Nanometer array and method for forming the same

A nano-array and nano-technology, applied in the direction of nano-technology, nano-technology, nano-structure manufacturing, etc., can solve the problems of nano-structure damage, polymer structure deformation, high process cost, etc.

CN101177237AInactive Publication Date: 2008-05-14IND TECH RES INST
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2008-05-14
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention provides a method forming nanometer array, which comprises a template with a plurality of nanometer holes; which is characterized in that pressing art is performed on a macromolecule base material for the template; the template is stripped, thereby a plurality of bulges on the macromolecule base material are formed.
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Description

Technical field

[0001] The present invention relates to a method for forming a nanoarray, and more particularly to a method for forming a nanoarray by imprinting. Background technique

[0002] The regular nano-structured surface has special effects, such as compound eye structure with ultra-low reflectivity moth eye, insect wing structure resistant to dust adhesion, lotuse effect of hydrophobic self-cleaning lotus leaf surface, etc. The scale is about 100nm The structure has special properties. How to apply the functions of these nanostructures in daily life is the goal of the development of nanotechnology. Generally, if polymers want to achieve hydrophobic self-cleaning, oil resistance or reflectivity reduction, they must undergo secondary surface chemical or physical treatment to obtain the above-mentioned functions. The process is quite complicated and expensive, and a variety of chemistries must be used. Product or additional equipment. Taking photolithography technology as a...

Examples

Embodiment Construction

[0036] The invention utilizes the concept of polymer film imprinting and can be widely used in thermoplastic polymer materials without melting the polymer materials in organic solvents, avoiding structural deformation and environmental protection problems caused by solvent removal and solvent volatilization in the future.

[0037] Figure 1 to Figure 3 It shows the flow chart of the present invention using the hot-pressing nano-imprinting method and using porous anodized aluminum as the imprinting template to form the nano-array. Such as figure 1 As shown, the aluminum oxide template 101 is formed by anodizing pure aluminum and has a plurality of nano-holes 105. Secondary anodizing can also be used to increase the uniformity of the nano-hole diameter, so as to precisely control the nano-pores formed after the imprinting process. The error of the array diameter, in one embodiment, the diameter of the nanoholes is about less than 200 nm, preferably between about 20 nm and 150 nm. ...