The invention discloses multifunctional
wafer detection equipment. The equipment comprises an
edge detection module, a
robot, two sets of macroscopic detection units arranged in parallel and a microcosmic detection
assembly. The
robot is arranged on the side of the
edge detection module to transfer the
wafer. Each macroscopic detection unit comprises a
transfer mechanism, a
wafer rotating and transferring mechanism, an external clamping mechanism, an internal clamping mechanism and a photographing module. Wherein the
transfer mechanism is used for receiving wafers from the
robot; the
working range of the rotary wafer
transfer mechanism covers the transfer mechanism, the external clamping mechanism, the internal clamping mechanism and the microscopic detection
assembly, and is responsible for efficiently transferring wafers among the transfer mechanism, the external clamping mechanism, the internal clamping mechanism and the microscopic detection
assembly; the external clamping mechanism and the internal clamping mechanism which are adjacently arranged can carry out wafer
handover; and the photographing module is used for photographing the wafer fixed by the internal clamping mechanism. By optimizing
layout and automatic circulation, efficient integration and continuous proceeding of wafer
edge detection, macroscopic detection and microcosmic detection are achieved, and the detection efficiency and the
automation level are remarkably improved.