113 results about "Plasma ignition" patented technology

The invention discloses a modular multi-fuel industrial burner plasma igniter with an efficient cooling structure. The modular multi-fuel industrial burner plasma igniter comprises an ignition module, an efficient cooling module, a fuel adaptation module and an intelligent control module. A plasma arc generator is arranged in the ignition module and is used for generating a high-temperature ignition source; the efficient cooling module adopts a multi-layer surrounding type flow channel design, and active heat management of the ignition module is achieved through forced circulation of a cooling medium; the fuel adaptation module supports rapid switching and stable supply of various fuels such as natural gas, fuel oil and biomass gas through standardized interfaces and pipelines; the intelligent control module integrates ignition control, fuel switching and thermal management strategies, monitors the system state in real time and automatically adjusts operation parameters. By means of the modular architecture and the efficient cooling technology, the problems that a traditional plasma igniter is prone to overheating damage, poor in adaptability and difficult to maintain under the high-temperature and multi-fuel working conditions are solved.

The invention provides an embedded multifunctional plasma flame stabilizer, and relates to the technical field of plasma ignition combustion supporting. The embedded multifunctional plasma flame stabilizer comprises an evaporative flame stabilizer and an embedded exciter, wherein the evaporative flame stabilizer is provided with a combustion area defined by apron boards; the embedded exciter is installed on the surface, facing the combustion area, of the apron board. The exciter is directly integrated on the inner side of the skirt board of the flame stabilizer, and the space utilization rate and the system integration degree are improved on the premise that the aerodynamic configuration and the installation mode are not changed. The discharge area of the exciter covers the backflow area, active free radicals can be generated and local heat can be released under complex and changeable conditions, the reaction activity of mixed gas is enhanced, the ignition delay time is shortened, the ignition boundary is expanded, meanwhile, atomization and mixing are improved, the combustion efficiency is improved, and flame quenching is restrained. The device has ignition assistance, continuous excitation and active thermochemical regulation and control capabilities, and is suitable for a compact combustion chamber environment.

The invention discloses a circuit integration device for plasma ignition based on direct current power supply, relates to the field of plasma ignition, and aims to solve the problems that an existing plasma ignition technology cannot be directly compatible with aviation low-voltage direct current and is poor in reliability. A core electronic function module comprises a high-frequency resonance inversion topological unit, an energy driving adjustment topological unit, a full-wave rectification topological unit, a control unit, an arc striking unit and an energy storage unit. The high-frequency resonant inversion topology unit converts input direct current into high-frequency alternating current pulse; the energy driving and adjusting topological unit drives and adjusts the high-frequency resonant inversion topological unit, so that the alternating voltage output by the high-frequency resonant inversion topological unit is increased to 400-430V; the full-wave rectification topological unit converts the alternating current voltage output by the high-frequency resonance inversion topological unit into stable direct current high voltage and supplies power to the control unit, the arc striking unit and the energy storage unit.

The invention discloses a multi-axis servo regulation and control liquid ammonia burner based on smoke backflow liquid ammonia vaporization and a control method, and relates to the field of clean energy equipment, the multi-axis servo regulation and control liquid ammonia burner comprises a liquid ammonia burner body, an annular liquid ammonia flow servo regulation mechanism, an annular liquid ammonia conveying and distributing mechanism, a liquid ammonia plasma ignition device, an ammonia combustion flame scanning mechanism and the like. The multi-axis servo motor drives the execution valves to adjust the flow ratio of liquid ammonia fuel to hot air in the fluid channels, meanwhile, liquid ammonia is vaporized through heat exchange of backflow smoke in the boiler and then fully premixed with the hot air to enter the boiler to be combusted, and efficient combustion of the ammonia fuel of the coal-fired boiler is achieved. The technical problems of large latent heat of vaporization of liquid ammonia fuel, continuous clean combustion of ammonia fuel, ammonia escape and control of NOX generated by combustion are solved.

The application discloses a strut plate embedded plasma igniter suitable for a scramjet engine and relates to the technical field of the scramjet engine.The strut plate embedded plasma igniter comprises a strut plate main body, and fuel main flow channels, oxygen main flow channels and an embedded channel are arranged on the strut plate main body; a plurality of fuel injection holes are arranged on the side wall of the fuel main flow channel; the oxygen main flow channel is in communication with the embedded channel, and an anode core is arranged in the embedded channel; a detachable head is arranged at one end of the embedded channel facing a combustion chamber, and a plurality of communication holes are arranged on the detachable head. A circular axis-symmetrical hypersonic combustion chamber is connected to the outside of the strut plate main body. The strut plate embedded plasma igniter suitable for the scramjet engine has the advantages of a stable combustion strut plate and a plasma igniter, has the characteristics of good insulation and partial stable combustion, and can ensure stable ignition of the axis-symmetrical supersonic combustion chamber.

The invention belongs to the technical field of combustion equipment, and relates to a plasma ignition system and a using method thereof. The system comprises a plasma generator, a combustor, a power supply system, a carrier working medium system and a cooling water system, an anode and a cathode of the plasma generator are coaxially arranged to form an electric arc cavity and a surrounding cooling water cavity, and the anode is provided with a compressed air inlet and a plasma jet outlet; the plasma combustor is sequentially and coaxially sleeved with a first-stage center cylinder, a second-stage combustion cylinder and an outer wall cylinder from inside to outside, the first-stage center cylinder communicates with the jet flow outlet, and the outer wall cylinder is provided with a pulverized coal inlet; the power supply system supplies power to the generator through the isolation transformer and the rectifier cabinet. The carrier working medium system supplies air to the compressed air inlet; the cooling water system enables demineralized water to circulate in the cooling water cavity. Efficient and stable ignition and low-nitrogen combustion of pulverized coal are achieved, the ignition reliability is remarkably improved, the system service life is remarkably prolonged, and the operation automation level is remarkably improved.

The invention relates to the technical field of ship power device fault diagnosis, and discloses a marine gas turbine plasma ignition layering fault troubleshooting method, which comprises the following steps: aiming at the characteristics of a plasma ignition system double-loop structure in a severe ship environment, firstly constructing a special safety test environment consisting of an insulating box body and an observation window; determining that the basic energy is normal by measuring primary electrical parameters; based on the core thought of a control variable method, a hierarchical cross-exchange test process for an aviation plug interface and an igniter body is designed, and a complete decision tree model is constructed by comparing logic changes of ignition states before and after exchange, so that a fault source is accurately isolated from a control board card, an ignition cable or an igniter; according to the invention, an experience-dependent troubleshooting process is converted into a standardized and visual technical operation process, and finally, the problems of low troubleshooting efficiency, high safety risk and great dependence on personnel experience in the prior art are effectively solved.

The invention belongs to the technical field of remote plasma sources, and discloses a remote plasma source system based on 172nm ultraviolet light auxiliary starting, which comprises a remote plasma source and an ultraviolet light pre-ionization device at a gas inlet of the remote plasma source, the ultraviolet pre-ionization device comprises a shell, the shell is provided with a gas flow channel and a sealed gas cavity which are separated by a light-transmitting partition plate, the sealed gas cavity is filled with xenon, and the gas flow channel is communicated with a gas inlet of a remote plasma source and used for circulation of process gas; the positive electrode plate and the negative electrode plate are arranged on two opposite sides of the shell and are used for exciting the xenon to generate 172nm ultraviolet light when alternating voltage is introduced; the ultraviolet light can penetrate through the light-transmitting partition plate to enter the gas flow channel; the mesh electrode is arranged in the gas flow channel and is used for being matched with the ultraviolet light to carry out pre-ionization treatment on the process gas when the mesh electrode is electrified; the method has the advantages that plasma starting of high-impedance gas is efficiently achieved, the starting success rate and the process stability are improved, and meanwhile pollution is avoided.

The embodiment of the present application provides a method for determining plasma ignition, a control method of a semiconductor process equipment, and the semiconductor process equipment, and the semiconductor process equipment comprises a radio frequency coil, and the method comprises the following steps: monitoring a change rate of an electric parameter of the radio frequency coil after radio frequency power is applied to the radio frequency coil, the change rate of the electric parameter comprising a change rate of a current flowing through the radio frequency coil or a change rate of a voltage across the radio frequency coil; and determining plasma ignition when a ratio of the change rate of the electric parameter detected at a current moment to the change rate of the electric parameter detected at a previous moment exceeds a preset ratio threshold value or a difference value exceeds a preset difference threshold value, so that the ignition moment of the semiconductor process equipment can be accurately judged according to plasma ignition, the next radio frequency system is prevented from being started before the semiconductor process equipment is ignited, and the safety of the semiconductor process equipment is improved.

A substrate processing apparatus, a substrate processing method, and a method of fabricating a semiconductor device are provided. The substrate processing method includes providing a process gas, generating a preliminary etchant, which includes a first etchant and a second etchant, from the process gas through plasma ignition, generating a process etchant by controlling a composition ratio of the preliminary etchant, and performing a selective etching of the substrate with the process etchant.

The application provides a plasma electrically generated fire preparation system, process and application, the system comprises a working condition detection module, a multi-layer grid discharge structure module, a discharge parameter decision module and a high-voltage discharge control module; the working condition detection module is used for real-time detection of the gas working condition parameters in the ignition cavity; the multi-layer grid discharge structure module is arranged in the ignition cavity and is used for forming a plurality of metal mesh grid electrodes with optional spacing; the discharge parameter decision module is used for determining the ignition discharge parameters according to the current gas working condition parameters; the high-voltage discharge control module is used for applying high-voltage pulse voltage to the selected metal mesh grid electrode according to the ignition discharge parameters to complete the discharge fire generation process; the application sets the multi-layer metal mesh grid electrode and combines the gas working condition parameters to make self-adaptive decisions on the discharge layer and the ignition voltage, improves the success rate and stability of the plasma ignition, and enhances the adaptability of the system to the complex gas working condition changes.

A plasma ignition and combustion-supporting head excited by a central sliding arc discharge is disclosed. A fuel nozzle is located within a combustion head mounting base, maintaining a discharge distance between the fuel nozzle outlet discharge end face and the inner ring end face of the combustion head mounting base. A high-voltage electrode is located on a ceramic electrode mounting base, maintaining a discharge distance between the high-voltage electrode inlet end face and the fuel nozzle outlet end face. This invention achieves plasma discharge through the inner ring of the combustion head mounting base and the high-voltage electrode. A rotating sliding arc is formed by a first-stage strong swirling current. Under the action of a convergence segment at a specific angle, the arc is elongated towards the central region of fuel atomization, defining the discharge area. The arc development and breakdown are achieved by the incoming flow, placing the arc in the optimal ignition and combustion-supporting position, which is beneficial for the contact and combustion of the arc and fuel. The densely distributed discharge arc in the fuel atomization area improves combustion efficiency, reduces pollutant emissions, better achieves ignition and combustion-supporting effects, increases combustion stability, and widens the combustion range of the combustion chamber.

The invention discloses a plasma ignition combustion-supporting exciter for a three-swirl combustion chamber of an aero-engine. The plasma ignition combustion-supporting exciter comprises a three-stage swirler of an integrated structure, a ceramic insulating section and a swirl fuel nozzle, the second-stage cyclone is arranged on the outer wall surface of an inner ring of the first-stage cyclone, the third-stage cyclone is arranged on the outer wall surface of an isolating ring of the second-stage cyclone, and the first-stage cyclone is arranged on the outer wall surface of the ceramic insulating section; a rotational flow fuel nozzle is inserted into the inner wall surface of the ceramic insulating section; the three-stage cyclone design is adopted, the advantages of forming strong turbulence, stabilizing a backflow area and uniformly mixing gas are achieved, the ignition and flameout performance of a combustion chamber is improved, and the working stability and reliability of an engine are improved; a small-size insulation structure is adopted, high-density space small-area discharging is achieved, and the problems that in the prior art, the working effect is poor due to the fact that a discharging area is not ideal, flameout is caused under specific working conditions, and the working performance is poor due to the fact that ceramic materials are insufficient in strength are solved.

The utility model relates to the technical field of microwave plasma, in particular to a plasma ignition electrode assembly, which comprises an electrode stem outer rod, an electrode tip and a feeding rod, the feeding rod is arranged in the center inside the electrode stem outer rod, one end of the feeding rod is in threaded connection with the inside of the electrode tip, and the other end of the feeding rod is in threaded connection with the inside of the electrode tip. One end of the feeding rod is connected with the electrode tip, the other end of the feeding rod is provided with a feeding pipe joint communicated with the feeding rod, the electrode stem outer rod is connected with the electrode tip, the feeding pipe joint, the feeding rod and the electrode tip are communicated to form a feeding channel, and the plasma ignition electrode assembly further comprises a cooling assembly used for cooling the electrode stem outer rod, the electrode tip and the feeding rod. The feeding pipe connector, the feeding rod and the electrode tip are designed to be communicated to form the feeding channel, materials can be directly fed in, sequentially pass through the feeding pipe connector, the feeding rod and the electrode tip and finally are directly fed into the center of the torch body, the materials can be completely treated, and even solid materials can be completely treated.

The present invention proposes a plasma ignition exciter with an adaptive flame adjustment function. The temperature monitor and the pressure monitor are set to monitor the working conditions of different temperature and different air pressure environments, and the environmental controller and the inverter controller are set to adjust the working state according to different working environments. The current controller is used to increase the input current, and the discharge controller is used to increase the discharge frequency to increase the output power, increase the plasma flame, and improve the ignition ability of the ignition exciter. This solves the problem that the traditional ignition exciter has a single output state during use and cannot meet the higher demand for ignition ability under harsh environmental conditions. It not only helps to improve the intelligence level of the ignition exciter, but also helps to improve the working stability and ignition ability of the engine in harsh environments.

The invention discloses an ammonia catalytic cracking device adopting a plasma ignition technology and an operation method, and belongs to the field of hydrogen production through ammonia decomposition, and the ammonia catalytic cracking device mainly comprises a plasma ammonia burner, a high-temperature mixer, a catalytic ammonia cracking module, a heat exchange module and a hydrogen separation and purification module. The plasma ammonia burner performs plasma discharge ignition at the starting stage, assists ammonia combustion to generate high-temperature tail gas, the high-temperature tail gas is mixed with liquid ammonia spray to form high-temperature mixed gas, the high-temperature mixed gas is introduced into the catalytic ammonia cracking module, and hydrogen-rich cracking gas is generated under the action of a catalyst; plasma discharge is not needed in the working stage, and hydrogen-rich pyrolysis gas is introduced into the combustor to be directly combusted. The pyrolysis gas heats liquid ammonia in the heat exchange module to improve the energy utilization efficiency of the system, and the cooled pyrolysis gas enters the separation module to purify hydrogen. According to the ammonia cracking device, high-temperature tail gas generated by ammonia-rich combustion of the combustor is directly mixed to preheat ammonia gas, a two-phase heat exchanger does not need to be independently arranged, the device is compact, the energy utilization rate is high, and no harmful combustion tail gas is discharged.

The utility model discloses an electrostatic chuck, comprising an electrostatic chuck body which is provided with an electrostatic adsorption surface which is used for fixing a wafer and is provided with a mounting groove, and the mounting groove is communicated with the outside; the adsorption removing assembly is provided with a contact end, the contact end is arranged in the mounting groove and can move in the thickness direction of the electrostatic chuck body, and when the contact end abuts against a wafer, the contact end is used for removing the adsorption force between the electrostatic adsorption surface and the wafer. According to the utility model, when plasma ignition is abnormal, the contact end can move along the thickness direction of the electrostatic chuck body to directly abut against a wafer, so that charges on the wafer can be quickly led out, the wafer is prevented from staying in equipment for a long time, and the risk of wafer damage is reduced.

This application provides a plasma ignition device, a semiconductor thin film apparatus, and an ignition control method, relating to the field of electronic technology. The plasma ignition device includes: a radio frequency (RF) power supply, an adjustment device, an RF matching unit, a plasma processing unit, a control unit, and a detection unit. The RF power supply is connected to the RF matching unit via the adjustment device. The RF matching unit is also connected to the upper electrode of the plasma processing unit, and the lower electrode of the plasma processing unit is grounded. The detection unit is connected to the upper electrode of the plasma processing unit, and the control unit is connected to the detection unit. The control unit is also connected to the adjustment device. This reduces the plasma ignition time, improves the precision of the thin film process, and reduces particulate contamination.

The application relates to the field of power electronics, and discloses a frequency-adjustable plasma ignition power supply circuit which comprises a trigger capacitor circuit, an energy storage capacitor circuit and a discharge control circuit. The application has the beneficial effect that the traditional aviation ignition is improved by the ignition circuit, the plasma ignition demand can be met, high-voltage pulse electricity with a stable frequency and a stable voltage is output to a plasma ignition electrode, an electric arc is formed between the negative and positive electrodes of the ignition electrode through an electrical method, high-temperature plasma is generated in a working medium, and the purpose of igniting fuel is achieved.

In a laser-pumped plasma light source (100) having a gas-filled chamber (1), the device for plasma ignition is a solid-state laser system (7) which generates two pulsed laser beams (8, 9) focused into the chamber (1): a first beam (8) is generated in free-running mode, a second beam (9) is generated in Q-switched mode. The solid-state laser system (7) comprises a single active element (10), a radiation source (11) for pumping the active element (10) and an optical resonator (12, 13) providing a plurality of passages of the laser beams through the active element (10). One optical resonator (13) is equipped with a Q-switch (14) mounted on the path of the second beam (9) so that the Q-switch overlaps only a part (15b) of the cross section of the laser beam.

An impedance characteristic measuring device for a capacitively coupled plasma processor, characterized in that the impedance characteristic measuring device comprises: an upper contact plate and a lower contact plate, wherein the upper contact plate is used to contact the lower surface of a gas shower head of the capacitively coupled plasma processor, and the lower contact plate is used to contact the upper surface of an electrostatic chuck in the capacitively coupled plasma processor; at least one elastic conductive part is located between the upper contact plate and the lower contact plate, and the elastic conductive part provides elastic force, so that the upper and lower contact plates are in close contact with the gas shower head and the electrostatic chuck respectively after the distance between the upper and lower contact plates is compressed when the impedance characteristic measuring device measures the impedance characteristic curve of the capacitively coupled plasma processor. The impedance characteristic curve of the plasma processor is accurately measured without plasma ignition.

The invention provides a welding machine (100) and a method for igniting a plasma main arc (2). The welding machine (100) comprises: a tungsten electrode (101), a plasma nozzle (102), and a control device (120) configured to perform a plasma ignition sequence, which includes at least: Applying (S10) a first and second potential (V1, V2) to generate a pilot arc (1); Applying (S30) the second potential (V2) to a workpiece electrode (104) connected to a workpiece (4); Switching off (S40) the second potential (V2) to generate a main plasma arc (2); Check (S50) whether the main plasma arc (2) is burning and, if not, carry out (S60) a measure stage comprising reapplying (S61) the second potential to the plasma nozzle (102) and switching off (S62) the second potential (V2); and Check (S70) whether the action stage was successful and, if not, carry out (S110, S130) at least one further action stage, each comprising switching on an additional voltage source (131, 132).

The present invention proposes a method for calculating the interior ballistic characteristic parameters of a mixed charge under plasma ignition. The method includes determining the discharge parameters of a pulse power supply; establishing a formula for the gunpowder burning rate under plasma enhancement; determining the shape functions of two gunpowders; establishing a projectile motion equation and an electrothermal chemical launch interior ballistic equation; substituting the input electrical energy into the electrothermal chemical launch interior ballistic equation, combining the gunpowder burning rate formula and the shape function to perform a time-advancing solution, and finally using the projectile motion equation and the electrothermal chemical launch interior ballistic equation to obtain the internal pressure and projectile velocity curve during the projectile's discharge process. The present invention solves the problem of existing electrothermal chemical launch interior ballistic models that only consider a single charge structure, and can quickly and effectively calculate the internal pressure and projectile velocity curve during the discharge process of an electrothermal chemical launch projectile with a mixed charge structure.

The utility model relates to the technical field of power plant ignition, in particular to a plasma water-cooling-free igniter which comprises a plasma igniter body. A plasma generator is mounted on one side of the plasma igniter, and one side of the plasma generator extends into the plasma igniter; a protection mechanism is installed on one side of the plasma igniter, one side of the protection mechanism communicates with a fixed gas pipe, and the outer side of the fixed gas pipe is fixedly connected with the plasma igniter. Power air pipes are arranged on the upper side and the lower side of the protection mechanism. During use, when flames are pushed into a hearth, an external air pump is started to drive gas to enter the fixed air pipe, then the gas enters the protective cover through the fixed air pipe and is exhausted through the air nozzle, at the moment, the secondary combustion chamber can be cooled, and the flames are prevented from damaging the igniter; and meanwhile, the air flow cooling mode can avoid influence on coal bodies in the hearth, and waste of water resources is avoided.

The invention discloses a Y-shaped dielectric barrier plasma ignition device and an operation method thereof. The Y-shaped dielectric barrier plasma ignition device comprises a Y-shaped combustion structure. The Y-shaped combustion structure comprises a Y-shaped combustion tube, a dielectric barrier discharge assembly and a high-voltage power supply. The Y-shaped combustion pipe comprises two inlet branch pipes and an outlet main pipe, and the dielectric barrier discharge assembly is arranged on at least one inlet branch pipe and connected with the high-voltage power source. According to the Y-shaped dielectric barrier plasma ignition device, active particles such as H, O and OH can be efficiently generated and transported, and reliable and stable ignition of ammonia-air mixed gas is achieved under low energy consumption.

This invention relates to the field of plasma ignition and combustion technology, and particularly to a low-concentration gas burner with plasma-assisted combustion and its operation method, which prevents backfire. The technical solution includes a primary path assembly comprising a first flame-arresting cyclone and a plasma discharge section. The plasma discharge section is located downstream of the first flame-arresting cyclone and includes a central anode and a grounding electrode sleeve, which are coaxially arranged, forming a discharge gap between them. It also includes a secondary path assembly comprising a secondary air inlet sleeve and a second flame-arresting cyclone. This invention integrates multi-stage composite flame arrest, cyclone stabilization, Laval tube acceleration, and plasma ignition through coaxial nesting, resulting in a compact structure, high flame arrest efficiency, good ignition and flow field coordination, reliable operation, and strong adaptability to various operating conditions.

The utility model provides a plasma ignition system for a coal-fired boiler. The plasma ignition system for the coal-fired boiler comprises a coal-fired boiler body, and a plasma burner communicated with a hearth of the coal-fired boiler body is arranged in the coal-fired boiler body; the plasma generator penetrates through the coal-fired boiler body, communicates with the plasma combustor and is used for generating high-temperature plasma jet flow and introducing the high-temperature plasma jet flow into the plasma combustor; a coal outlet of the coal mill communicates with the plasma combustor through a pulverized coal conveying pipeline, and the end, close to the coal outlet of the coal mill, of the pulverized coal conveying pipeline communicates with an air supply pipe; and the combustion-supporting pipeline penetrates through the coal-fired boiler body, communicates with a hearth of the coal-fired boiler body and is used for introducing combustion-supporting gas into the hearth of the coal-fired boiler body. Compared with the mode that a coal-fired boiler is ignited through an oil gun in the prior art, the high-temperature plasma jet flow generated by the plasma generator is used for igniting the pulverized coal, the fuel oil consumption is reduced, and the ignition efficiency is improved.

The present disclosure relates to the field of plasma ignition, and disclosed are a plasma ignition system, method and apparatus, an electronic device, and a storage medium. The main technical solution comprises: an ignition module, an electrical module, a gas supply module, a driving module, a cooling module, and a control module; the ignition module is placed on the wall of a boiler; the electrical module, the gas supply module, the driving module, the cooling module and the control module are separately connected to the ignition module; pulverized coal is placed in the boiler; the driving module, the gas supply module, the cooling module and the control module are separately connected to the electrical module; and the gas supply module and the cooling module are separately connected to the control module. Compared with the related art, in embodiments of the present disclosure, the plasma ignition system is used to generate plasma flame to ignite the pulverized coal in the boiler without using fuel oil, thereby reducing ignition costs.

The invention provides a fan mill lignite boiler plasma ignition method, system and related device, the fan mill lignite boiler plasma ignition system comprises a plasma pulverized coal burner and a plasma generator, and the plasma generator is obliquely inserted and installed on the side face of a spray pipe of the plasma pulverized coal burner in the radial direction; the technical problem that the plasma generator cannot be axially installed due to the fact that the arrangement positions of the fan mill pulverized coal pipeline and the combustor are limited is effectively solved, and the plasma generator is particularly suitable for the special structure that the distance between a pulverized coal elbow and a combustor spray pipe is long and the height is inconsistent in a fan mill pulverizing system.

The invention relates to the technical field of engines, in particular to a plasma ignition combustion chamber and an aero-engine. The plasma ignition combustion chamber comprises an inner casing and an outer casing, and a first inlet and a first space which are communicated with each other are formed between the inner casing and the outer casing; a second inlet and a second space which communicate with each other are formed between the flame tube inner ring and the flame tube outer ring, a nozzle is arranged at the communicating position of the second inlet and the second space, and a plurality of openings are formed in the positions, close to the nozzle, of the flame tube outer ring and / or the flame tube inner ring in the circumferential direction of the flame tube at intervals; and the sliding arc plasma generating device is arranged at the position, close to the opening, in the first space and connected with the flame tube outer ring and / or the flame tube inner ring, the sliding arc plasma generating device comprises a positive electrode ring and a negative electrode ring which are arranged at an interval, and the opening is arranged right opposite to the minimum distance between the positive electrode ring and the negative electrode ring. The problems that an existing plasma ignition combustion chamber needs to depend on cross flame between adjacent nozzles to achieve ignition of a whole ring, and the ignition efficiency is low are solved.