The invention discloses a black
quartz rotor cover plate positioning and carrying device and method, and belongs to the technical field of
semiconductor equipment.The black
quartz rotor cover plate positioning and carrying device comprises a support arranged in a cross shape, and a first positioning
assembly is arranged below each end of the support; the first positioning
assembly is used for being inserted between the black
quartz rotor cover plate and the cavity, two or more than two second positioning assemblies are arranged below the support, the second positioning assemblies are used for being inserted into positioning holes of the black quartz rotor cover plate, each end of the support is provided with a locking
assembly, and the locking assemblies are used for being matched with the first positioning assembly to clamp / loosen the black quartz rotor cover plate. Through cooperation of the cross-shaped support, the first positioning assembly, the second positioning assembly and the locking assembly, accurate positioning in the radial direction, the
angular direction and the axial direction is completed at a time, it is ensured that the cover plate and the cavity are coaxial, the
airflow field and the temperature field of the cavity are uniform, and the process
repeatability and the film forming uniformity are remarkably improved.