Femtosecond laser amorphism fine machining method for amorphous alloy

Abstract

The invention relates to a non-crystal fine processing method which uses femtosecond laser to process non-crystal alloy, wherein said method uses femtosecond laser to make hole, etch, and cut the non-crystal alloy, while the impulse energy density of femtosecond laser is 50-100H / cm2 and the impulse width is 45-100fs in holing; the impulse energy density is 3-15J / cm2, the impulse width is 45-100fs, and the scanning speed is 100-200 mum / s in etching line; the impulse energy density is 75-110J / cm2, the impulse width is 45-100fs, and the scanning speed is 100-200 mum / s in cutting. The invention can realize sub-micron processing accuracy, without crystallization in etching area.

Description

technical field [0001] The invention relates to a microprocessing method of an amorphous alloy material by an ultrashort pulse laser, in particular to a microprocessing method of amorphizing an amorphous alloy by using a femtosecond laser. Background technique [0002] Development of amorphous alloys: since 1960, Au was first prepared from liquid metal by melt quenching method 75 Si 25 Since amorphous alloy flakes, amorphous alloys have attracted widespread attention for their specific and excellent mechanical, electrical, magnetic, and physical and chemical properties. After more than 40 years of research and development, great progress has been made in the research on the formation, structure, performance, crystallization, preparation and application of amorphous alloys, and Fe-based, Ni-based, Co-based, Zr-based alloys have been developed. , Ti-based, Al-based, Mg-based, Ln-based, Cu-based, Pd-based, Ca-based and other series of amorphous alloys, and realized the prepar...

AI Technical Summary

Problems solved by technology

[0006] Tool cutting is a conventional and convenient processing method. The disadvantages of this processing method are: the processing accuracy is not high, it can only be guaranteed at the level of hundreds of microns, and it is difficult to be used for micron-level processing; there is a speed threshold, and cutting at a speed higher than the threshold When the temperature is too high, it is easy to cause the thermal effect of the cut, and the oxidation and crystallization will occur if the temperature is too high

The disadvantages of this processing method are: the quality of the cutting surface is rough, and there are obvious cutting lines; the processing accuracy can only be guaranteed above 100 μm, which is difficult for micro-processing

CO 2 The disadvantages of laser and YAG laser processing are: the processing accuracy is low at the millimeter level; the thermal effect during the processing is high, which will produce material splashing, recasting residue and heat-affected zone; the processing area is prone to material crystallization and requires argon protection