382 results about "Plasma ignition" patented technology

A method of improving surface flame resistance of a substrate is provided. A substrate is provided. An atmosphere pressure plasma process is performed on the surface of the substrate to form an inorganic film layer on the surface of the substrate, wherein a process gas of the atmosphere plasma process includes a flame resistance precursor, a carrier gas, and a plasma ignition gas. Particularly, the flame resistance precursor is selected from a siloxane compound, an inorganic alkoxide compound and a combination thereof. The siloxane compound has a formula of Si(OC_nH_2(n+1))₄, n=1˜5, and the inorganic alkoxide compound has a formula of A(OC_mH_2m+1)4, where A represents Sn, Ti, Zr, Ce and m=2.

Methods and systems for producing a change in a medium. A first method and system (1) place in a vicinity of the medium at least one upconverter including a gas for plasma ignition, with the upconverter being configured, upon exposure to initiation energy, to generate light for emission into the medium, and (2) apply the initiation energy from an energy source including the first wavelength λ₁ to the medium, wherein the emitted light directly or indirectly produces the change in the medium. A second method and system (1) place in a vicinity of the medium an agent receptive to microwave radiation or radiofrequency radiation, and (2) apply as an initiation energy the microwave radiation or radiofrequency radiation by which the agent directly or indirectly generates emitted light in the infrared, visible, or ultraviolet range to produce at least one of physical and biological changes in the medium.

Methods and systems for forming a structure including carbon material and structures formed using the method or system are disclosed. Exemplary methods include providing an inert gas to the reaction chamber for plasma ignition, providing a carbon precursor to the reaction chamber, forming a plasma within the reaction chamber to form an initially viscous carbon material on a surface of the substrate, wherein the initially viscous carbon material becomes carbon material, and treating the carbon material with activated species to form treated carbon material.

There is provided by this invention an improved rf power control device for plasma applications for optimization of the feedback control voltage in the presence of harmonic and non-harmonic spurious frequencies. In this system, an oscillator and mixer, similar to those normally used in radio receiver applications are placed at the sampled output of the solid state rf signal source used for plasma ignition. The sampled output is mixed to a low frequency and filtered to remove the spurious frequencies that is created in the non-linear plasma. In this way, the feedback power control essentially ignores the spurious frequencies. In this application, the oscillator and mixer do not interfere with other desirable system characteristics and effectively isolate the feedback control voltage from changes in plasma spurious content. This allows rf power to be delivered to the plasma with greater accuracy than would otherwise be possible with conventional power control device and methods.

A showerhead diffuser apparatus for a CVD process has a first channel region having first plural independent radially-concentric channels and individual gas supply ports from a first side of the apparatus to individual ones of the first channels, a second channel region having second plural independent radially-concentric channels and a pattern of diffusion passages from the second channels to a second side of the apparatus, and a transition region between the first channel region and the second channel region having at least one transition gas passage for communicating gas from each first channel in the first region to a corresponding second channel in the second region. The showerhead apparatus has a vacuum seal interface for mounting the showerhead apparatus to a CVD reactor chamber such that the first side and supply ports face away from the reactor chamber and the second side and the patterns of diffusion passages from the second channels open into the reactor chamber. In preferred embodiments the supply ports, transition passages, and diffusion passages into the chamber do not align, and there is a special plasma-quenching ring in each of the second channels preventing plasma ignition within the channels in the showerhead methods and systems using the showerhead are also taught.

An apparatus and method for the creation, placement and control of an area of electrical ionization within an internal combustion engine combustion chamber. This area of electrical ionization is positioned so that all of the fuel being injected into the combustion chamber must pass next to or through the area of electrical ionization to ensure that combustion has been initiated for all of the fuel as it is injected. This area of electrical ionization can be kept on as long as it is necessary to insure that the all of the fuel that is injected into the combustion chamber can be completely combusted. An engine equipped with this electrical ionization device has its fuel economy enhanced by timely, controlled, and complete combustion of all of the fuel injected into its combustion chamber. Furthermore, the pollutant emissions of both oxides of nitrogen and unburned hydrocarbons are reduced dramatically. Further, cold starting capability of this engine is greatly enhanced by a major reduction in the time necessary for the engine to warm up and a major reduction of pollutants created by the engine during the warm-up period. Additionally, this method of combustion also allows the engine to operate at a higher speed (rpm) allowing an increase in peak power output.

A plasma ignition device is provided with a plasma ignition plug having an insulation member to insulate a center electrode from a ground electrode, and electric power supply circuits to apply high voltages to the plasma ignition plug. The plasma ignition device activates the gas in a discharge space of the insulation member into the plasma of a high temperature and a high pressure by the high voltage applied between the center electrode and the ground electrode and injects the same into an internal combustion engine. The electric power supply circuits are connected to the center electrode as an anode and to the ground electrode as a cathode.

According to a first aspect, a power supply and a method of providing power for igniting a plasma in a reactive gas generator is provided that includes (i) coupling a series resonant circuit that comprises a resonant inductor and a resonant capacitor between a switching power source and a transformer, the transformer having a transformer primary and a plasma secondary; (ii) providing a substantially resonant AC voltage from the resonant capacitor across the transformer primary, thereby inducing a substantially resonant current within the transformer primary to generate the plasma secondary; and (iii) upon generation of the plasma secondary, the resonant inductor limiting current flowing to the switching power supply. According to another aspect, bipolar high voltage ignition electrodes can be used in conjunction with inductive energy coupling to aid in plasma ignition.

A quarter wave coaxial cavity resonator for producing corona discharge plasma from is presented. The quarter wave coaxial cavity resonator has a folded cavity made of opposing concentric cavity members that are nested together to form a continuous cavity ending in a aperture. A center conductor with a tip is positioned in the cavity. The folded cavity advantageously permits the coaxial cavity resonator to resonate at a lower operating frequency than an unfolded quarter wave coaxial cavity resonator of the same length. Embodiments of the quarter wave coaxial cavity resonator use narrower apertures to reduce radiative losses, and include center conductors that are reactive load elements, such as helical coils. When a radio frequency (RF) oscillation is produced in the quarter wave coaxial cavity resonator, corona discharge plasma is formed at the tip of the center conductor. The corona discharge plasma can be used to ignite combustible materials in combustion chambers of combustion engines.

An apparatus and method for the creation, placement and control of an area of electrical ionization within an internal combustion engine combustion chamber or a fuel burner for a furnace is disclosed. A furnace includes a fuel source, a fuel burner, a plasma nozzle and igniter assembly, and the associated housing and flue structures. The plasma nozzle and igniter assembly is arranged so that the fuel sprayed out from the nozzle into the combustion area passes through or in close proximity to the area of plasma ionization. A fuel burner equipped with this electrical ionization device has its fuel efficiency enhanced by the complete and immediate combustion of substantially all of the fuel that passes through the area of plasma ionization. Exhaust gas recirculation using this system is also disclosed.

Provided is high purity nickel or nickel alloy target for magnetron sputtering having superior sputtering film uniformity and in which the magnetic permeability of the target is 100 or more, and this high purity nickel or a nickel alloy target for magnetron sputtering capable of achieving a favorable film uniformity (evenness of film thickness) and superior in plasma ignition (firing) even during the manufacturing process employing a 300 mm wafer. The present invention also provides the manufacturing method of such high purity nickel or nickel alloy target.

A method and apparatus for a sealed high intensity illumination device are disclosed. The device is configured to receive a laser beam from a laser light source. The device has a sealed chamber configured to contain an ionizable medium. The chamber has a substantially flat ingress window disposed within a wall of the integral reflective chamber interior surface configured to admit the laser beam into the chamber, a plasma sustaining region, a plasma ignition region, and a high intensity light egress window configured to emit high intensity light from the chamber. The chamber has an integral reflective chamber interior surface configured to reflect high intensity light from the plasma sustaining region to the egress window. There is a direct path of the laser beam from the laser light source through the lens and ingress window to the lens focal region.

There is provided by this invention a unique ion source for depositing thin films on a substrate in a vacuum chamber that neutralizes the positive electric charges that develop on the substrate and vacuum chamber apparatus that may cause arcing and degradation of the film deposition. A power supply with a reversing voltage waveform is utilized that neutralizes the electric charge on the substrate and the vacuum chamber apparatus. A power supply applies an ac voltage to the anode of the ion source and a rectified ac voltage to the cathode. The ground terminal of the power supply is connected to the vacuum chamber. The rectifying circuit is comprised of zener diodes that clamp the voltage in the circuit from spikes during plasma ignition and a capacitor connected to negatively bias the cathode when there is no plasma discharge.

An igniter (20) of a corona ignition system emits a non-thermal plasma in the form of a corona (30) to ionize and ignite a fuel mixture. The igniter (20) includes an electrode (32) and a ceramic insulator (22) surrounding the electrode (32). The insulator (22) surrounds a firing end (38) of the electrode (32) and blocks the electrode (32) from exposure to the combustion chamber (28). The insulator (22) presents a firing surface (56) exposed to the combustion chamber (28) and emitting the non-thermal plasma. A plurality of electrically conducting elements (24) are disposed in a matrix (26) of the ceramic material and along the firing surface (56) of the insulator (22), such as metal particles embedded in the ceramic material or holes in the ceramic material. The electrically conducting elements (24) reduce arc discharge during operation of the igniter (20) and thus improve the quality of ignition.