2 results about "Coaxial cavity" patented technology

A remote sensing satellite data transmission subsystem based on multi-stage noise suppression comprises a data transmission integrated intelligent terminal, a multi-stage high-suppression-performance channel filter, an adjustable suppression degree phased array antenna, power supply and control equipment; the signal output by the data transmission integrated intelligent terminal is transmitted through the adjustable suppression degree phased array antenna after being filtered by the multi-stage high-suppression-performance channel filter; the power supply and control equipment is used for power supply and data transmission with the data transmission integrated intelligent terminal and the adjustable suppression degree phased array antenna respectively; the multi-stage high-suppression-performance channel filter suppresses the sensitive frequency band of the data transmission subsystem through its own multi-stage coaxial cavity and tuning screw; the adjustable suppression degree phased array antenna suppresses the sensitive frequency band of the data transmission subsystem by setting resonators in its own filtering module.

The application discloses a black quartz rotor cover plate positioning and carrying device and method, and belongs to the technical field of semiconductor equipment. The black quartz rotor cover plate positioning and carrying device comprises a cross-shaped support. First positioning components are arranged below each end of the support. The first positioning components are used for being inserted between the black quartz rotor cover plate and a chamber. Two or more second positioning components are arranged below the support. The second positioning components are used for being inserted into black quartz rotor cover plate positioning holes. Locking components are arranged at each end of the support. The locking components are used for cooperating with the first positioning components to clamp and release the black quartz rotor cover plate. The cross-shaped support, the first positioning components, the second positioning components and the locking components are cooperated to realize accurate positioning in the radial direction, the angular direction and the axial direction at one time, so that the cover plate is coaxial with the chamber, the airflow field and the temperature field of the chamber are uniform, and process repeatability and film uniformity are significantly improved.