Femtosecond laser amorphism fine machining method for amorphous alloy

An amorphous alloy and femtosecond laser technology, applied in metal processing equipment, laser welding equipment, manufacturing tools, etc., can solve the problems of easy material crystallization, oxidation and crystallization, and low processing accuracy, and achieve sustainable The effect of short time, avoiding oxidation phenomenon, and high peak power

Inactive Publication Date: 2007-05-23
HUAZHONG UNIV OF SCI & TECH
View PDF0 Cites 13 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Tool cutting is a conventional and convenient processing method. The disadvantages of this processing method are: the processing accuracy is not high, it can only be guaranteed at the level of hundreds of microns, and it is difficult to be used for micron-level processing; there is a speed threshold, and cutting at a speed higher than the threshold When the temperature is too high, it is easy to cause the thermal effect of the cut, and the oxidation and crystallization will occur if the temperature is too high
The disadvantages of t

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] A micromachining method for amorphous alloys with femtosecond laser: Carry out wire cutting on amorphous alloy samples, cut them into targets with a thickness of 0.5mm, and then perform surface polishing, and then polish the amorphous alloy targets The thickness is 0.2mm; the amorphous alloy sample is drilled with a femtosecond laser, the central wavelength of the femtosecond laser is 800nm, the repetition frequency is 1KHz, and the pulse energy density is 50J / cm 2 , the pulse width is 45fs. Ultrasonic cleaning can be carried out after drilling to remove pollution in femtosecond laser processing.

[0025] After the cleaning was completed, the morphology of the punched holes was observed through a scanning electron microscope, and the diameter of the punched holes was only 23 μm; it was observed through the transmission electron microscope and electron diffraction that there was no crystallization in the punched area of ​​the amorphous alloy target.

Embodiment 2

[0027] A microfabrication method for amorphous alloys with femtosecond lasers: Carry out wire cutting on amorphous alloy samples and cut them into targets with a thickness of 1mm; use femtosecond lasers to punch holes in amorphous alloy targets, The central wavelength of the second laser is 800nm, the repetition frequency is 1KHz, and the pulse energy density is 75J / cm 2 , the pulse width is 70fs. Ultrasonic cleaning can be carried out after drilling to remove pollution in femtosecond laser processing.

[0028] The diameter of the punched hole is only 28 μm, and no crystallization occurs in the punched area of ​​the sample.

Embodiment 3

[0030] A micromachining method for amorphization of amorphous alloys by femtosecond laser: Carry out wire cutting on amorphous alloy samples, cut them into targets with a thickness of 0.5mm, and then perform surface polishing, and the thickness of amorphous alloy samples after polishing 0.2mm; use femtosecond laser to drill holes in amorphous alloy samples, the central wavelength of femtosecond laser is 800nm, the repetition frequency is 1KHz, and the pulse energy density is 100J / cm 2 , the pulse width is 100fs.

[0031] The diameter of the punched hole is only 30 μm, and no crystallization occurs in the punched area of ​​the sample.

[0032] Score Example 1

[0033] A microfabrication method for amorphous alloys with femtosecond lasers: Carry out wire cutting on amorphous alloy targets and cut them into samples with a thickness of 1mm; use femtosecond lasers to scribe lines on amorphous alloy samples, The center wavelength is 800nm, the repetition frequency is 1KHz, and the...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention relates to a non-crystal fine processing method which uses femtosecond laser to process non-crystal alloy, wherein said method uses femtosecond laser to make hole, etch, and cut the non-crystal alloy, while the impulse energy density of femtosecond laser is 50-100H/cm2 and the impulse width is 45-100fs in holing; the impulse energy density is 3-15J/cm2, the impulse width is 45-100fs, and the scanning speed is 100-200 mum/s in etching line; the impulse energy density is 75-110J/cm2, the impulse width is 45-100fs, and the scanning speed is 100-200 mum/s in cutting. The invention can realize sub-micron processing accuracy, without crystallization in etching area.

Description

technical field [0001] The invention relates to a microprocessing method of an amorphous alloy material by an ultrashort pulse laser, in particular to a microprocessing method of amorphizing an amorphous alloy by using a femtosecond laser. Background technique [0002] Development of amorphous alloys: since 1960, Au was first prepared from liquid metal by melt quenching method 75 Si 25 Since amorphous alloy flakes, amorphous alloys have attracted widespread attention for their specific and excellent mechanical, electrical, magnetic, and physical and chemical properties. After more than 40 years of research and development, great progress has been made in the research on the formation, structure, performance, crystallization, preparation and application of amorphous alloys, and Fe-based, Ni-based, Co-based, Zr-based alloys have been developed. , Ti-based, Al-based, Mg-based, Ln-based, Cu-based, Pd-based, Ca-based and other series of amorphous alloys, and realized the prepar...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): B23P23/00B23H7/02B23K26/38B23K26/42B23K26/00B23K26/352B23K26/70
Inventor 陆培祥王新林廖常锐戴能利杨光李玉华
Owner HUAZHONG UNIV OF SCI & TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap