The application discloses a kind of suitable for
voltage pulse trigger's superfast
avalanche transistor, including by lower to upper setting collector region
electrode, collector
electrode area n+Substrate layer, collector
electrode area n0Epitaxial layer, p+Base region layer and n+Emission region layer, p+Base region layer is equipped with annular deep well structure, deep well structure adopts SiO2-Si3N4;It also includes base electrode and emission electrode, the surface of collector electrode area n0Epitaxial layer is covered with a layer of
oxide layer,
oxide layer is covered with
metal field plate,
metal field plate is in contact with base electrode, the bottom of
metal field plate is in contact with p+Base region layer through
oxide layer, n+Emission region layer surface is covered with a layer of doped
oxygen semi-insulating polysilicon layer, the bottom of emission electrode is in contact with n+Emission region layer through doped
oxygen semi-insulating polysilicon layer.The application can effectively improve the dynamic opening speed of
avalanche transistor when base-emitter short-circuit,
voltage pulse trigger, optimize the
voltage output rising edge characteristics of
pulse generator based on
avalanche transistor.