High-power- (HP-) generator (10) and method to deliver pulsed high power with a high value of
voltage and / or
high current value to a capacitive load, in particular to a
plasma process, comprising: - several low-power- (LP-) generators (14, 16,18), o each LP-generator (14, 16, 18) comprising an
energy storage component (Cl, LI), wherein in use the
energy storage component (Cl, LI) is charged to a predefined value related to the
energy storage component, o each LP-generator (14, 16, 18) supplying, in use, at its output an LP- generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP- generator (14, 16, 18), - a
coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a
coupling-value at the output of the
coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP- generators (14, 16, 18), - a
control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and / or decay of a pulse at the output of the coupling (20), - wherein the HP-generator (10) is at least partially directly liquid cooled, in particular by immersed
dielectric cooling liquid, in particular the LP- generators (14,16,18) are bathed by
dielectric cooling liquid.