A high power (HP) generator (10) and method for delivering pulsed high power having
high voltage and / or current values ​​to a capacitive load, in particular a
plasma process, comprising: several low power (LP) generators (14, 16, 18), Each LP generator (14, 16, 18) comprises an
energy storage component (C1, L1), and in use, the
energy storage component (C1, L1) is charged to a predetermined value associated with the
energy storage component; several low power (LP) generators (14, 16, 18), each LP generator (14, 16, 18) providing, in use, at its output an LP generator value corresponding to the value of an energy storage component (C1, C2, Cn, L1, L2, Ln) incorporated in the respective LP generator (14, 16, 18); a combiner (20), in which the LP generators (14, 16, 18) are electrically connected so that a combiner value at an output of the combiner (20) can be obtained which corresponds to an output value of the HP generator (10), the combiner value being higher, in use, than the LP generator value at the output of one of the LP generators (14, 16, 18), at least in some states of the HP generator (10); a
control unit (22) configured to select the contribution of the LP generators (14, 16, 18) to the output value of the HP generator (10) during the output delivery of the HP generator (10) in order to cause a rise and / or a decay of the pulses at the output of the combiner (20), A high power (HP) generator (10) and method, wherein charging energy for the LP generators (14, 16, 18) is provided via a
transformer (T1, T2...Tn) comprising a main winding (P1, P2...Pn) and a secondary winding (SW1, SW2...SWn) for each LP generator (14, 16, 18).