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38 results about "Pulse energy density" patented technology

Method of multiple pulse laser annealing to activate ultra-shallow junctions

A method for forming a highly activated ultra shallow ion implanted semiconductive elements for use in sub-tenth micron MOSFET technology is described. A key feature of the method is the ability to activate the implanted impurity to a highly active state without permitting the dopant to diffuse further to deepen the junction. A selected single crystalline silicon active region is first amorphized by implanting a heavy ion such as silicon or germanium. A semiconductive impurity for example boron is then implanted and activated by pulsed laser annealing whereby the pulse fluence, frequency, and duration are chosen to maintain the amorphized region just below it's melting temperature. It is found that just below the melting temperature there is sufficient local ion mobility to secure the dopant into active positions within the silicon matrix to achieve a high degree of activation with essentially no change in concentration profile. The selection of the proper laser annealing parameters is optimized by observation of the reduction of sheet resistance and concentration profile as measured on a test site. Application of the method is applied to forming a MOS FET and a CMOS device. The additional processing steps required by the invention are applied simultaneously to both n-channel and p-channel devices of the CMOS device pair.
Owner:CHARTERED SEMICONDUCTOR MANUFACTURING

Method and system for measuring at least one property including a magnetic property of a material using pulsed laser sources

A method of measuring at least one property including a magnetic property of target material is provided. The method includes the step of generating a pump pulse train having one or more pump pulses at a repetition rate along a first propagation path, each pump pulse having a pulse energy density, a laser wavelength within a range of laser wavelengths, and a pulse duration The method further includes the step of irradiating the target material with at least a portion of the one or more pump pulses focused into at least one spot having a spot shape and size so as to cause transient perturbation in the target material. The method still further includes the step of generating at least one probe pulse train having one or more probe pulses at a repetition rate along a second propagation path, each probe pulse having a pulse energy density, a laser wavelength within a range of laser wavelengths, and a pulse duration. The method further includes the step of irradiating the target material with at least a portion of the one or more probe pulses focused into at least one spot having a spot shape and size to obtain one or more reflected probe pulses which are modulated based on the transient perturbation. The method still further includes the step of electronically controlling a time interval between a time at which the target material is irradiated by each of the focused pump pulses and a time at which the target material is irradiated by each of its corresponding focused probe pulses. The method further includes the step of detecting each modulated probe pulse to obtain one or more corresponding signals. The method still further includes the step of processing the one or more signals to obtain one or more measurement signals which represents the at least one property including the magnetic property of the target material.
Owner:RGT UNIV OF MICHIGAN

Laser processing system and method

The invention discloses a laser processing system and method. The laser processing system comprises a laser machine, an optical system, a sensor, a processor and a controller, wherein the laser machine is used for providing laser needed for processing, the optical system is arranged above a workpiece table and is used for adjusting the size of a laser spot, and projecting the adjusted laser spot onto the workpiece table, the sensor is arranged above the workpiece table and is used for collecting parameter information of workpiece material, the processor is connected with the sensor and is used for receiving and processing the parameter information acquired by the sensor to obtain the size of the laser spot needed by the workpiece material, and the controller is connected with the processor and is used for receiving the information of the processor to control the optical system. According to the laser processing system, the parameter information of the workpiece material is collected in real time through the sensor, the required size of the laser spot is calculated through the processor, the laser pulse energy density is adjusted in real time by adopting the controller to control the optical system to change the size of the laser spot, so that the real-time performance is good, and the cutting efficiency is high; and in the cutting process, the laser machine outputs lasers at the rated laser power all the time, and the utilization rate of laser energy is improved.
Owner:SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD

Multiple wave band narrowband high power microwave-based damage effect test method for electroacoustic alarm controller

The invention discloses a multiple wave band narrowband high power microwave-based damage effect test method for an electroacoustic alarm controller. The electroacoustic alarm controller is placed in a test zone, and the method comprises the following steps: in step a1, L wave band high power microwave radiation is set in a system, and the electroacoustic alarm controller faces right to radiation wave waves; in step a2, the electroacoustic alarm controller faces sideways to the radiation wave waves; in step a3, the electroacoustic alarm controller faces in a direction opposite to the radiation waves; in step a4, a polarization mode is changed to a vertical polarization mode; in step a5, a wire cable is hidden in wave absorbing material; in step a6, minimum pulse energy density in steps from step a1 to step a5 is chosen as an interference threshold value for a sample; in step a7, the sample is changed, the steps from step a1 to step a6 are repeated; in step a8, a threshold value range of damage caused on the electroacoustic alarm controller by a wave band high power microwave; in step a9, the microwave radiation system is orderly adjusted to be an S wave band microwave radiation system, a C wave band microwave radiation system and an X wave band microwave radiation system; the test steps from step a1 to step a8 are repeated. The damage effect test method is advantaged by well-organized structure, strong pertinency, easy-to-implement property and the like.
Owner:UNIT 61489 OF PLA

Method for calibrating incident energy density of front surface of wafer

The invention relates to a method for calibrating the incident energy density of the front surface of a wafer, which comprises the following steps of: providing an undoped wafer, annealing by adopting laser with different energy densities, controlling the uncalibrated energy density by a feedback loop, and providing the measurement of the incident energy density in any unit; in the annealing process, surface roughness testing is conducted on a wafer through an AFM, and a threshold value change point at the beginning of surface melting and the corresponding actual incident energy density are obtained; and according to the incident energy density of any unit and the actual incident energy density corresponding to the threshold value change point, incident energy density calibration is carried out. According to the method, the incident laser pulse energy density is calibrated by using the sudden threshold change of the surface roughness measured by the AFM at the beginning of wafer surface melting; performing incident ED period monitoring on sub-melt boron doping activation of the silicon substrate at the temperature of 1300 DEG C; tool and process matching is performed using epitaxial regrowth of an amorphous doped silicon phosphorus layer at 1200 DEG C or below, and the matching is in the range of 1% of the energy density.
Owner:SHANGHAI HUALI MICROELECTRONICS CORP

A method of using multi-band narrow-band high-power microwaves to test the damage effect of electro-acoustic alarm controllers

The invention discloses a multiple wave band narrowband high power microwave-based damage effect test method for an electroacoustic alarm controller. The electroacoustic alarm controller is placed in a test zone, and the method comprises the following steps: in step a1, L wave band high power microwave radiation is set in a system, and the electroacoustic alarm controller faces right to radiation wave waves; in step a2, the electroacoustic alarm controller faces sideways to the radiation wave waves; in step a3, the electroacoustic alarm controller faces in a direction opposite to the radiation waves; in step a4, a polarization mode is changed to a vertical polarization mode; in step a5, a wire cable is hidden in wave absorbing material; in step a6, minimum pulse energy density in steps from step a1 to step a5 is chosen as an interference threshold value for a sample; in step a7, the sample is changed, the steps from step a1 to step a6 are repeated; in step a8, a threshold value range of damage caused on the electroacoustic alarm controller by a wave band high power microwave; in step a9, the microwave radiation system is orderly adjusted to be an S wave band microwave radiation system, a C wave band microwave radiation system and an X wave band microwave radiation system; the test steps from step a1 to step a8 are repeated. The damage effect test method is advantaged by well-organized structure, strong pertinency, easy-to-implement property and the like.
Owner:UNIT 61489 OF PLA

Method for producing crystalline semiconductor film

ActiveCN104871291BMinimize the difference in characteristicsEffective laser annealingTransistorSolid-state devicesSingle crystalBeam cross section
A manufacturing method in which, when laser-annealing a non-single-crystal semiconductor film, in order to crystallize the semiconductor film using an appropriate scanning pitch and number of irradiation cycles, a line-beam-shaped pulse laser, having a short-axis width of 100-500 µm and a flat section in the beam cross-section shape in the short-axis direction, is scanned relative to the non-single-crystal semiconductor film, whereby the laser moves at each pulse, and performs overlapping irradiation at an irradiation cycle (n), the transistor channel length being defined as b; the pulse laser having an irradiation pulse energy density (E) at which crystal particle size growth reaches saturation due to multiple-cycle irradiation, the density being lower than the irradiation pulse energy density at which microcrystallization occurs on the non-single-crystal semiconductor film due to the irradiation of the pulse laser; the number of irradiation cycles (n) being at least (n0-1), where n0 is the number of irradiation cycles at which the growth in the crystal grain diameter, induced by the pulse laser irradiation having irradiation pulse energy density (E), reaches saturation; the scanning direction of the pulse laser being defined as the channel length direction of the transistor; and a movement amount (c) for each pulse being less than b.
Owner:JSW阿克迪纳系统有限公司
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