The invention discloses an
optical fiber Fabry-Perot sensor for detecting C4F7N gas and
decomposition products thereof, belongs to the technical field of C4F7N gas detection, and solves the problem of how to improve the sensitivity of the
optical fiber Fabry-Perot sensor for detecting the C4F7N gas and the
decomposition products thereof. According to the
optical fiber Fabry-Perot sensor for detecting the C4F7N gas and the
decomposition products thereof, the Fabry-Perot cavity is formed by the interval between the end face of the single-mode optical
fiber and the surface of the groove, emergent light of the single-mode optical
fiber is reflected by the surface of the groove, the reflected light is converged by the groove, the loss of the reflected light is reduced, and the detection accuracy of the C4F7N gas and the decomposition products thereof is improved. Gold is uniformly sputtered on one surface of the groove of the sensing diaphragm device layer to form a layer of reflecting film, so that the
reflectivity is further improved, reflected light is efficiently coupled into the single-mode optical
fiber, the
contrast ratio of a light interference peak is improved, and the detection sensitivity of the sensor is further improved; the sensor is simple in structure, small in size, high in reliability and capable of achieving high-sensitivity measurement of the C4F7N gas decomposition products.