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885results about How to "High repetition rate" patented technology

Method of deposition of thin films of amorphous and crystalline microstructures based on ultrafast pulsed laser deposition

Powerful nanosecond-range lasers using low repetition rate pulsed laser deposition produce numerous macroscopic size particles and droplets, which embed in thin film coatings. This problem has been addressed by lowering the pulse energy, keeping the laser intensity optional for evaporation, so that significant numbers of the macroscopic particles and droplets are no longer present in the evaporated plume. The result is deposition of evaporated plume on a substrate to form thin film of very high surface quality. Preferably, the laser pulses have a repetition rate to produce a continuous flow of evaporated material at the substrate. Pulse-range is typically picosecond and femtosecond and repetition rate kilohertz to hundreds of megahertz. The process may be carried out in the presence of a buffer gas, which may be inert or reactive, and the increased vapour density and therefore the collision frequency between evaporated atoms leads to the formation of nanostructured materials of increasing interest, because of their peculiar structural, electronic and mechanical properties. One of these is carbon nanotubes, which is a new form of carbon belonging to the fullerene (C60) family. Carbon nanotubes are seamless, single or multishell co-axial cylindrical tubules with or without dome caps at the extremities. Typically diameters range from 1 nm to 50 nm with a length >1 mum. The electronic structure may be either metallic or semiconducting without any change in the chemical bonding or adding of dopant. In addition, the materials have application to a wide range of established thin film applications.
Owner:AUSTRALIEN NAT UNIV

High power deep ultraviolet laser with long life optics

The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems producing a high repetition rate high power output beam. The invention includes solutions to a surface damage problem discovered by Applicants on CaF2 optics located in high pulse intensity sections of the output beam of prototype laser systems. Embodiments include an enclosed and purged beam path with beam pointing control for beam delivery of billions of output laser pulses. Optical components and modules described herein are capable of controlling ultraviolet laser output pulses with wavelength less than 200 nm with average output pulse intensities greater than 1.75×106 Watts/cm2 and with peak intensity or greater 3.5×106 Watts/cm2 for many billions of pulses as compared to prior art components and modules which failed after only a few minutes in these pulse intensities. Techniques and components are disclosed for minimizing the potential for optical damage and for reducing the pulse energy density to less than 100×10−6 J/cm3. Important improvements described in this specification have been grouped into the following subject matter categories: (1) Solution to CaF2 surface damage discovered by Applicants, (2) description of a high power ArF MOPA laser system, (3) description of beam delivery units, (4) polarization considerations (5) a high speed water-cooled auto shutter energy detector module and (6) other improvements.
Owner:CYMER INC

Rapid image registration method based on sub-image corner features

The invention discloses a rapid image registration method based on sub-image corner features. The method includes the specific steps: firstly, selecting a reference sub-image and a to-be-registered sub-image, selecting one sub-image from a reference image as the reference sub-image, and selecting one sub-image with the same coordinate space as the reference sub-image from a to-be-registered image as the to-be-registered sub-image; secondly, extracting corners of the reference sub-image and the reference sub-image; thirdly, performing feature description on the corners extracted from the reference sub-image and the reference sub-image to obtain a feature vector of each corner; fourthly, performing similarity measurement and feature matching on the feature vectors of the corners on the reference sub-image and the reference sub-image to obtain K matching point pairs; and fifthly, adopting a least square method to compute a transformation matrix H between the reference image and the to-be-registered image based on the K matching point pairs, and registering the to-be-registered image onto the reference image based on the transformation matrix H. By the method, the requirement for image matching precision can be met, and image matching speed is increased greatly.
Owner:BEIJING INSTITUTE OF TECHNOLOGYGY
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