensional resolution of the image, especially the resolution along the axial direction, is improved, and the imaging quality is improved. And artifacts in the image are reduced.

According to the photoacoustic film thickness measuring system and method provided by the invention, the laser polarization adjusting device or the wafer rotating assembly is introduced into the measuring system, and the polarization state of femtosecond pulse laser or the wafer angle is adjusted according to the signal-to-noise ratio of the measured data; the influence of polarization direction of femtosecond pulse laser and wafer lattice orientation mismatch on measurement stability is eliminated, and the signal-to-noise ratio of a measurement signal is improved.

The invention relates to the field of optics, and provides a device and a method for measuring an angle resolution polarization Raman spectrum. The angle resolution polarization Raman spectrum measuring device comprises a connecting mounting plate which is used for mounting the measuring device in a light path of a Raman spectrometer; the rotary mounting seat is fixed on the connecting mounting plate; the angle rotary table is arranged in the rotary mounting seat and is driven by the driving part to rotate; and the wave plate is mounted on the angle turntable and is used for changing the polarization directions of the incident laser and the Raman signal light through the wave plate. The angle resolution polarization Raman spectrum measuring device solves the problem of rotation and displacement of tiny samples, ensures in-situ and continuous measurement of small-size samples such as two-dimensional materials and nanoparticles, and compared with a traditional manual rotation wave plate mode, the angle setting error is reduced, the laser polarization direction is ensured to be adjusted according to preset precision, and the measurement accuracy is improved. And the high-resolution polarization measurement requirement is met.

The application provides a laser modification processing method and a processing system for eliminating cleavage surface crack deflection. The spatial intersection line of the crystal natural cleavage surface and the macro processing surface is solved by cross multiplication operation, and the intersection line direction is locked as the laser polarization direction. The scanning direction is orthogonal to the polarization direction, and an asymmetric light intensity distribution compressing in the scanning direction and stretching in the polarization direction is constructed. A constraint model of micro-step height and laser focal depth is established, the step height is controlled to be less than the focal depth by controlling the dot spacing, the longitudinal stress is used to bridge the micro-cracks, and large-area smooth peeling is realized. The application does not need mechanical rotating parts, can effectively inhibit crack deflection, eliminate the stepped fracture caused by the inclination of the cleavage surface, and obtain a smooth peeling surface.

The invention relates to the technical field of waste liquid crystal panel separation and recovery treatment, and discloses a separation device and method for a polarizing film on a waste liquid crystal panel, and the separation device comprises a working table, a laser polarization separation mechanism, a movable support mechanism and a scraper knife automatic collection mechanism; a clamp is installed on the working table top and used for fixing a liquid crystal panel. The laser polarization separation mechanism comprises a light source assembly and a laser galvanometer cleaning head, and the light source assembly is electrically connected with the laser galvanometer cleaning head; the laser galvanometer cleaning head faces the liquid crystal panel; the movable support mechanism is installed between the working table and the light source assembly, and the laser galvanometer cleaning head is installed at the movable end of the movable support mechanism. And the automatic scraper knife collecting mechanism is mounted on the working table. According to the device, automatic separation of the polarizing film and the glass substrate in the waste liquid crystal panel is achieved, the whole process is efficient and low in pollution, the recycling treatment cost of the liquid crystal panel is reduced, and meanwhile the disassembling efficiency is greatly improved.

The invention relates to the technical field of optical polarization state measurement, in particular to a laser polarization state real-time measurement analyzer which comprises collimators, a non-polarization beam splitter, a 1 / 4 wave plate, a compensation module and a polaroid. The first non-polarization beam splitter divides two light beams into a second non-polarization beam splitter, a 1 / 2 wave plate and a third non-polarization beam splitter respectively, and the second non-polarization beam splitter divides two light beams into a second collimator and a third collimator respectively through a first polaroid and a second polaroid; the third non-polarization beam splitter divides two paths of light beams into a fourth collimator and a 1 / 4 wave plate through a third polaroid, the fourth polaroid enters a fifth collimator, the second collimator, the third collimator, the fourth collimator and the fifth collimator are connected to an oscilloscope through four photoelectric detectors, and the upper computer collects data of the oscilloscope and calculates the real-time polarization state of the laser. The method is simple, high in precision and low in cost, and realizes real-time measurement of the laser polarization state.

The present disclosure describes systems and methods for laser diagnostics systems (e.g., systems and methods for beam combination in heterodyne interferometers and polarimeters). For instance, a laser beam combiner, including a modulator and a wedge combiner, may be implemented in a heterodyne dispersion interferometer. In some cases, a modulator receives laser light (e.g., the laser light having a combination of a vertical polarization component and a horizontal polarization component) and the modulator shifts a frequency of the laser polarization components relative to the other. A wedge combiner having an index of refraction, and the wedge combiner comprises a mirror surface coating a and transmissive surface coating configured to effectively combine different polarization components of the laser light using transmission and reflection techniques, according to embodiments described herein.

The invention discloses an optical fiber laser and a laser pulse state tuning method, and relates to the technical field of ultrafast laser, the optical fiber laser comprises an optical resonant cavity, a polarization controller, a polarization-maintaining wavelength division multiplexer, a first polarization-maintaining optical fiber isolator, a second polarization-maintaining optical fiber isolator and a polarization-maintaining single-mode semiconductor pump laser; the optical resonant cavity comprises a mode-locked laser generation module and a tuning module, and can generate mode-locked laser in various mode-locked states; the polarization controller is used for adjusting the polarization state of the pump light or the mode-locked laser, the polarization-maintaining wavelength division multiplexer is used for multiplexing and demultiplexing the pump light or the mode-locked laser, and the polarization-maintaining optical fiber isolator ensures one-way propagation of the light. The internal parameters of the laser are directly regulated and controlled through the temperature tuning or angle tuning module, the complexity of external light path adjustment is avoided, the high repetition frequency of mode-locked laser pulses and the long-term stability of the laser in the long-time operation process are ensured, and the diversified requirements of different application fields for the performance of an ultrafast laser light source are met.

This invention belongs to the field of laser pulse polarization control technology, and discloses a high-intensity laser pulse polarization state control system and method. The system includes a laser, a polarization controller, a processing device, and a central control unit. The laser generates and outputs laser pulses; the polarization controller receives the laser pulses emitted by the laser and rapidly adjusts their polarization direction; the processing device applies the polarization-adjusted laser pulses to the processing material; and the central control unit is electrically connected to the laser, polarization controller, and processing device to achieve synchronous control of these components. This invention, employing the aforementioned high-intensity laser pulse polarization state control system and method, achieves a technological breakthrough in ultra-intense laser polarization control through the innovative application of plasma media, possessing high tolerance, high precision, and adaptability, filling a technological gap in this field.

The utility model relates to a kind of device of pulse laser pulse sub-string, including pulse laser, laser attenuation device, laser beam-reducing device, laser polarization device, wave sheet, Pockels cell, output mirror, waveform detection device, and output mirror is to the waveform detection device output first light beam and to the original light path reflection second light beam;Laser polarization device side is also configured full mirror;Pockels cell is connected with high-voltage pulse generator, pulse laser is also connected with digital delay pulse signal generator, and digital delay pulse signal generator is used to send synchronization signal to high-voltage pulse generator to control high-voltage pulse generator to generate voltage pulse when pulse laser emits laser beam reaches Pockels cell.This application realizes the stable control and output of pulse sub-string by the electro-optic modulation characteristics of Pockels cell, compared with traditional method of improving laser repetition frequency, implementation is simple, and use component is less, while guaranteeing stability, reduce cost.

The application provides a laser polarization degree testing device applied to the technical field of detection, which comprises a thin film circuit, the surface of the thin film circuit is provided with an electrode contact point of a laser, a laser limiting device, the laser limiting device is provided with a clamping groove on a bearing surface, a conductive assembly, the conductive assembly is arranged on the laser limiting device close to the bearing surface, the conductive assembly comprises a support structure which can move up and down along a guide rail perpendicular to the bearing surface and at least two conductive contacts, the conductive contacts are fixed to the support structure and vertically correspond to the position of the electrode contact point, a rotating table, a through hole is formed in the rotating table shaft, a polarizer is fixedly arranged on the receiving surface of the rotating table, a photodiode, the photodiode is vertically arranged in the light output direction of the polarizer, the photosensitive surface of the photodiode is coaxial with the rotating table, and a controller, the controller is electrically connected with the conductive assembly, the rotating table and the photodiode through wires. The universality and operation convenience of the device can be enhanced.

The invention relates to a dual-frequency laser frequency aliasing suppression device which comprises a laser, a depolarization light splitting module, a signal detection module, a polarizer and a polarization light splitting module. In the actual use process of the dual-frequency laser frequency aliasing suppression device, polarization state degradation caused by a non-ideal optical element can be compensated through the arrangement of the depolarization light splitting module and the polarization light splitting module, and the optical axis of the polarization light splitting module is enabled to coincide with the polarization direction of the laser of a certain polarization state of the laser output by the laser; therefore, the frequency aliasing in the P light and the S light emitted by the polarization light splitting module is further reduced to a lower level. The optical path structure is simple, the adjusting speed is high, frequency aliasing after double-frequency laser polarization beam splitting can be effectively restrained, and the optical path structure is suitable for the occasion of double-frequency laser interference measurement.

The invention discloses an axisymmetric blazed grating precision displacement sensor and a measurement system, and relates to the technical field of grating precision displacement sensor measurement, the sensor adopts an axisymmetric distribution mode, a blazed grating assembly comprises a first blazed grating and a second blazed grating, and the first blazed grating and the second blazed grating are installed on the two sides of a displacement bearing assembly in an axisymmetric distribution mode; the laser outputs laser; the polarization beam splitting assembly divides the laser into two beams of polarized light with the same light intensity. The wave plate assembly performs polarization state conversion on the polarized light; the reflection assembly reflects the polarized light to the first blazed grating and the second blazed grating at a Littrow angle so as to diffract the polarized light; the polarization beam splitting assembly combines two beams of diffracted light diffracted by the first blazed grating and the second blazed grating and reflected by the reflection assembly; the light splitting detection assembly carries out light splitting and signal detection on the combined light to obtain interference signals, and displacement measurement is achieved. According to the invention, the displacement measurement precision and the diffraction efficiency can be improved.

The invention relates to the technical field of optical fiber lasers, in particular to a polarization maintaining optical fiber laser capable of switching pulses and a modulation method of the polarization maintaining optical fiber laser. The polarization-maintaining fiber laser capable of switching the pulses comprises a pumping source used for outputting pumping light; a polarization-maintaining wavelength division multiplexer, a polarization-maintaining optical fiber, a polarization-maintaining optical fiber isolator, a directional carbon tube saturable absorber and a polarization-maintaining coupler are sequentially connected in the light emitting direction of the pumping source; the directional carbon tube saturable absorber is coupled to the end face of the polarization-maintaining jumper, an included angle is formed between the directional carbon tube saturable absorber and the laser polarization direction in the polarization-maintaining jumper, and mode-locked pulses in various states are generated by adjusting the included angle. By directionally adjusting the included angle between the laser polarization direction and the directional carbon tube saturable absorber, more convenient, faster and more stable pulse switching is realized. According to the invention, an optical path structure or an optical element does not need to be frequently adjusted, and accurate pulse state switching can be realized only by adjusting the included angle between the polarization maintaining optical fiber and the directional carbon tube saturable absorber.

The present invention relates to a semiconductor device (10) for random number generation, comprising: a substrate (20); a VCSEL (30) which is arranged on the substrate (20); and a first photodetector (40) which is arranged on the same substrate (20) as the VCSEL (30); wherein the semiconductor device (10) has a polarization-selective reflector (50) which is designed to polarization-selectively reflect laser light (60) that has been emitted by the VCSEL (30) and has a first polarization (61) to the first photodetector (40). The present invention also relates to a system (80) and to a corresponding method (100) for random number generation.

The invention relates to the technical field of laser optical fibers, and discloses a five-dimensional precise adjustment miniaturized optical fiber coupler integrated with a half-wave plate, which comprises a base, the lower end of a coupling joint is inserted into the base from the top of the base, and an aspherical lens is correspondingly arranged below the coupling joint; the rear cover plate is arranged at the bottom of the base, and a fixed seat is arranged on the lower surface of the rear cover plate; the threaded connection seat is in threaded connection with the fixed seat; and the half-wave plate is arranged in the threaded connection seat, a first through hole for laser to pass through is formed in the middle of the rear cover plate, and the half-wave plate corresponds to the first through hole. The half-wave plate and the optical fiber coupler are integrated, so that the laser polarization state can be matched with the polarization characteristic of the optical fiber; the five-dimensional adjusting mechanism can drive the lens groove to move along the X axis, the Y axis and the Z axis, the position of the lens can be changed, the angle of the lens relative to the coupling joint can be changed, and the coupling precision is improved.

The invention provides a pulse laser polarization coherent beam combining system. The pulse laser polarization coherent beam combining system comprises a beam combining device, a polarization beam combiner, a first polarization controller, a second polarization controller and a phase control module. The beam combiner is used for combining the first sub-pulse laser and the second sub-pulse laser which are incident at the same time into main power linearly polarized light and secondary power linearly polarized light, and the energy proportion of the main power linearly polarized light is larger than that of the secondary power linearly polarized light; and the polarization beam combiner is used for receiving the primary power linearly polarized light and the secondary power linearly polarized light, carrying out beam combination and forming coherent output. By arranging a polarization controller and a phase control module, polarization state and phase adjustment is carried out on the primary power linearly polarized light and the secondary power linearly polarized light respectively, so that efficient coherent beam combination of the primary power linearly polarized light and the secondary power linearly polarized light is realized in the polarization beam combiner. According to the system, the strict requirements on the incident sub-pulse laser polarization state and power are relaxed, the beam combining efficiency is improved, the system is suitable for various polarization state inputs, and the universality and practicability of the system are enhanced.

To provide a vehicle projection device capable of improving utilization efficiency of light.SOLUTION: A vehicle projection device 1 according to the embodiment comprises: a plurality of projectors 30 projecting an image; and a light source unit 10 supplying light to the plurality of projectors 30. The light source unit 10 includes: a laser light source 11 emitting a laser beam with a first polarization component; a polarization rotation unit 12 rotating the polarization direction of the laser beam emitted from the laser light source 11; and a branch part 14 branching a laser beam passing through the polarization rotation unit 12 into the first polarization component and a second polarization component other than the first polarization component and supplying it to each of the plurality of projectors 30.SELECTED DRAWING: Figure 2

The invention belongs to the technical field of laser pulse polarization regulation and control, and discloses an intense laser pulse polarization state regulation and control system and method, and the system comprises a laser, a polarization controller, a processing device and a master controller. Wherein the laser is used for generating and outputting laser pulses; the polarization controller is used for receiving the laser pulse emitted by the laser and quickly adjusting the polarization direction of the laser pulse; the processing device is used for enabling the laser pulse adjusted by the polarization controller to act on a processing material; the master controller is electrically connected with the laser, the polarization controller and the machining device, and synchronous control over the laser, the polarization controller and the machining device is achieved. According to the intense laser pulse polarization state regulation and control system and method, through innovative application of the plasma medium, the technical breakthrough of intense laser polarization regulation and control is achieved, high tolerance, high precision and adaptability are achieved, and the technical blank in the field is filled up.

The invention discloses an illumination system for three-color laser projection, which relates to the technical field of laser projection illumination and comprises an optical support, and the optical support is provided with a three-color laser light source module, a beam shaping module, a vibration speckle elimination device, a dodging module, a relay output module, a TIR total reflection prism and a DMD chip. According to the invention, through the cooperation of the vibration speckle-eliminating device and the light path of the three-color laser, the vibration speckle-eliminating device modulates laser polarization, on the premise of eliminating coherence and reducing speckle formation in principle, the three-color laser divergence is reduced, in the light-homogenizing module, the three-color laser is divided into a plurality of rectangular sub-light spots by the fly-eye lens, and after the rectangular sub-light spots are superposed by the relay output module, the sub-light spots are output. The light spot energy focused on the DMD chip is distributed more uniformly, the dual design of speckle contrast, polarization modulation and rectangular sub-light spot segmentation and superposition is further weakened, the problem of bright and dark spots of a picture of traditional laser projection can be remarkably solved, and the visual impression is improved.

The invention provides a self-excitation type Mx rubidium atom magnetometer device and a working method, the self-excitation type Mx rubidium atom magnetometer device comprises an atom magnetometer probe and an atom magnetometer driving circuit, and the atom magnetometer probe is connected with the atom magnetometer driving circuit; the atom magnetometer probe comprises a VCSEL laser tube, an electro-optical modulator, a 1 / 4 slide, a rubidium atom gas chamber and a photosensitive tube. The atom magnetometer driving circuit comprises a lock-in amplifier, a phase shifter, an EOM driver and a laser tube driver. According to the invention, the atom magnetometer driving circuit synchronously modulates the polarization state and the light intensity of the pumping laser in the rubidium atom magnetometer to form an auto-excitation feedback loop, so that the problem that the radio frequency magnetic field feedback auto-excitation working mode adopted by the traditional Mx magnetometer is not suitable for the rubidium atom magnetometer is solved; and an instable feedback loop is formed.

The invention discloses a weak value amplification-based polarization-maintaining photonic crystal resonance angular velocity sensor and method, and relates to the technical field of optical fiber sensing, and the weak value amplification-based polarization-maintaining photonic crystal resonance angular velocity sensor comprises a light source module, a polarization control module, a polarization-maintaining photonic crystal fiber annular resonant cavity and an interference reading module. The light source module, the polarization control module, the polarization-maintaining photonic crystal fiber annular resonant cavity and the interference reading module are connected through optical fibers. The light source module is used for providing laser with stable polarization and narrow linewidth; the polarization control module is used for switching linear polarization, circular polarization and elliptical polarization and preparing a front selection state and a rear selection state for weak value amplification; the polarization-maintaining photonic crystal fiber annular resonant cavity is used for forming an angular velocity measurement optical signal; the interference reading module is used for obtaining interference fringes. By implementing the weak value amplification-based polarization-maintaining photonic crystal resonance angular velocity sensor and method provided by the invention, the measurement sensitivity and stability of weak angular velocity can be improved.

The invention provides a spectrum synthesis device based on optical fiber laser polarization. A seed laser generator outputs multiple sets of seed laser at the same time, and a first beam splitter divides each set of seed laser into multiple beams of branch laser; the output characteristics of the branch lasers are modulated through the output characteristic controller, the branch lasers are synthesized through the polarization synthesizer to obtain synthesized lasers used for spectrum synthesis, the synthesized lasers are conveyed to the spectrum synthesizer through the coupling optical fiber, and spectrum synthesis is carried out on the multiple sets of lasers with different wavelengths to obtain synthesized lasers used for spectrum synthesis. And secondly, a first signal detector is further arranged on the side wall of the coupling optical fiber, power data of the synthesized laser is detected through the first signal detector, an output characteristic controller is controlled according to the power data, and the output characteristic of the synthesized laser is controlled through the output characteristic controller. The first signal detector can realize detection of synthesized laser power data without using high-power laser splitting, so that the structure of the spectrum synthesis device is simplified.

The utility model discloses a film reflectivity and transmittance testing device, which comprises a first reflecting mirror and a second reflecting mirror, after laser polarization, the laser enters the sample surface of a sample table from the first reflecting mirror through the second reflecting mirror, and a collimator capable of being rotationally adjusted is arranged above the sample table. A first power meter and a second power meter which can be rotationally adjusted are arranged on one side opposite to the second reflecting mirror, and the second power meter and the reflecting mirror are arranged on the same straight line shaft; and a third power meter is arranged in the direction perpendicular to the direction in which the laser enters the first reflecting mirror. According to the utility model, the plurality of electric push rods are arranged to respectively adjust the positions of the linked components, so that a sample curved surface film transmittance and reflectivity scanning structure can be conveniently measured; the collimator and the rotating table are matched for scanning to determine the normal directions of the surface of the sample under different curvatures, so that the equipment cost is reduced while the measurement precision is ensured, and the requirements of high hardness and fatigue resistance of a machined connecting piece on a material are ensured.

The invention discloses a femtosecond laser directional induction etching system and method based on nanopore anchoring. The system comprises a femtosecond laser, a beam expander L1, a half-wave plate L2, a polarization beam splitter L3, a first reflector L4, a second reflector L5, a long-wave-pass dichroscope L6, a non-polarization beam splitter L7, an infinity correction objective lens L8, a semi-reflecting and semi-transmitting mirror L9, a convex lens L10, a third reflector L11, a sleeve lens L12, a power meter and a CCD camera. And in the multi-pulse irradiation process, by means of the local field enhancement effect, a subsequent structure is induced to be etched in the direction perpendicular to laser polarization with the nanopore as the starting point, and controllable machining of the nanostructure with the line width as low as 15 nm on the surface of the dielectric material is achieved. According to the invention, the growth path of the groove structure is determined by the anchoring position of the nanopore and the polarization direction of the laser, so that the method has good processing control capability and system stability.

This invention discloses a laser polarization rotation state control system, method, apparatus, and storage medium. The system includes: a pump source for providing pump light; a wavelength division multiplexing (WDM) coupler connected to the pump source for coupling the pump light; an erbium-doped gain fiber connected to the WDM coupler for absorbing and amplifying the pump light to obtain signal light; an output coupler connected to the erbium-doped gain fiber for outputting and detecting the signal light; a unidirectional polarization-independent isolator connected to the output coupler for controlling the unidirectional operation of the signal light and maintaining its polarization state; an electrically driven polarization controller connected to the unidirectional polarization-independent isolator for controlling the polarization rotation state of the signal light using a SAC reinforcement learning algorithm; and a saturable absorber carbon nanotube, one end connected to the electrically driven polarization controller and the other end connected to the WDM coupler, for passively mode-locking the signal light for laser output. This invention can improve the detection efficiency of laser polarization rotation state.

The application discloses a kind of based on acoustooptic device dynamic regulation and control laser polarization state device, belong to laser technical field, including laser beam splitting unit, for according to the polarization state and polarization angle of target laser to be generated, the incident laser is split and produces the two linear polarized laser of propagating direction and beam intensity adjustable;Acoustooptic phase control unit, for the linear polarized laser of second optical path is acoustooptically modulated to change its phase, while the frequency offset of linear polarized laser of second optical path is compensated, to control the phase difference between the linear polarized laser of second optical path and the linear polarized laser of first optical path;Beam direction adjustment assembly, control two linear polarized laser simultaneously incident into the polarization beam combining unit to obtain target laser.The application simple structure, low in cost, can generate various pulse string with specific polarization mode, thereby solve the technical problems that laser polarization state control device constitutes complex, cost is high, control flexibility is poor, regulation and control frequency is low.

The present application provides a method and system for automated inspection of a microfabricated feature on a substrate. The disclosure utilizes manipulating laser polarization in combination with the excitation and emission process, in inspection applications. The application specifically discloses selecting the polarization of the laser light by adjusting a polarization manipulator or a quarter-waveplate and / or a half waveplate between the laser source and the substrate to impart polarization to the laser light. The polarization impacts using a polarization selected to improve fluorescence emission of certain features on a substrate. The selection can be made prior to run time or dynamically during the inspection tool runtime. If the polarization is not specifically selected, then the microfabricated features may not emit much fluorescence.