157 results about "Plasma ignition" patented technology

The invention relates to the technical field of plasma ignition, in particular to a split type plasma ignition device and ignition system for passivating gunpowder, which comprises an ignition tube assembly and an oscillation control assembly, the ignition tube assembly comprises an ignition tube, gunpowder and a hollow resonance coil; the oscillation control assembly comprises a coil support, an excitation coil and an oscillator circuit module. The excitation coil on the coil support is used for being matched with an insulation tube in an ignition tube in an inserted mode. An ignition pulse excites an oscillator circuit module to generate a high-frequency excitation signal, the high-frequency excitation signal is released by an excitation coil and coupled to a hollow resonance coil in an electromagnetic induction mode to form LC resonance, the LC resonance enables a discharge part to generate a high-intensity electric field, the high-intensity electric field excites plasmas on the surface of gunpowder to ignite the gunpowder, and ignition is completed. The device breaks through multiple limitations of a traditional ignition mode, and intrinsic safety and high reliability of passivation agent ignition are achieved.

The utility model relates to the technical field of new energy, in particular to a combined cooling heating and power system based on pure ammonia fuel. A pure ammonia fuel supply system comprises a liquid ammonia temperature adjusting device, a liquid ammonia evaporation device, an ammonia gas cracking device, a gas storage adjusting device and plasma ignition combustors, a first plasma ignition combustor is arranged in the ammonia gas cracking device, and a second plasma ignition combustor is arranged between the liquid ammonia evaporation device and a boiler. Rapid ignition and stable and continuous combustion of the pure ammonia fuel are achieved, then the working stability of an internal combustion engine generator set, a gas turbine generator set, a fuel cell and a boiler using the pure ammonia fuel is improved, meanwhile, due to the fact that the pure ammonia fuel is used, greenhouse gas emission is reduced, and the air quality is improved.

The utility model relates to the technical field of ammonia energy utilization, in particular to a gas supply adjusting device based on pure ammonia fuel. The gas supply adjusting device comprises a gas supply pipeline, an igniter gas supply unit and a main furnace fire head gas supply assembly, the main furnace fire head gas supply assembly comprises a first-stage gas supply unit, a second-stage gas supply unit to an n-stage gas supply unit which are connected in parallel, and the gas supply flow is sequentially reduced from the first-stage gas supply unit to the n-stage gas supply unit. Due to the fact that the main furnace fire head gas supply assembly comprises the multiple stages of gas supply units which are connected in parallel, and the gas supply flow is sequentially reduced, when the combustion flow needs to be increased and the heating capacity needs to be improved, the low-stage gas supply units can be started, and gear shifting type adjustment is achieved. And meanwhile, as the igniter gas supply unit is provided with the throttling orifice assembly to adjust the gas flow, small-flow adjustment of gas can be achieved, the flow entering the plasma ignition burner can be accurately controlled, and the success rate of ignition of the igniter in the plasma ignition burner is increased.

The invention discloses an enhanced plasma ignition system and method, and belongs to the technical field of low-temperature plasma ignition and combustion supporting, the system comprises an electric spark ignition system, a first one-way conduction module, a second one-way conduction module, a discharge enhancement module, a plasma unit and an electric control module; the first one-way conduction module is connected in series with the electric spark ignition system, and the second one-way conduction module is connected in series with the discharge enhancement module; the electric control module is connected with the electric spark ignition system, the discharge enhancement module, the first one-way conduction module and the second one-way conduction module and then is connected with the plasma unit. The transition of plasma discharge from an electric spark mode to arc plasma is realized, the effective enhancement of the ignition energy, plasma density, temperature and active free radicals of the plasma igniter is realized, the equipment is simple, the efficiency is high, the cost is low, and instantaneous high power and high ignition energy are easy to realize.

The invention discloses a modular multi-fuel industrial burner plasma igniter with an efficient cooling structure. The modular multi-fuel industrial burner plasma igniter comprises an ignition module, an efficient cooling module, a fuel adaptation module and an intelligent control module. A plasma arc generator is arranged in the ignition module and is used for generating a high-temperature ignition source; the efficient cooling module adopts a multi-layer surrounding type flow channel design, and active heat management of the ignition module is achieved through forced circulation of a cooling medium; the fuel adaptation module supports rapid switching and stable supply of various fuels such as natural gas, fuel oil and biomass gas through standardized interfaces and pipelines; the intelligent control module integrates ignition control, fuel switching and thermal management strategies, monitors the system state in real time and automatically adjusts operation parameters. By means of the modular architecture and the efficient cooling technology, the problems that a traditional plasma igniter is prone to overheating damage, poor in adaptability and difficult to maintain under the high-temperature and multi-fuel working conditions are solved.

The invention discloses a plasma ignition and combustion-supporting cooperated cavity stable combustion ammonia burner which comprises a three-stage plasma ignition and combustion-supporting device and a three-stage fuel and air supply system, and the three-stage plasma ignition and combustion-supporting device comprises a first-stage plasma ignition and combustion-supporting device, a second-stage plasma ignition and combustion-supporting device and a third-stage fuel and air supply system. The second-stage plasma ignition and combustion-supporting device, the third-stage plasma ignition and combustion-supporting device and the three-stage fuel and air supply system are respectively a first-stage fuel and air supply system, a second-stage fuel and air supply system and a third-stage fuel and air supply system. The problems of low flame propagation speed, high ignition energy and the like existing in ammonia fuel combustion at present are solved, stable combustion of pure ammonia can be realized under the condition that hydrogen or other fossil fuels are not doped into ammonia gas by adopting a multi-stage plasma ignition and combustion-supporting device, assisting ammonia combustion and combining a bluff body combustion stabilizer, and a three-stage combustion stabilizing technology is adopted, so that stable combustion of pure ammonia is realized. And the stable combustion range of ammonia gas can be greatly expanded.

An improved ignition and power supply method for a laser or processing plasma in a discharge chamber 30 includes: a. supplying power from an output port 24 of an amplifier 12 to the discharge chamber 30, where the amplifier 12 includes at least two amplifier path portions 14, 16 each supplying a signal to a coupler 22, the coupler 22 having an output port 24 and an isolation port 26 and being configured to combine signals depending on an amplitude relationship and / or a phase relationship and supply power to the output port 24 and / or the isolation port 26; b. controlling impedance switching units 27, 27a, 27b connected to the isolation port 26 and a ground 39 according to a first control mode to ignite the laser or processing plasma; and c. controlling impedance switching units 27, 27a, 27b connected to the isolation port 26 according to a second control mode to operate the laser or maintain the processing plasma in the discharge chamber 30.

The invention provides an embedded multifunctional plasma flame stabilizer, and relates to the technical field of plasma ignition combustion supporting. The embedded multifunctional plasma flame stabilizer comprises an evaporative flame stabilizer and an embedded exciter, wherein the evaporative flame stabilizer is provided with a combustion area defined by apron boards; the embedded exciter is installed on the surface, facing the combustion area, of the apron board. The exciter is directly integrated on the inner side of the skirt board of the flame stabilizer, and the space utilization rate and the system integration degree are improved on the premise that the aerodynamic configuration and the installation mode are not changed. The discharge area of the exciter covers the backflow area, active free radicals can be generated and local heat can be released under complex and changeable conditions, the reaction activity of mixed gas is enhanced, the ignition delay time is shortened, the ignition boundary is expanded, meanwhile, atomization and mixing are improved, the combustion efficiency is improved, and flame quenching is restrained. The device has ignition assistance, continuous excitation and active thermochemical regulation and control capabilities, and is suitable for a compact combustion chamber environment.

The invention discloses a circuit integration device for plasma ignition based on direct current power supply, relates to the field of plasma ignition, and aims to solve the problems that an existing plasma ignition technology cannot be directly compatible with aviation low-voltage direct current and is poor in reliability. A core electronic function module comprises a high-frequency resonance inversion topological unit, an energy driving adjustment topological unit, a full-wave rectification topological unit, a control unit, an arc striking unit and an energy storage unit. The high-frequency resonant inversion topology unit converts input direct current into high-frequency alternating current pulse; the energy driving and adjusting topological unit drives and adjusts the high-frequency resonant inversion topological unit, so that the alternating voltage output by the high-frequency resonant inversion topological unit is increased to 400-430V; the full-wave rectification topological unit converts the alternating current voltage output by the high-frequency resonance inversion topological unit into stable direct current high voltage and supplies power to the control unit, the arc striking unit and the energy storage unit.

The invention discloses a multi-axis servo regulation and control liquid ammonia burner based on smoke backflow liquid ammonia vaporization and a control method, and relates to the field of clean energy equipment, the multi-axis servo regulation and control liquid ammonia burner comprises a liquid ammonia burner body, an annular liquid ammonia flow servo regulation mechanism, an annular liquid ammonia conveying and distributing mechanism, a liquid ammonia plasma ignition device, an ammonia combustion flame scanning mechanism and the like. The multi-axis servo motor drives the execution valves to adjust the flow ratio of liquid ammonia fuel to hot air in the fluid channels, meanwhile, liquid ammonia is vaporized through heat exchange of backflow smoke in the boiler and then fully premixed with the hot air to enter the boiler to be combusted, and efficient combustion of the ammonia fuel of the coal-fired boiler is achieved. The technical problems of large latent heat of vaporization of liquid ammonia fuel, continuous clean combustion of ammonia fuel, ammonia escape and control of NOX generated by combustion are solved.

The application discloses a strut plate embedded plasma igniter suitable for a scramjet engine and relates to the technical field of the scramjet engine.The strut plate embedded plasma igniter comprises a strut plate main body, and fuel main flow channels, oxygen main flow channels and an embedded channel are arranged on the strut plate main body; a plurality of fuel injection holes are arranged on the side wall of the fuel main flow channel; the oxygen main flow channel is in communication with the embedded channel, and an anode core is arranged in the embedded channel; a detachable head is arranged at one end of the embedded channel facing a combustion chamber, and a plurality of communication holes are arranged on the detachable head. A circular axis-symmetrical hypersonic combustion chamber is connected to the outside of the strut plate main body. The strut plate embedded plasma igniter suitable for the scramjet engine has the advantages of a stable combustion strut plate and a plasma igniter, has the characteristics of good insulation and partial stable combustion, and can ensure stable ignition of the axis-symmetrical supersonic combustion chamber.

The invention belongs to the technical field of combustion equipment, and relates to a plasma ignition system and a using method thereof. The system comprises a plasma generator, a combustor, a power supply system, a carrier working medium system and a cooling water system, an anode and a cathode of the plasma generator are coaxially arranged to form an electric arc cavity and a surrounding cooling water cavity, and the anode is provided with a compressed air inlet and a plasma jet outlet; the plasma combustor is sequentially and coaxially sleeved with a first-stage center cylinder, a second-stage combustion cylinder and an outer wall cylinder from inside to outside, the first-stage center cylinder communicates with the jet flow outlet, and the outer wall cylinder is provided with a pulverized coal inlet; the power supply system supplies power to the generator through the isolation transformer and the rectifier cabinet. The carrier working medium system supplies air to the compressed air inlet; the cooling water system enables demineralized water to circulate in the cooling water cavity. Efficient and stable ignition and low-nitrogen combustion of pulverized coal are achieved, the ignition reliability is remarkably improved, the system service life is remarkably prolonged, and the operation automation level is remarkably improved.

The invention relates to the technical field of ship power device fault diagnosis, and discloses a marine gas turbine plasma ignition layering fault troubleshooting method, which comprises the following steps: aiming at the characteristics of a plasma ignition system double-loop structure in a severe ship environment, firstly constructing a special safety test environment consisting of an insulating box body and an observation window; determining that the basic energy is normal by measuring primary electrical parameters; based on the core thought of a control variable method, a hierarchical cross-exchange test process for an aviation plug interface and an igniter body is designed, and a complete decision tree model is constructed by comparing logic changes of ignition states before and after exchange, so that a fault source is accurately isolated from a control board card, an ignition cable or an igniter; according to the invention, an experience-dependent troubleshooting process is converted into a standardized and visual technical operation process, and finally, the problems of low troubleshooting efficiency, high safety risk and great dependence on personnel experience in the prior art are effectively solved.

The present invention claims protection for an explosive-free electronic detonator controlled by a high-voltage analog circuit integrated chip, specifically belonging to the technical field of explosive-free electronic detonators; the technical problem to be solved is: to provide an improvement in the hardware structure of an explosive-free electronic detonator controlled by a high-voltage analog circuit; the technical solution adopted to solve the technical problem is: one end of the printed circuit board welded to the plasma ignition device is encapsulated in a card waist through a plastic sealing plug; the detonator metal shell is connected to the charge shell as a whole through the card waist, and a detonator charge structure is arranged inside the charge shell; a high-voltage analog circuit integrated chip, an MCU microprocessor chip and a high-voltage energy storage capacitor are welded on the printed circuit board, and a circuit board control port is provided at the other end of the printed circuit board, and the circuit board control port is externally connected to a two-wire control pin line that is remotely connected to the detonator, and the two-wire control pin line is encapsulated in the card port through a sealing plug; the present invention is applied to explosive-free electronic detonators.

The utility model discloses a gun head for a methanol ignition device of a pulverized coal fired boiler, which comprises a methanol ignition system and an efficient gun head, the methanol ignition system is mounted in a heat insulation mounting box, and the methanol ignition system comprises a methanol delivery pipe, a mixer, an air delivery pipe and an igniter, the efficient gun head is installed at the other end, opposite to the atomizer, of the mixer, and the multiple nozzles formed in the outer end of the efficient gun head are annularly arranged in two layers. According to the gun head for the methanol ignition device of the pulverized coal fired boiler, methanol ignition is used for replacing diesel oil and plasma ignition, so that the ignition and stable combustion cost is reduced, fuel is saved in advance when powder is fed into the boiler, the original one circle of nozzles of the efficient gun head is increased to two circles, and the two circles of nozzles are arranged in two layers; according to the methanol ignition gun, by optimizing the positions and the arrangement mode of the spray holes in the gun head of the methanol ignition gun, the mode of igniting and igniting the pulverized coal is changed, and the use practicability is improved.

The invention belongs to the technical field of remote plasma sources, and discloses a remote plasma source system based on 172nm ultraviolet light auxiliary starting, which comprises a remote plasma source and an ultraviolet light pre-ionization device at a gas inlet of the remote plasma source, the ultraviolet pre-ionization device comprises a shell, the shell is provided with a gas flow channel and a sealed gas cavity which are separated by a light-transmitting partition plate, the sealed gas cavity is filled with xenon, and the gas flow channel is communicated with a gas inlet of a remote plasma source and used for circulation of process gas; the positive electrode plate and the negative electrode plate are arranged on two opposite sides of the shell and are used for exciting the xenon to generate 172nm ultraviolet light when alternating voltage is introduced; the ultraviolet light can penetrate through the light-transmitting partition plate to enter the gas flow channel; the mesh electrode is arranged in the gas flow channel and is used for being matched with the ultraviolet light to carry out pre-ionization treatment on the process gas when the mesh electrode is electrified; the method has the advantages that plasma starting of high-impedance gas is efficiently achieved, the starting success rate and the process stability are improved, and meanwhile pollution is avoided.

The embodiment of the present application provides a method for determining plasma ignition, a control method of a semiconductor process equipment, and the semiconductor process equipment, and the semiconductor process equipment comprises a radio frequency coil, and the method comprises the following steps: monitoring a change rate of an electric parameter of the radio frequency coil after radio frequency power is applied to the radio frequency coil, the change rate of the electric parameter comprising a change rate of a current flowing through the radio frequency coil or a change rate of a voltage across the radio frequency coil; and determining plasma ignition when a ratio of the change rate of the electric parameter detected at a current moment to the change rate of the electric parameter detected at a previous moment exceeds a preset ratio threshold value or a difference value exceeds a preset difference threshold value, so that the ignition moment of the semiconductor process equipment can be accurately judged according to plasma ignition, the next radio frequency system is prevented from being started before the semiconductor process equipment is ignited, and the safety of the semiconductor process equipment is improved.

A substrate processing apparatus, a substrate processing method, and a method of fabricating a semiconductor device are provided. The substrate processing method includes providing a process gas, generating a preliminary etchant, which includes a first etchant and a second etchant, from the process gas through plasma ignition, generating a process etchant by controlling a composition ratio of the preliminary etchant, and performing a selective etching of the substrate with the process etchant.

The application provides a plasma electrically generated fire preparation system, process and application, the system comprises a working condition detection module, a multi-layer grid discharge structure module, a discharge parameter decision module and a high-voltage discharge control module; the working condition detection module is used for real-time detection of the gas working condition parameters in the ignition cavity; the multi-layer grid discharge structure module is arranged in the ignition cavity and is used for forming a plurality of metal mesh grid electrodes with optional spacing; the discharge parameter decision module is used for determining the ignition discharge parameters according to the current gas working condition parameters; the high-voltage discharge control module is used for applying high-voltage pulse voltage to the selected metal mesh grid electrode according to the ignition discharge parameters to complete the discharge fire generation process; the application sets the multi-layer metal mesh grid electrode and combines the gas working condition parameters to make self-adaptive decisions on the discharge layer and the ignition voltage, improves the success rate and stability of the plasma ignition, and enhances the adaptability of the system to the complex gas working condition changes.

A plasma ignition and combustion-supporting head excited by a central sliding arc discharge is disclosed. A fuel nozzle is located within a combustion head mounting base, maintaining a discharge distance between the fuel nozzle outlet discharge end face and the inner ring end face of the combustion head mounting base. A high-voltage electrode is located on a ceramic electrode mounting base, maintaining a discharge distance between the high-voltage electrode inlet end face and the fuel nozzle outlet end face. This invention achieves plasma discharge through the inner ring of the combustion head mounting base and the high-voltage electrode. A rotating sliding arc is formed by a first-stage strong swirling current. Under the action of a convergence segment at a specific angle, the arc is elongated towards the central region of fuel atomization, defining the discharge area. The arc development and breakdown are achieved by the incoming flow, placing the arc in the optimal ignition and combustion-supporting position, which is beneficial for the contact and combustion of the arc and fuel. The densely distributed discharge arc in the fuel atomization area improves combustion efficiency, reduces pollutant emissions, better achieves ignition and combustion-supporting effects, increases combustion stability, and widens the combustion range of the combustion chamber.

The invention discloses a plasma ignition combustion-supporting exciter for a three-swirl combustion chamber of an aero-engine. The plasma ignition combustion-supporting exciter comprises a three-stage swirler of an integrated structure, a ceramic insulating section and a swirl fuel nozzle, the second-stage cyclone is arranged on the outer wall surface of an inner ring of the first-stage cyclone, the third-stage cyclone is arranged on the outer wall surface of an isolating ring of the second-stage cyclone, and the first-stage cyclone is arranged on the outer wall surface of the ceramic insulating section; a rotational flow fuel nozzle is inserted into the inner wall surface of the ceramic insulating section; the three-stage cyclone design is adopted, the advantages of forming strong turbulence, stabilizing a backflow area and uniformly mixing gas are achieved, the ignition and flameout performance of a combustion chamber is improved, and the working stability and reliability of an engine are improved; a small-size insulation structure is adopted, high-density space small-area discharging is achieved, and the problems that in the prior art, the working effect is poor due to the fact that a discharging area is not ideal, flameout is caused under specific working conditions, and the working performance is poor due to the fact that ceramic materials are insufficient in strength are solved.

The utility model relates to the technical field of microwave plasma, in particular to a plasma ignition electrode assembly, which comprises an electrode stem outer rod, an electrode tip and a feeding rod, the feeding rod is arranged in the center inside the electrode stem outer rod, one end of the feeding rod is in threaded connection with the inside of the electrode tip, and the other end of the feeding rod is in threaded connection with the inside of the electrode tip. One end of the feeding rod is connected with the electrode tip, the other end of the feeding rod is provided with a feeding pipe joint communicated with the feeding rod, the electrode stem outer rod is connected with the electrode tip, the feeding pipe joint, the feeding rod and the electrode tip are communicated to form a feeding channel, and the plasma ignition electrode assembly further comprises a cooling assembly used for cooling the electrode stem outer rod, the electrode tip and the feeding rod. The feeding pipe connector, the feeding rod and the electrode tip are designed to be communicated to form the feeding channel, materials can be directly fed in, sequentially pass through the feeding pipe connector, the feeding rod and the electrode tip and finally are directly fed into the center of the torch body, the materials can be completely treated, and even solid materials can be completely treated.

The present invention proposes a plasma ignition exciter with an adaptive flame adjustment function. The temperature monitor and the pressure monitor are set to monitor the working conditions of different temperature and different air pressure environments, and the environmental controller and the inverter controller are set to adjust the working state according to different working environments. The current controller is used to increase the input current, and the discharge controller is used to increase the discharge frequency to increase the output power, increase the plasma flame, and improve the ignition ability of the ignition exciter. This solves the problem that the traditional ignition exciter has a single output state during use and cannot meet the higher demand for ignition ability under harsh environmental conditions. It not only helps to improve the intelligence level of the ignition exciter, but also helps to improve the working stability and ignition ability of the engine in harsh environments.

The invention discloses an ammonia catalytic cracking device adopting a plasma ignition technology and an operation method, and belongs to the field of hydrogen production through ammonia decomposition, and the ammonia catalytic cracking device mainly comprises a plasma ammonia burner, a high-temperature mixer, a catalytic ammonia cracking module, a heat exchange module and a hydrogen separation and purification module. The plasma ammonia burner performs plasma discharge ignition at the starting stage, assists ammonia combustion to generate high-temperature tail gas, the high-temperature tail gas is mixed with liquid ammonia spray to form high-temperature mixed gas, the high-temperature mixed gas is introduced into the catalytic ammonia cracking module, and hydrogen-rich cracking gas is generated under the action of a catalyst; plasma discharge is not needed in the working stage, and hydrogen-rich pyrolysis gas is introduced into the combustor to be directly combusted. The pyrolysis gas heats liquid ammonia in the heat exchange module to improve the energy utilization efficiency of the system, and the cooled pyrolysis gas enters the separation module to purify hydrogen. According to the ammonia cracking device, high-temperature tail gas generated by ammonia-rich combustion of the combustor is directly mixed to preheat ammonia gas, a two-phase heat exchanger does not need to be independently arranged, the device is compact, the energy utilization rate is high, and no harmful combustion tail gas is discharged.

The present invention discloses a microwave detonation dual-mode space thruster, which includes a propellant supply system, a large-thrust propulsion module and a micro-thrust propulsion module coaxially arranged from the inside to the outside in sequence; the large-thrust propulsion module includes an injector, a plasma ignition combustor, a detonation chamber, a tail nozzle, etc. The micro-thrust propulsion module includes a microwave supply system, magnetic poles, a gas collection chamber, a discharge chamber and a grid; the microwave supply system includes a microwave connector and an antenna; the antenna is a cylindrical antenna, and a cyclotron cavity is formed between the antenna and the magnetic poles; the outer electrons in the working medium molecules located in the cyclotron cavity perform cyclotron motion in the cyclotron cavity, and resonance occurs when the cyclotron angular frequency is equal to the microwave frequency. The present invention combines microwave discharge technology, plasma combustion assistance technology and pulse detonation combustion technology, and realizes efficient and convenient switching of working modes through circuit regulation, enabling the thruster to meet the stringent requirements of large thrust, high specific impulse, long life, etc., and can be applied to diverse space missions.

The utility model discloses an electrostatic chuck, comprising an electrostatic chuck body which is provided with an electrostatic adsorption surface which is used for fixing a wafer and is provided with a mounting groove, and the mounting groove is communicated with the outside; the adsorption removing assembly is provided with a contact end, the contact end is arranged in the mounting groove and can move in the thickness direction of the electrostatic chuck body, and when the contact end abuts against a wafer, the contact end is used for removing the adsorption force between the electrostatic adsorption surface and the wafer. According to the utility model, when plasma ignition is abnormal, the contact end can move along the thickness direction of the electrostatic chuck body to directly abut against a wafer, so that charges on the wafer can be quickly led out, the wafer is prevented from staying in equipment for a long time, and the risk of wafer damage is reduced.

This application provides a plasma ignition device, a semiconductor thin film apparatus, and an ignition control method, relating to the field of electronic technology. The plasma ignition device includes: a radio frequency (RF) power supply, an adjustment device, an RF matching unit, a plasma processing unit, a control unit, and a detection unit. The RF power supply is connected to the RF matching unit via the adjustment device. The RF matching unit is also connected to the upper electrode of the plasma processing unit, and the lower electrode of the plasma processing unit is grounded. The detection unit is connected to the upper electrode of the plasma processing unit, and the control unit is connected to the detection unit. The control unit is also connected to the adjustment device. This reduces the plasma ignition time, improves the precision of the thin film process, and reduces particulate contamination.

The application relates to the field of power electronics, and discloses a frequency-adjustable plasma ignition power supply circuit which comprises a trigger capacitor circuit, an energy storage capacitor circuit and a discharge control circuit. The application has the beneficial effect that the traditional aviation ignition is improved by the ignition circuit, the plasma ignition demand can be met, high-voltage pulse electricity with a stable frequency and a stable voltage is output to a plasma ignition electrode, an electric arc is formed between the negative and positive electrodes of the ignition electrode through an electrical method, high-temperature plasma is generated in a working medium, and the purpose of igniting fuel is achieved.

In a laser-pumped plasma light source (100) having a gas-filled chamber (1), the device for plasma ignition is a solid-state laser system (7) which generates two pulsed laser beams (8, 9) focused into the chamber (1): a first beam (8) is generated in free-running mode, a second beam (9) is generated in Q-switched mode. The solid-state laser system (7) comprises a single active element (10), a radiation source (11) for pumping the active element (10) and an optical resonator (12, 13) providing a plurality of passages of the laser beams through the active element (10). One optical resonator (13) is equipped with a Q-switch (14) mounted on the path of the second beam (9) so that the Q-switch overlaps only a part (15b) of the cross section of the laser beam.

An impedance characteristic measuring device for a capacitively coupled plasma processor, characterized in that the impedance characteristic measuring device comprises: an upper contact plate and a lower contact plate, wherein the upper contact plate is used to contact the lower surface of a gas shower head of the capacitively coupled plasma processor, and the lower contact plate is used to contact the upper surface of an electrostatic chuck in the capacitively coupled plasma processor; at least one elastic conductive part is located between the upper contact plate and the lower contact plate, and the elastic conductive part provides elastic force, so that the upper and lower contact plates are in close contact with the gas shower head and the electrostatic chuck respectively after the distance between the upper and lower contact plates is compressed when the impedance characteristic measuring device measures the impedance characteristic curve of the capacitively coupled plasma processor. The impedance characteristic curve of the plasma processor is accurately measured without plasma ignition.