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190 results about "Plasma ignition" patented technology

Plasma ignition detection device for connection to an impedance matching circuit of a plasma generation system

The plasma ignition detection device (1), which is connected to an impedance matching circuit (50) of a plasma generation system (100), is configured to a) process a first time-varying measurement value from a first predetermined location of the impedance matching circuit (50), where from the first time-varying measurement value a first applied reactive and / or active power can be determined, b) process a second time-varying value associated with a second location of the impedance matching circuit (50), where the second location is different from the first predetermined location and from the second value a second applied reactive and / or active power can be determined, c) determine a first time-varying amount from the first measurement value, d) determine a second time-varying amount from the second value, and e) generate an output signal representative of a plasma state in dependence on the first and second time-varying amounts.
Owner:TRUMPF PATENTABTEILUNG

Split type plasma ignition device and ignition system for passivating agent

The invention relates to the technical field of plasma ignition, in particular to a split type plasma ignition device and ignition system for passivating gunpowder, which comprises an ignition tube assembly and an oscillation control assembly, the ignition tube assembly comprises an ignition tube, gunpowder and a hollow resonance coil; the oscillation control assembly comprises a coil support, an excitation coil and an oscillator circuit module. The excitation coil on the coil support is used for being matched with an insulation tube in an ignition tube in an inserted mode. An ignition pulse excites an oscillator circuit module to generate a high-frequency excitation signal, the high-frequency excitation signal is released by an excitation coil and coupled to a hollow resonance coil in an electromagnetic induction mode to form LC resonance, the LC resonance enables a discharge part to generate a high-intensity electric field, the high-intensity electric field excites plasmas on the surface of gunpowder to ignite the gunpowder, and ignition is completed. The device breaks through multiple limitations of a traditional ignition mode, and intrinsic safety and high reliability of passivation agent ignition are achieved.
Owner:XIDIAN UNIV

Combined cooling heating and power system based on pure ammonia fuel

The utility model relates to the technical field of new energy, in particular to a combined cooling heating and power system based on pure ammonia fuel. A pure ammonia fuel supply system comprises a liquid ammonia temperature adjusting device, a liquid ammonia evaporation device, an ammonia gas cracking device, a gas storage adjusting device and plasma ignition combustors, a first plasma ignition combustor is arranged in the ammonia gas cracking device, and a second plasma ignition combustor is arranged between the liquid ammonia evaporation device and a boiler. Rapid ignition and stable and continuous combustion of the pure ammonia fuel are achieved, then the working stability of an internal combustion engine generator set, a gas turbine generator set, a fuel cell and a boiler using the pure ammonia fuel is improved, meanwhile, due to the fact that the pure ammonia fuel is used, greenhouse gas emission is reduced, and the air quality is improved.
Owner:SHENZHEN HAIXU NEW ENERGY CO LTD

Gas supply adjusting device based on pure ammonia fuel

The utility model relates to the technical field of ammonia energy utilization, in particular to a gas supply adjusting device based on pure ammonia fuel. The gas supply adjusting device comprises a gas supply pipeline, an igniter gas supply unit and a main furnace fire head gas supply assembly, the main furnace fire head gas supply assembly comprises a first-stage gas supply unit, a second-stage gas supply unit to an n-stage gas supply unit which are connected in parallel, and the gas supply flow is sequentially reduced from the first-stage gas supply unit to the n-stage gas supply unit. Due to the fact that the main furnace fire head gas supply assembly comprises the multiple stages of gas supply units which are connected in parallel, and the gas supply flow is sequentially reduced, when the combustion flow needs to be increased and the heating capacity needs to be improved, the low-stage gas supply units can be started, and gear shifting type adjustment is achieved. And meanwhile, as the igniter gas supply unit is provided with the throttling orifice assembly to adjust the gas flow, small-flow adjustment of gas can be achieved, the flow entering the plasma ignition burner can be accurately controlled, and the success rate of ignition of the igniter in the plasma ignition burner is increased.
Owner:SHENZHEN HAIXU NEW ENERGY CO LTD

Plasma ignition system, method and device thereof, electronic equipment and storage medium

The invention discloses a plasma ignition system and method and device, electronic equipment and a storage medium, and relates to the field of plasma ignition, and the main technical scheme comprises an ignition module, an electrical module, a gas supply module, a driving module, a cooling module and a control module; the ignition module is placed on the wall of a boiler, and the electrical module, the gas supply module, the driving module, the cooling module and the control module are connected with the ignition module. Fire coal powder is placed in the boiler; the driving module, the gas supply module, the cooling module and the control module are respectively connected with the electrical module; and the gas supply module and the cooling module are respectively connected with the control module. Compared with the prior art, the plasma ignition system is used for generating the plasma flame to ignite the fire coal powder in the boiler, fuel oil does not need to be used, and the ignition cost is reduced.
Owner:HOHHOT KELIN THERMOELECTRICITY CO LTD

Enhanced plasma ignition system and method

The invention discloses an enhanced plasma ignition system and method, and belongs to the technical field of low-temperature plasma ignition and combustion supporting, the system comprises an electric spark ignition system, a first one-way conduction module, a second one-way conduction module, a discharge enhancement module, a plasma unit and an electric control module; the first one-way conduction module is connected in series with the electric spark ignition system, and the second one-way conduction module is connected in series with the discharge enhancement module; the electric control module is connected with the electric spark ignition system, the discharge enhancement module, the first one-way conduction module and the second one-way conduction module and then is connected with the plasma unit. The transition of plasma discharge from an electric spark mode to arc plasma is realized, the effective enhancement of the ignition energy, plasma density, temperature and active free radicals of the plasma igniter is realized, the equipment is simple, the efficiency is high, the cost is low, and instantaneous high power and high ignition energy are easy to realize.
Owner:INST OF ENERGY HEFEI COMPREHENSIVE NAT SCI CENT (ANHUI ENERGY LAB)

Plasma ignition circuit capable of adaptively adjusting voltage frequency

The invention discloses a plasma ignition circuit capable of adaptively adjusting voltage frequency. A power supply VCC is connected to a high-voltage arc striking circuit and a high-frequency pilot arc circuit, and the high-voltage arc striking circuit and the high-frequency pilot arc circuit are both connected to the ground; the arc striking positive end and the arc striking negative end of the high-voltage arc striking circuit are connected to the output protection circuit, the pilot arc positive end and the pilot arc negative end of the high-frequency pilot arc circuit are connected to the output protection circuit, and the output positive end and the output negative end of the output protection circuit are connected with an ignition electric nozzle of the aero-engine. The high-voltage arc striking circuit is used for generating high-voltage and low-current voltage pulses and puncturing a discharge gap of the ignition electric nozzle after being output by the output protection circuit; the high-frequency pilot arc circuit is used for generating a high-frequency voltage source through a high-frequency sine wave signal, and the high-frequency voltage source generated by the high-frequency pilot arc circuit is used for generating an electric arc after a discharge gap of the ignition electric nozzle is broken down, so that an ignition function is realized; wherein the high-frequency pilot arc circuit is internally provided with two MOS (Metal Oxide Semiconductor) tubes, the two MOS tubes are alternately conducted in a positive half cycle or a negative half cycle of a high-frequency sine wave signal, and a resonant loop is formed in the high-frequency pilot arc circuit, so that current in the circuit is output to the ignition electric nozzle according to sine waves of resonant frequency. According to the technical scheme, the problems that an existing capacitive energy storage ignition circuit is usually applied to a low-power ignition system with the power smaller than 100 w, and the high-altitude ignition effect is poor are solved.
Owner:SHAANXI AVIATION ELECTRICAL

Modular multi-fuel industrial burner plasma igniter with efficient cooling structure

The invention discloses a modular multi-fuel industrial burner plasma igniter with an efficient cooling structure. The modular multi-fuel industrial burner plasma igniter comprises an ignition module, an efficient cooling module, a fuel adaptation module and an intelligent control module. A plasma arc generator is arranged in the ignition module and is used for generating a high-temperature ignition source; the efficient cooling module adopts a multi-layer surrounding type flow channel design, and active heat management of the ignition module is achieved through forced circulation of a cooling medium; the fuel adaptation module supports rapid switching and stable supply of various fuels such as natural gas, fuel oil and biomass gas through standardized interfaces and pipelines; the intelligent control module integrates ignition control, fuel switching and thermal management strategies, monitors the system state in real time and automatically adjusts operation parameters. By means of the modular architecture and the efficient cooling technology, the problems that a traditional plasma igniter is prone to overheating damage, poor in adaptability and difficult to maintain under the high-temperature and multi-fuel working conditions are solved.
Owner:CHENGDU QIYI MECHANICAL & ELECTRICAL CO LTD

Ammonia burner with cavity stable combustion in cooperation with plasma ignition and combustion supporting

The invention discloses a plasma ignition and combustion-supporting cooperated cavity stable combustion ammonia burner which comprises a three-stage plasma ignition and combustion-supporting device and a three-stage fuel and air supply system, and the three-stage plasma ignition and combustion-supporting device comprises a first-stage plasma ignition and combustion-supporting device, a second-stage plasma ignition and combustion-supporting device and a third-stage fuel and air supply system. The second-stage plasma ignition and combustion-supporting device, the third-stage plasma ignition and combustion-supporting device and the three-stage fuel and air supply system are respectively a first-stage fuel and air supply system, a second-stage fuel and air supply system and a third-stage fuel and air supply system. The problems of low flame propagation speed, high ignition energy and the like existing in ammonia fuel combustion at present are solved, stable combustion of pure ammonia can be realized under the condition that hydrogen or other fossil fuels are not doped into ammonia gas by adopting a multi-stage plasma ignition and combustion-supporting device, assisting ammonia combustion and combining a bluff body combustion stabilizer, and a three-stage combustion stabilizing technology is adopted, so that stable combustion of pure ammonia is realized. And the stable combustion range of ammonia gas can be greatly expanded.
Owner:AMMONIUM TECH CO LTD

A universal full-time ultra-low nitrogen burner

The present invention relates to the technical field of burners, and in particular to a universal full-time ultra-low nitrogen burner, comprising: a combustion assembly, the combustion assembly comprising a combustion tube and an outer tube mounted on its outer layer, the cavity formed between the combustion tube and the outer tube being connected to a return air cavity, a combustion chamber being arranged in the combustion tube, the inlet end of the combustion chamber being respectively connected to a powder inlet, a plasma igniter and a purge assembly; a tempering nozzle, arranged on the inner wall of the combustion chamber outlet end, and its air inlet being connected to the cavity between the combustion tube and the outer tube, and its air outlet being connected to the combustion chamber and opposite to the powder inlet direction; a tempering channel, arranged on the inner wall of the combustion chamber, between the tempering air outlet of the tempering nozzle and the purge air outlet of the purge assembly, and having openings at both ends connected to the combustion chamber, for solving the technical problem in the prior art that the continuous operation of the burner needs to rely on a plasma igniter, resulting in low combustion efficiency.
Owner:SHANDONG WUFENG ENVIRONMENTAL PROTECTION TECH CO LTD

Laser or plasma ignition and power supply method, and plasma system or laser system

An improved ignition and power supply method for a laser or processing plasma in a discharge chamber 30 includes: a. supplying power from an output port 24 of an amplifier 12 to the discharge chamber 30, where the amplifier 12 includes at least two amplifier path portions 14, 16 each supplying a signal to a coupler 22, the coupler 22 having an output port 24 and an isolation port 26 and being configured to combine signals depending on an amplitude relationship and / or a phase relationship and supply power to the output port 24 and / or the isolation port 26; b. controlling impedance switching units 27, 27a, 27b connected to the isolation port 26 and a ground 39 according to a first control mode to ignite the laser or processing plasma; and c. controlling impedance switching units 27, 27a, 27b connected to the isolation port 26 according to a second control mode to operate the laser or maintain the processing plasma in the discharge chamber 30.
Owner:TRUMPF PATENTABTEILUNG

Embedded multifunctional plasma flame stabilizer

The invention provides an embedded multifunctional plasma flame stabilizer, and relates to the technical field of plasma ignition combustion supporting. The embedded multifunctional plasma flame stabilizer comprises an evaporative flame stabilizer and an embedded exciter, wherein the evaporative flame stabilizer is provided with a combustion area defined by apron boards; the embedded exciter is installed on the surface, facing the combustion area, of the apron board. The exciter is directly integrated on the inner side of the skirt board of the flame stabilizer, and the space utilization rate and the system integration degree are improved on the premise that the aerodynamic configuration and the installation mode are not changed. The discharge area of the exciter covers the backflow area, active free radicals can be generated and local heat can be released under complex and changeable conditions, the reaction activity of mixed gas is enhanced, the ignition delay time is shortened, the ignition boundary is expanded, meanwhile, atomization and mixing are improved, the combustion efficiency is improved, and flame quenching is restrained. The device has ignition assistance, continuous excitation and active thermochemical regulation and control capabilities, and is suitable for a compact combustion chamber environment.
Owner:AIR FORCE UNIV PLA

Direct-current power supply-based circuit integration device for plasma ignition

The invention discloses a circuit integration device for plasma ignition based on direct current power supply, relates to the field of plasma ignition, and aims to solve the problems that an existing plasma ignition technology cannot be directly compatible with aviation low-voltage direct current and is poor in reliability. A core electronic function module comprises a high-frequency resonance inversion topological unit, an energy driving adjustment topological unit, a full-wave rectification topological unit, a control unit, an arc striking unit and an energy storage unit. The high-frequency resonant inversion topology unit converts input direct current into high-frequency alternating current pulse; the energy driving and adjusting topological unit drives and adjusts the high-frequency resonant inversion topological unit, so that the alternating voltage output by the high-frequency resonant inversion topological unit is increased to 400-430V; the full-wave rectification topological unit converts the alternating current voltage output by the high-frequency resonance inversion topological unit into stable direct current high voltage and supplies power to the control unit, the arc striking unit and the energy storage unit.
Owner:HARBIN ENG UNIV

Multi-axis servo regulation and control liquid ammonia burner based on flue gas backflow liquid ammonia vaporization and control method

PendingCN121206479ABurnersCombustorFlue gas
The invention discloses a multi-axis servo regulation and control liquid ammonia burner based on smoke backflow liquid ammonia vaporization and a control method, and relates to the field of clean energy equipment, the multi-axis servo regulation and control liquid ammonia burner comprises a liquid ammonia burner body, an annular liquid ammonia flow servo regulation mechanism, an annular liquid ammonia conveying and distributing mechanism, a liquid ammonia plasma ignition device, an ammonia combustion flame scanning mechanism and the like. The multi-axis servo motor drives the execution valves to adjust the flow ratio of liquid ammonia fuel to hot air in the fluid channels, meanwhile, liquid ammonia is vaporized through heat exchange of backflow smoke in the boiler and then fully premixed with the hot air to enter the boiler to be combusted, and efficient combustion of the ammonia fuel of the coal-fired boiler is achieved. The technical problems of large latent heat of vaporization of liquid ammonia fuel, continuous clean combustion of ammonia fuel, ammonia escape and control of NOX generated by combustion are solved.
Owner:AMMONIUM TECH CO LTD

Plasma ignition and stable combustion control system

A plasma ignition and stable combustion control system comprises a main control unit, a plasma direct-current power supply control cabinet, a plasma generator, an FSSS system, a DCS and a sensing unit. The main control unit is in communication connection with the FSSS system and the DCS; the signal output end of the plasma direct-current power supply control cabinet is connected with the FSSS system; the sensing unit comprises a plasma generator state sensor, a plasma generator wall temperature sensor, a cooling water mother pipe pressure sensor and an air heater air outlet temperature sensor; the plasma generator state sensor and the plasma generator wall temperature sensor are connected with the input end of the main control unit; the cooling water mother pipe pressure sensor and the air heater air outlet temperature sensor are connected with the input end of the DCS. According to the utility model, the optimization of the ignition and stable combustion process of the boiler in the thermal power plant is realized, the rapidness and stability of ignition are ensured, and the energy utilization efficiency and the environmental protection level are improved at the same time.
Owner:HUANENG JINGMEN THERMAL POWER CO LTD +1

A strut-inboard embedded plasma igniter suitable for a scramjet engine

The application discloses a strut plate embedded plasma igniter suitable for a scramjet engine and relates to the technical field of the scramjet engine.The strut plate embedded plasma igniter comprises a strut plate main body, and fuel main flow channels, oxygen main flow channels and an embedded channel are arranged on the strut plate main body; a plurality of fuel injection holes are arranged on the side wall of the fuel main flow channel; the oxygen main flow channel is in communication with the embedded channel, and an anode core is arranged in the embedded channel; a detachable head is arranged at one end of the embedded channel facing a combustion chamber, and a plurality of communication holes are arranged on the detachable head. A circular axis-symmetrical hypersonic combustion chamber is connected to the outside of the strut plate main body. The strut plate embedded plasma igniter suitable for the scramjet engine has the advantages of a stable combustion strut plate and a plasma igniter, has the characteristics of good insulation and partial stable combustion, and can ensure stable ignition of the axis-symmetrical supersonic combustion chamber.
Owner:AERONAUTICS RES INST OF CHINA

Plasma ignition system and use method thereof

The invention belongs to the technical field of combustion equipment, and relates to a plasma ignition system and a using method thereof. The system comprises a plasma generator, a combustor, a power supply system, a carrier working medium system and a cooling water system, an anode and a cathode of the plasma generator are coaxially arranged to form an electric arc cavity and a surrounding cooling water cavity, and the anode is provided with a compressed air inlet and a plasma jet outlet; the plasma combustor is sequentially and coaxially sleeved with a first-stage center cylinder, a second-stage combustion cylinder and an outer wall cylinder from inside to outside, the first-stage center cylinder communicates with the jet flow outlet, and the outer wall cylinder is provided with a pulverized coal inlet; the power supply system supplies power to the generator through the isolation transformer and the rectifier cabinet. The carrier working medium system supplies air to the compressed air inlet; the cooling water system enables demineralized water to circulate in the cooling water cavity. Efficient and stable ignition and low-nitrogen combustion of pulverized coal are achieved, the ignition reliability is remarkably improved, the system service life is remarkably prolonged, and the operation automation level is remarkably improved.
Owner:STATE POWER XINJIANG HONGYANCHI POWER GENERATION CO LTD

Marine gas turbine plasma ignition layering troubleshooting method

The invention relates to the technical field of ship power device fault diagnosis, and discloses a marine gas turbine plasma ignition layering fault troubleshooting method, which comprises the following steps: aiming at the characteristics of a plasma ignition system double-loop structure in a severe ship environment, firstly constructing a special safety test environment consisting of an insulating box body and an observation window; determining that the basic energy is normal by measuring primary electrical parameters; based on the core thought of a control variable method, a hierarchical cross-exchange test process for an aviation plug interface and an igniter body is designed, and a complete decision tree model is constructed by comparing logic changes of ignition states before and after exchange, so that a fault source is accurately isolated from a control board card, an ignition cable or an igniter; according to the invention, an experience-dependent troubleshooting process is converted into a standardized and visual technical operation process, and finally, the problems of low troubleshooting efficiency, high safety risk and great dependence on personnel experience in the prior art are effectively solved.
Owner:NO 703 RES INST OF CHINA SHIPBUILDING IND CORP

Electric arc reinforcing device and plasma ignition gun using same

The utility model discloses an electric arc strengthening device and a plasma burning torch using the same, and belongs to the technical field of petrochemical engineering ignition equipment, the electric arc strengthening device comprises a device body, the device body is of a cylindrical or semi-cylindrical structure, a plurality of ventilation holes are formed in the device body, one end of the device body is connected with an electric arc torch nozzle, and the other end of the device body is connected with a power supply. The electric arc strengthening device is additionally arranged on a traditional plasma ignition gun, electric arcs can be obviously increased, the design of an existing ignition device is not changed, the strong ignition effect can be truly achieved, meanwhile, the plasma ignition gun with the electric arc strengthening device is ingenious and simple in structure, high in severe environment resistance such as wind resistance and rain resistance, and capable of being used for ignition of the plasma ignition gun. The ignition success rate is high.
Owner:GUANGHAN SIMING PETROLEUM DRILLING & PROD EQUIP COROLLARY CO LTD

A self-sustaining stable combustion burner with improved inner cavity structure

The present invention relates to the technical field of burners, and in particular to a self-sustaining stable combustion burner with an improved inner cavity structure, comprising: a combustion tube, whose outlet end is a flame outlet, and whose inlet end is connected to a plasma generator and a powder inlet; an outer tube, which is sleeved between the outside of the combustion tube and the combustion tube to form a closed return air chamber; the inner cavity structure of the combustion tube is a combustion chamber formed by a reducing neck portion at the inlet end being sequentially connected to a reducing guide portion, a middle cylinder portion, a tempering reducing connection portion, and an outlet end, a tempering guide portion extending along an axial direction is arranged near the top of the inner cavity of the middle cylinder portion, and the combustion tube is provided with a return air duct for connecting the return air chamber and the combustion chamber, the return air duct is located on the tempering reducing connection portion and is located near the top of the middle cylinder portion, and is used to solve the technical problems in the prior art that the continuous operation of the burner needs to rely on a plasma igniter, resulting in low combustion efficiency and easy coking and difficult cleaning of the inner cavity of the combustion chamber.
Owner:SHANDONG WUFENG ENVIRONMENTAL PROTECTION TECH CO LTD

An explosive-free electronic detonator controlled by a high-voltage analog circuit integrated chip

The present invention claims protection for an explosive-free electronic detonator controlled by a high-voltage analog circuit integrated chip, specifically belonging to the technical field of explosive-free electronic detonators; the technical problem to be solved is: to provide an improvement in the hardware structure of an explosive-free electronic detonator controlled by a high-voltage analog circuit; the technical solution adopted to solve the technical problem is: one end of the printed circuit board welded to the plasma ignition device is encapsulated in a card waist through a plastic sealing plug; the detonator metal shell is connected to the charge shell as a whole through the card waist, and a detonator charge structure is arranged inside the charge shell; a high-voltage analog circuit integrated chip, an MCU microprocessor chip and a high-voltage energy storage capacitor are welded on the printed circuit board, and a circuit board control port is provided at the other end of the printed circuit board, and the circuit board control port is externally connected to a two-wire control pin line that is remotely connected to the detonator, and the two-wire control pin line is encapsulated in the card port through a sealing plug; the present invention is applied to explosive-free electronic detonators.
Owner:SHANXI CHENRUNLONG TECH CO LTD

A plasma ignition and combustion-supporting device for a sub-combustion ramjet combustion chamber with retractable electrodes

The present invention provides a plasma ignition and combustion-supporting device for a subcombustion ramjet combustion chamber with a retractable electrode, comprising a combustion chamber barrel (1), a circumferential flame stabilizer (2), a guide rail (3), a fixed-axis sleeve (4), a slider (5), a hinged seat (6), a slide rod (7), a ceramic tube (8), and a high-voltage electrode (9). A plasma ignition and combustion-supporting method for a subcombustion ramjet combustion chamber with a retractable electrode is also provided. The present invention is used to solve the problem that the electrode of a plasma excitation device is ablated, resulting in a short working life. The present invention adopts an innovative telescopic device on the combustion chamber barrel, which can realize the telescopic movement of a metal electrode with a simple structure, reduce electrode ablation, and extend the electrode life.
Owner:AIR FORCE UNIV PLA

Gun head for methanol ignition device of pulverized coal fired boiler

The utility model discloses a gun head for a methanol ignition device of a pulverized coal fired boiler, which comprises a methanol ignition system and an efficient gun head, the methanol ignition system is mounted in a heat insulation mounting box, and the methanol ignition system comprises a methanol delivery pipe, a mixer, an air delivery pipe and an igniter, the efficient gun head is installed at the other end, opposite to the atomizer, of the mixer, and the multiple nozzles formed in the outer end of the efficient gun head are annularly arranged in two layers. According to the gun head for the methanol ignition device of the pulverized coal fired boiler, methanol ignition is used for replacing diesel oil and plasma ignition, so that the ignition and stable combustion cost is reduced, fuel is saved in advance when powder is fed into the boiler, the original one circle of nozzles of the efficient gun head is increased to two circles, and the two circles of nozzles are arranged in two layers; according to the methanol ignition gun, by optimizing the positions and the arrangement mode of the spray holes in the gun head of the methanol ignition gun, the mode of igniting and igniting the pulverized coal is changed, and the use practicability is improved.
Owner:GUIZHOU JINCHI CHEM CO LTD

Remote plasma source system based on 172nm ultraviolet light auxiliary starting

The invention belongs to the technical field of remote plasma sources, and discloses a remote plasma source system based on 172nm ultraviolet light auxiliary starting, which comprises a remote plasma source and an ultraviolet light pre-ionization device at a gas inlet of the remote plasma source, the ultraviolet pre-ionization device comprises a shell, the shell is provided with a gas flow channel and a sealed gas cavity which are separated by a light-transmitting partition plate, the sealed gas cavity is filled with xenon, and the gas flow channel is communicated with a gas inlet of a remote plasma source and used for circulation of process gas; the positive electrode plate and the negative electrode plate are arranged on two opposite sides of the shell and are used for exciting the xenon to generate 172nm ultraviolet light when alternating voltage is introduced; the ultraviolet light can penetrate through the light-transmitting partition plate to enter the gas flow channel; the mesh electrode is arranged in the gas flow channel and is used for being matched with the ultraviolet light to carry out pre-ionization treatment on the process gas when the mesh electrode is electrified; the method has the advantages that plasma starting of high-impedance gas is efficiently achieved, the starting success rate and the process stability are improved, and meanwhile pollution is avoided.
Owner:JIHUA LAB

Method of determining plasma ignition, control method of semiconductor process equipment

The embodiment of the present application provides a method for determining plasma ignition, a control method of a semiconductor process equipment, and the semiconductor process equipment, and the semiconductor process equipment comprises a radio frequency coil, and the method comprises the following steps: monitoring a change rate of an electric parameter of the radio frequency coil after radio frequency power is applied to the radio frequency coil, the change rate of the electric parameter comprising a change rate of a current flowing through the radio frequency coil or a change rate of a voltage across the radio frequency coil; and determining plasma ignition when a ratio of the change rate of the electric parameter detected at a current moment to the change rate of the electric parameter detected at a previous moment exceeds a preset ratio threshold value or a difference value exceeds a preset difference threshold value, so that the ignition moment of the semiconductor process equipment can be accurately judged according to plasma ignition, the next radio frequency system is prevented from being started before the semiconductor process equipment is ignited, and the safety of the semiconductor process equipment is improved.
Owner:BEIJING NAURA MICROELECTRONICS EQUIP CO LTD

Substrate processing apparatus, substrate processing method, and method of fabricating semiconductor device

A substrate processing apparatus, a substrate processing method, and a method of fabricating a semiconductor device are provided. The substrate processing method includes providing a process gas, generating a preliminary etchant, which includes a first etchant and a second etchant, from the process gas through plasma ignition, generating a process etchant by controlling a composition ratio of the preliminary etchant, and performing a selective etching of the substrate with the process etchant.
Owner:SAMSUNG ELECTRONICS CO LTD

Plasma electro-generation fire preparation system, process and application

PendingCN122438239AThermodynamicsVoltage pulse
The application provides a plasma electrically generated fire preparation system, process and application, the system comprises a working condition detection module, a multi-layer grid discharge structure module, a discharge parameter decision module and a high-voltage discharge control module; the working condition detection module is used for real-time detection of the gas working condition parameters in the ignition cavity; the multi-layer grid discharge structure module is arranged in the ignition cavity and is used for forming a plurality of metal mesh grid electrodes with optional spacing; the discharge parameter decision module is used for determining the ignition discharge parameters according to the current gas working condition parameters; the high-voltage discharge control module is used for applying high-voltage pulse voltage to the selected metal mesh grid electrode according to the ignition discharge parameters to complete the discharge fire generation process; the application sets the multi-layer metal mesh grid electrode and combines the gas working condition parameters to make self-adaptive decisions on the discharge layer and the ignition voltage, improves the success rate and stability of the plasma ignition, and enhances the adaptability of the system to the complex gas working condition changes.
Owner:ZHONGSHAN QILI INTELLIGENT TECHNOLOGY CO LTD

Plasma ignition and combustion head excited by central sliding arc discharge

A plasma ignition and combustion-supporting head excited by a central sliding arc discharge is disclosed. A fuel nozzle is located within a combustion head mounting base, maintaining a discharge distance between the fuel nozzle outlet discharge end face and the inner ring end face of the combustion head mounting base. A high-voltage electrode is located on a ceramic electrode mounting base, maintaining a discharge distance between the high-voltage electrode inlet end face and the fuel nozzle outlet end face. This invention achieves plasma discharge through the inner ring of the combustion head mounting base and the high-voltage electrode. A rotating sliding arc is formed by a first-stage strong swirling current. Under the action of a convergence segment at a specific angle, the arc is elongated towards the central region of fuel atomization, defining the discharge area. The arc development and breakdown are achieved by the incoming flow, placing the arc in the optimal ignition and combustion-supporting position, which is beneficial for the contact and combustion of the arc and fuel. The densely distributed discharge arc in the fuel atomization area improves combustion efficiency, reduces pollutant emissions, better achieves ignition and combustion-supporting effects, increases combustion stability, and widens the combustion range of the combustion chamber.
Owner:XI AN JIAOTONG UNIV +1

Plasma ignition stable combustion equipment capable of being switched flexibly and control method of plasma ignition stable combustion equipment

The invention relates to the technical field of ignition stable combustion equipment, and provides plasma ignition stable combustion equipment capable of being flexibly switched and a control method thereof.The plasma ignition stable combustion equipment capable of being flexibly switched comprises a base plate, a support is welded to the base plate, and a first supporting plate is fixedly connected to the support; an electric push rod is installed in the middle of the chassis, a circular truncated cone pressing block is fixedly connected to the top of the electric push rod, a triggering assembly is installed on the circular truncated cone pressing block, a pressing assembly is installed on the first supporting disc, a plate spring is installed on the chassis, and a connecting pipe is fixedly arranged on the plate spring. By means of the technical scheme, the problems that an existing plasma ignition stable combustion device cannot adjust the gathering degree of flames, cannot automatically turn off the flames after the flames are gathered to the middle position, and cannot be flexibly switched between the adjustment of the flame angle and the adjustment of the gathering degree of the flames are solved.
Owner:DATANG DONGYING POWER GENERATION CO LTD

Plasma ignition device

The utility model provides a plasma ignition device. The plasma ignition device comprises a shell, a plasma generator, a primary air pipe, a secondary air pipe, an ignition cavity, a combustion stabilizing cavity and a device stabilizing structure. A nozzle of the plasma generator extends into an ignition cavity in the shell, the outlet end of the ignition cavity is communicated with the stable combustion cavity, the primary air pipe is communicated with an inlet of the ignition cavity, and the secondary air pipe is communicated with the stable combustion cavity. The device stabilizing structure comprises a fixing frame, a fixing table and elastic assemblies, one end of the fixing frame is connected with the boiler, the fixing table is perpendicularly arranged on the fixing frame, a circular groove capable of being arranged on the outer surface of the shell in a sleeving mode is formed in the fixing table, and the multiple elastic assemblies are arranged on the circumference of the surface of the circular groove. The elastic assembly comprises a spring and a positioning rod, the positioning rod is sleeved with the spring, one end of the positioning rod is fixedly connected with the surface of the circular groove, and the length of the positioning rod is one third of the length of the spring without stress. And stable ignition combustion of the plasma ignition device is realized.
Owner:陕西清水川能源股份有限公司