Method for regulating and controlling crystalline silicon surface corrugated structure based on plasmoid lens effect

A technology of plasma and lens effect, applied in the field of femtosecond laser application, to achieve the effect of improving processing accuracy and controllability, and efficient and precise control

Active Publication Date: 2018-09-25
BEIJING UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the precise control of this structure is still a major problem restricting its practical engineering applications

Method used

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  • Method for regulating and controlling crystalline silicon surface corrugated structure based on plasmoid lens effect
  • Method for regulating and controlling crystalline silicon surface corrugated structure based on plasmoid lens effect

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Experimental program
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specific Embodiment 1

[0037] Taking control of the corrugated structure on the surface of crystalline silicon as an example, using the pre-plasma-like nanostructure construction of the present invention, the incident laser polarization state regulation method, the incident fundamental frequency femtosecond laser pulse is linearly polarized, and the specific processing steps are as follows:

[0038] Adjust the optical path to ensure that the incident direction of the laser is perpendicular to the surface of the processed sample;

[0039] (1) Sample preparation: In this embodiment, a 20nm thick gold film is plated on a substrate silicon sample of 10mm×10mm×1mm by magnetron sputtering;

[0040] (2) Light field shaping of the incident fundamental frequency femtosecond laser pulse: the frequency doubling crystal 14 is placed in the optical path, and the angle of the frequency doubling crystal 14 is adjusted to maximize the frequency doubling efficiency. After the fundamental frequency femtosecond laser p...

Embodiment 2

[0047] Taking control of the corrugated structure on the surface of crystalline silicon as an example, using the pre-plasma-like nanostructure construction of the present invention, the incident laser polarization state regulation method, the incident fundamental frequency femtosecond laser pulse used is circular polarization state, and the specific processing steps are as follows:

[0048] Other steps are identical with embodiment 1, and difference is: before step (4) energy regulation is carried out, add quarter-wave plate 5 in optical path, adjust quarter-wave plate 5, make wave plate optical axis direction and The included angle of the original laser polarization direction is 45° to obtain circularly polarized femtosecond laser pulses.

[0049] In step (7), the processing is carried out under the condition of circularly polarized femtosecond laser pulses, and a single circularly polarized femtosecond laser pulse is used to irradiate the plasmonic gold nanoring structure, an...

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Abstract

The invention relates to a method for regulating and controlling a crystalline silicon surface corrugated structure based on a plasmoid lens effect and belongs to the technical field of femtosecond laser application. According to the method, a metal nano-ring structure is processed on based silicon plated with a noble metal film in advance by fundamental frequency femtosecond laser pulse after single frequency multiplication is adopted, a second beam of single traditional fundamental frequency gauss femtosecond laser pulse acts on the nano-ring structure, and processing of a base crystalline silicon surface ring-shaped concentric corrugated structure is realized under the action of the plasmoid lens effect of a noble metal nano-structure. When linear polarization femtosecond laser pulse isadopted, the processed corrugated structure is distributed in a semi-ring shape and a corrugated symmetrical shaft is perpendicular to the laser polarization direction; when circular polarization femtosecond laser pulse is adopted, the processed corrugated structure is in a ring distribution shape in a centrosymmetric way. According to the method, efficient and accurate control of the surface periodical micro-nano structure form is realized, and crucial application value in the aspects of surface wettability and image storage is achieved.

Description

technical field [0001] The invention relates to the application field of femtosecond lasers, in particular to a method for controlling the corrugated structure on the surface of crystal silicon induced by femtosecond lasers based on the plasma-like lens effect. Background technique [0002] The surface properties of materials can be optimized by controlling the specific morphology and arrangement of surface micro-nano structures. Femtosecond laser surface micro-nano processing has aroused great interest since its appearance, and its research is also deepening. However, the interaction between femtosecond laser and materials is an extremely complicated process. The complicated processing parameters and numerous objects make the surface micro-nano structures present various morphological structures and arrangements. At the same time, the development of laser shaping technology is also It provides more degrees of freedom for the control of femtosecond laser-induced surface mic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/0622B23K26/352
CPCB23K26/0624
Inventor 韩伟娜刘富荣袁艳萍
Owner BEIJING UNIV OF TECH
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