The invention discloses a preparation method of a low-reflection
germanium-based antireflection film
system for
infrared long
waves. The preparation method comprises the following steps: S1, cleaning an accompanying plating sheet serving as a
germanium substrate of a lens and a product before plating, and preparing three film materials of Ge, ZnS and YbF3; s2, the cleaned lens is put into a tool clamp, the tool clamp with the lens is hung into a cavity of a
coating machine, and vacuumizing baking and
film material pre-melting are carried out; s3, cleaning the lens by an
ion source; s4, under the vacuum condition, the first face of the lens is sequentially plated with a first Ge film layer, a second ZnS film layer, a third Ge film layer, a fourth ZnS film layer, a fifth Ge film layer, a sixth ZnS film layer, a seventh YbF3 film layer and an eighth ZnS film layer, the eight film
layers form a film
system, and
ion source auxiliary deposition is used for all the film
layers; s5, keeping at constant temperature after plating; s6, cooling and part taking; and S7, repeating the steps S1 to S6, and plating the same film
system on the second surface of the lens. Therefore, the
transmittance of the
wave band of 8-14 microns can be improved, and the surface
reflectivity can be reduced at the same time.