397 results about "Micro pattern" patented technology

A method of forming a micro pattern in a semiconductor device, wherein a first polysilicon film, a buffer oxide film, a second polysilicon film, an anti-polishing film, and a first oxide film are sequentially laminated on a semiconductor substrate having a to-be-etched layer. The first oxide film, the anti-polishing film and the second polysilicon film are patterned. After nitride film spacers are formed on the patterned lateral portions, a second oxide film is formed on the entire structure. A Chemical Mechanical Polishing (CMP) process is performed using the anti-polishing film as a stopper. Thereafter, after the nitride film spacers are removed, the second oxide film and the second polysilicon film are removed using a difference in etch selective ratio between the oxide film and the polysilicon film. A hard mask for forming a micro pattern having a structure in which the first polysilicon film and the buffer oxide film are laminated is formed. The to-be-etched layer is etched using the hard mask as an etch barrier.

An apparatus for making a highly repetitive micro-pattern using a laser writer includes one or more diffractive optical elements. At least one diffractive optical element is adapted to split a beam of a laser writer into sub-beams based on a separation distance matching a period of a repetitive structure to be formed in a laser-writable substrate. One or more f-theta lenses are also included. At least one f-theta lens is disposed to intercept the sub-beams, forming a periodic distribution of laser writer output beams.

An aerosol delivery device is disclosed. The aerosol delivery device includes an atomizer and a body. The body has an outlet and houses the atomizer. The aerosol delivery device also includes a structure configured to inhibit liquid droplets of an aerosol precursor from exiting the outlet. Embodiments of the structure include micro-patterned surfaces, absorbers, and macro structures to create droplet capturing chambers.

After rinsing, while rotating a substrate, a front layer part of a rinsing liquid (DIW) adhering to a substrate surface is drained and removed from the substrate surface. This is followed by supply to the substrate surface of a liquid mixture which is obtained by mixing IPA and DIW together. Since a majority of the rinsing liquid on the substrate surface is removed off from the substrate surface, even when micro patterns are formed on the substrate surface, the liquid mixture replaces the liquid component adhering to the gaps between the patterns. Further, the IPA concentration in the liquid mixture supplied to the substrate surface is set to 50% or below. Hence, it is possible to effectively prevent destruction of the patterns while suppressing the consumption amount of

Provided is a method of forming a micropattern according to an aspect of the present invention. The method of forming a micropattern may include forming an organic wire or organic-inorganic hybrid wire mask pattern having a circular or elliptical cross section on a substrate, forming a material layer on an entire surface of the substrate having the organic wire or organic-inorganic hybrid wire mask pattern formed thereon, and removing the organic wire or organic-inorganic hybrid wire mask pattern from the substrate to allow only the material layer on a portion of the substrate having no organic wire or organic-inorganic hybrid wire mask pattern formed thereon to be remained.

The present invention is an apparatus and method for making a polymer patterned electrode for cardiac pacing and sensing. The electrode surface includes a polymer overlayed on an electrode. The polymer layer is patterned to form an electrode surface consisting of a polymer and a conductive metal surface. The electrode can be made of a high or low impedance electrode by changing the conductivity of the polymer. Furthermore, the electrode surface texture can be optimized with a micro pattern that may enhance the biocompatibility. The polymer may be conductive or insulative.

A display apparatus includes a display having an array of pixels separated by inter-pixel gaps and a touch screen. The touch screen includes a dielectric layer located over the display having first and second electrodes each having a length direction and extending across at least a portion of the array of pixels. Each electrode includes a plurality of electrically connected micro-wires formed in a micro-pattern. The micro-patterns each have a first set of parallel micro-wires oriented at a first angle non-orthogonal to the length direction and a second set of parallel micro-wires oriented at a second angle non-orthogonal to the length direction different from the first angle. The micro-wires of the first and second sets intersect to form an array of electrically connected micro-wire intersections. At least every other micro-wire intersection on the micro-wires of the first set is located between the pixels in the inter-pixel gaps.

There is provided a micro-pattern forming apparatus including an electrospraying part for applying a voltage to a solution containing a sample to electrostatically atomizing the solution; a supporting part (30) for supporting a chip (26), on which the sample in the solution electrostatically atomized by the electrospraying part, is to be deposited; and a fine mask part (24) disposed between the electrospraying part and the supporting part, having a mask pattern for being passed through by the electrostatically atomized solution in order to form a micro-pattern of the sample upon the chip, wherein the mask pattern is made from a photoresist material with concavity and convexity on the side of the supporting part.

The invention discloses a colored dynamic three-dimensional moire image thin film based on micro printing and a preparation method of the colored dynamic three-dimensional moire image thin film. The moire image thin film comprises a transparent base material layer, a micro-lens array layer located on one side of the transparent base material layer, and a micro-pattern array layer located on the other side of the transparent base material layer. The micro-lens array layer comprises a plurality of micro-lenses arranged in an array. The micro-pattern array layer comprises a plurality of micro-patterns which are arranged in an array and are different in color. The array arrangement of the micro-lenses is matched with the array arrangement of the micro-patterns. The moire image formed by the moire image thin film is characterized by being colored, dynamic and three-dimensional, and an observer can directly observe a colored three-dimensional dynamic pattern without any special observation skills under any luminous environment.

The present invention relates to an oxide film forming method and an oxide deposition apparatus, which make it possible to form an oxide film at a low temperature of 350° C. or less by respectively supplying a silicon-containing gas including at least one of SiH₄, Si₂H₆, Si₃H₈, TEOS, DCS, HCD and TSA, a purge gas, and a reaction gas including at least one of O₂, N₂O, O₃, H₂0 and H₂O₂ into a reaction space continuously and simultaneously while rotating gas injector, and to form an oxide film with a uniform thickness along a step of a lower structure with a micro-pattern since step coverage is improved due to an atomic layer deposition process.

A micro-pattern transferring stamper includes a supporting base material and a microstructure layer formed on the supporting base material, the microstructure layer is a polymer of a resin composition that mainly contains a silsesquioxane derivative containing a plurality of polymerizable functional groups, and one or plural kinds of monomer elements containing a plurality of polymerizable functional groups.

Disclosed are a mask mold, a manufacturing method thereof, and a method for forming a large-sized micro pattern using the manufactured mask mold, in which the size of a nano-level micro pattern can be enlarged using a simple method with low cost and interference and stitching errors between cells forming a large area can be minimized. The method for manufacturing the mask mold includes the operations of coating resist on a mask or a plurality of small molds having an engraved micro pattern, pressing the small molds to imprint the micro pattern on the resist, curing the resist, and releasing the small molds from the resist.

With the continuous development of tissue engineering, a surface patterning technology is concerned by people more and more and widely applied; and a micro-patterning technology is already used for accurately controlling the position and form of a cell and the co-culture of multiple cells, but a micro-pattern is more difficult to be directly constructed on the surface of hydrogel with good biocompatibility. The high-elasticity and high-toughness patterning hydrogel membrane is prepared on a patterning silicon slice base body by taking sodium alginate as a high-molecular framework, acrylamide and a derivative thereof as polymerization monomers, divinylbenzene, N,N'-methylene bisacrylamide or ethylene glycol dimethacrylate as chemical cross-linking agents and a metal salt water solution as an ionic cross-linking agent and adding inorganic nanoparticles as strengthening agents. The preparation method disclosed by the invention has the advantages of good controllability, simple process, low cost, good material biocompatibility, and the like; and the patterning hydrogel membrane disclosed by the invention is hopeful to be applied to the fields of stem cell culture, tissue regeneration, and the like.

A method of making a display device includes providing a first substrate having an array of pixels located in correspondence thereto, the pixels separated by inter-pixel gaps in at least one dimension. A first electrode having a length and width is formed and located over the first substrate and extends across at least a portion of the array of pixels, the first electrode including a plurality of electrically connected micro-wires formed in a first micro-pattern. The method further includes locating the gap micro-wires of the first micro-pattern between the pixels in the inter-pixel gaps so that the gap micro-wires substantially extend continuously along the first electrode length.

A process, which comprises forming a metal micro-pattern on the surface of an inorganic substrate, surface-treating the surface of the metal micro-pattern and the surface of the plastic substrate to make it chemically reactive, and bringing the metal micro-pattern into contact with the surface of the plastic substrate to transfer the metal micro-pattern from the surface of the inorganic substrate to the surface of the plastic substrate, can be easily and simply carried out using conventional equipments to produce one or more metal pattern fixed on a plastic material.

The invention discloses a micro-fluidic device for micro-magnetic field control and a manufacturing method thereof. The device consists of a micro-fluidic fluid layer chip, a substrate provided with soft magnetic material micro-patterns, and a magnetic source body. The substrate provided with the soft magnetic material micro-patterns is a transparent conducting substrate, wherein the micro-patterns are arranged and designed corresponding to needed magnetic beads, and a layer of a polymeric material is covered on the micro-patterns to realize a connection in a permanent irreversible bonding mode with the micro-fluidic fluid layer chip. Under the action of an external magnetic field, nickel micro-patterns are magnetized and generate a strong local magnetic field gradient to realize the magnetic field control in a micron range. The device can capture magnetic substances at a high flow speed, and can release the magnetic substances at a low flow speed after the magnetic source body is removed. The device can be used in the fields of organism-targeted material detection, gene analysis, quick immunoassay, cell screening and the like.

Example embodiments relate to a method of forming a three-dimensional micro pattern or a multi-step pattern using a nano imprinting process and a method of manufacturing a mold to form such a pattern. A molding polymer may be patterned in a one-step shape on a substrate having UV barrier patterns, thereby easing the manufacture of a mold for multi-step imprinting and simplifying the formation of a multi-step pattern using the one-step shaped mold by avoiding the repetition of more complicated processes. Consequently, it may be possible to form a relatively large-area micro pattern, a relatively large-area pattern usable in flat panel displays, and a nano pattern having a size of several tens of nanometers in a semiconductor process, thereby contributing to the reduction of process costs, the reduction of process time, and the improvement of production yield.

Provided is a method of forming micro-patterns using a multi-photolithography process, including: providing an etch target layer where micro-patterns are to be formed; forming a mask layer on the etch target layer; forming a first mask pattern including engraved portions and embossed portions by etching a predetermined region of the mask layer; forming a final mask pattern in the first mask pattern by etching a predetermined region of the residual embossed portions of the mask layer; and forming micro-patterns by etching the etch target layer using the final mask pattern as an etch mask.

The invention belongs to the field of biomedical materials, and particularly relates to photo-curing hydrogel for multi-cell sorting and stem cell area-selecting differentiation and a preparation method thereof. The photo-curing hydrogel is prepared by taking modified high-polymer materials with the photo-curing performance as raw materials and are divided into multiple different areas by straight-stripe-shaped or net-stripe-shaped or annular-stripe-shaped micro-pattern structures, the hardness of the photo-curing hydrogel in the same area is same, the hardness of the photo-curing hydrogel in the different areas is same or different, and the overall photo-curing hydrogel at least has two kinds of the hardness. According to the photo-curing hydrogel for multi-cell sorting and stem cell area-selecting differentiation and the preparation method thereof, on one hand, the elasticity moduli of all the areas of the photo-curing hydrogel are different by controlling the ultraviolet radiation curing degree; on the other hand, all the areas with the different elasticity moduli present the micro-pattern structures on the photo-curing hydrogel, selective adhesion, proliferation and differentiation of cells on the photo-curing hydrogel can be achieved by combining the elasticity moduli with the micro-pattern structures, and therefore controllable cell sorting or stem cell area-selecting differentiation can be achieved.

A method of forming a micro pattern of a semiconductor device includes forming an etch target layer, a hard mask layer, a Bottom Anti-Reflective Coating (BARC) layer and a first photoresist pattern over a semiconductor substrate. An organic layer is formed on a surface of the first photoresist pattern. A second photoresist layer is formed over the BARC layer and the organic layer. An etch process is performed so that the second photoresist layer remains on the BARC layer between the first photoresist patterns and becomes a second photoresist pattern. The organic layer on the first photoresist pattern and between the first and second photoresist patterns is removed. The BARC layer formed below the organic layer is removed. The hard mask layer is etched using the first and second photoresist patterns as an etch mask. The etch target layer is etched using a hard mask pattern as an etch mask.

The present invention relates to an organic solar cell made of a transparent conductive polymer electrode and a fabricating method thereof. An anode electrode is formed on a substrate, a photoactive layer is formed on the anode electrode, and a cathode electrode is then formed on the photoactive layer. The anode electrode is formed by stacking conductive polymer particles by an electrostatic spray printing method, and a micro pattern is formed on the substrate before forming the anode electrode. The micro pattern is formed by hot embossing, the photoactive layer is formed by gravure printing or spin coating, and the cathode electrode is formed by screen print or evaporation deposition. A series of processes for fabricating an organic solar cell is performed using a roll-to-roll process.

The invention provides a mask plate and a method for composing a picture with the same, and the mask plate and the method relate to the technical field of displaying and solve the problem of the prior art that no color film substrate with a large size can be manufactured. The mask plate comprises at least one mask unit group; each mask unit group form a row, and comprises a first mask unit which is arranged on one end, a second mask unit which is arranged on the other end, and at least one third mask unit which is arranged between the two ends; each mask unit is provided with a mask pattern; the mask pattern of each mask unit comprises a plurality of micro patterns and gaps on one side which is close to the adjacent mask unit and below the outline of the mask pattern; and the micro patterns and the gaps of the mask patterns of the two adjacent mask units on two sides which are close to each other are mutually matched. The mask plate and the method for composing the picture with the same are applicable to the field of the manufacturing of liquid crystal display devices.

Disclosed herein is a helical implant. The helical implant is formed with threads theron and each of threads has threads inclines comprising micro-patterns, such as recesses and protrution, on the thread inclines. The micro-patterns on the helical implant may have triangular patterns 100a, stepped patterns 100b and acruate 100c or combination patterns 100d composed of plurality of patterns. The micro-patterns preferably have a cross sectional area of 150 μm. The helical implant has an increased contact area at the fixed portion, so that the volume of the bone induced between the threads 10b is increased from the several dozens of μm level to fifty times that at maximum, thereby dispersing load at the implanted portion and preventing physical damage near the implanted portion.