73results about How to "Improve horizontal resolution" patented technology

The invention belongs to the technical field of optical precision measurement, relating to super-resolution laser polarization differential confocal imaging method and device. The method improves the transverse resolution power by combining a radial polarized light and a pupil filtering technology, improves the axial resolution power by using a differential subtraction detection technology of an axial-offset dual-detector system and remarkably improves the spatial resolution power and tomography ability of the system. The device comprises a laser source as well as a beam expander, a polarization state modulation system, a pupil filter and a spectroscope which are sequentially arranged at a transmitting end of the laser source, an objective and a sample which are arranged in the transmitted light direction of the spectroscope in turn, and a differential confocal system in the opposite direction of the reflected light direction of the spectroscope. The invention combines the radial polarized light resolution technology with the pupil filtering technology and improves the transverse resolution power of the system; moreover, the differential work mode of the invention can remarkably improve the axial imaging ability of the system and is applicable to the high-precision detection and metering of nanometer-level geometrical parameters in the nanometer manufacturing field.

The invention belongs to the technical field of spectrum measurement, and relates to a high spatial resolution biaxial differential confocal spectrum imaging method and an apparatus. According to the present invention, the biaxial differential confocal microscopy technology and the spectrum detection technology are fused, focal spot cutting differential detection is adopted so as to achieve precise imaging of the geometry position, simplify the optical path structure of the traditional differential confocal microscopy system, inherit the advantages of large visual field and large work distance of the biaxial microscopy technology, and achieve high spatial resolution spectrum integrated detection of the system; and high spatial resolution is provided, three modes such as three-dimensional tomography geometry imaging, spectrum detection and micro-region spectrum tomography imaging are provided, a new solving approach is provided for micro-region spectrum detection, and broad application prospects are provided in the fields of biomedicine, physical material science and the like.

The invention belongs to the technical field of optical precise measurement and relates to a super-resolution double-shaft differential confocal measuring method and a super-resolution double-shaft differential confocal measuring device. In the method and the device, pupil filtering technology is fused in a double-shaft confocal measuring structure, and a differential treatment method is used for receiving a measured light beam and carrying out treatment, thereby achieving the aims of improving resolution, expanding working distance, improving anti-interference capability and improving linear range. The invention can be used for precise measurement in such fields as micro-electronics, materials, industrial precise detection, biomedicine, etc.

The invention belongs to the field of measuring a microfine structure of surfaces, relating to a laser three-differential cofocal theta imaging detection method. In the method, optical path arrangement with cofocal theta microscopy is adopted to scan and measure detected samples, the pupil plane of an objective lens is divided into a lighting pupil and a collecting pupil, an incident beam is converged on a detected surface by the objective lens after permeating the lighting pupil, reflected light carrying information of the detected samples is converged on a detection plane by a converging lens after passing the collecting pupil, three areas are arranged on a detected focal plane to obtain the response of the three areas and obtain the response characteristic equation of a detector, and the surface appearance and microscale of the detected samples can be reconstructed according to the intensity of a curve in a linear area or a position where the intensity is zero. In the method, the structure is simple, the resolution capability and range capacity can be effectively considered, and optical high-resolution absolute measurement on the surface appearance, three-dimensional microfine structure and the like of an object can be realized.

The invention relates to a device for detecting domain modulation of ferroelectric crystals in real time, and the device comprises a helium-neon laser, a filter, a collimating device, a first totally-reflection mirror, a second total-reflection mirror, a beam splitter prism, an imaging lens, a charge couple device (CCD) coupler and a computer. The device is contactless and free from damage and has high resolution ratio, not only can the dynamic variation of a domain structure be monitored in real time and quantitatively analyzed, but also the static response of the domain structure for an external electric field can be detected, and two-dimensional information and three-dimensional information of the reversal domain structure can be obtained.

This invention relates to an image recovery and pupil filtering type transverse super-resolution confocal microscopic imaging method and apparatus, which comprises a light source (1) with a collimated beam expander (2) and a pupil filter (3), a split-beam polarizer (4) with a 1/4 plate (5) and a microscopic objective lens (6) both on reflection path and a collecting lens (7) on transmitted path that comprises a pinhole (8) on focus of (7) and a CCD probe (9) behind (8). This invention improves system lateral resolution and has wide application.

The invention provides a transient electromagnetic detection apparatus and a method of eliminating inductive disturbance. The transient electromagnetic detection apparatus includes a coil device and aframework carrier, wherein the coil device includes dual transmission coils, receiving coils and a coil fixing mount; the dual transmission coils include first and second transmission coils which areparallel to each other, are not in the same plane and can generate counter magnetic fields at the center of the respective coil at any power-on moment; the receiving coils are arranged between the dual transmission coils, and for the distance, the constraint is that earlier signals are not beyond the amplitude; a rotation shaft which is parallel to the dual transmission coils and can drive the coil device to overturn is arranged on the coil fixing mount; and a nonmetal handle is arranged on the rotation shaft. The method of eliminating inductive disturbance measures the signals before and after 180DEG overturning of the coil device at the same position point and performs difference processing, by enabling the transmission coils in the detection apparatus to approach the area to be detected and enabling the normal of the transmission coils to be perpendicular to the area to be detected. The method of eliminating inductive disturbance enables earlier signals not to be beyond amplitude,and can capture whole course secondary field signals by eliminating inductive disturbance and enhance the distinguishing result.

A linear laser phase-shift interference triangular micro-displacement measuring device and method belong to the technical field of ultra-precision measurement. According to the invention, a phase-shift interference technology and a laser triangulation technology are combined to realize wide-range and high-precision micro-displacement measurement. According to the phase-shift interference principleand the laser triangulation principle, a light source output is changed into a linear parallel beam by adopting shape beam expansion, and four linear interference beams with 90-degree phase shifts insequence are obtained synchronously by grating beam splitting and a four-quadrant analyzer group. Meanwhile, a linear laser triangulation system obtains rough displacement measurement data by partialdiffuse reflection light. When the maximum error of linear laser triangulation measurement is less than 1/4 of an interference signal period, an accurate displacement value can be obtained by certainsolution. The measuring accuracy is high, the measuring range is wide, linear scan measuring can be realized, and the measuring device and method are suitable for measuring the step height, the filmthickness, the displacement/position of a moving part and the like in a microstructure device.

The invention provides a super-resolution structure detection array confocal fluorescence imaging device and an imaging method thereof, relating to imaging devices and imaging methods thereof and aiming to solve the problems that the resolution of the existing confocal limiting technology is difficult to increase and confocal images are not clear. The device comprises a laser source, wherein a collimator and beam expander, a beam splitter prism, a 1/4 wave plate, a scanning system, an illumination objective, a fluorescent sample, a collecting lens and a CCD (charge coupled device) detector are arranged along the ray propagation direction of the laser source in sequence. The device has the effects that integration is carried out on a detection plane to change the light sensitivity of a corresponding detecting location; the OTF (optical transfer function) bandwidth of a system is expanded; the spatial cut-off frequency of a confocal fluorescence imaging system is improved and the spatial frequency domain bandwidth is expanded, thus obviously improving the lateral resolution of the imaging system; and the device is applicable to the measurement field of industrial topographic imaging.

The invention discloses a long focal length super resolution two-time confocal measuring device, comprising a laser device, a collimation extender lens group, a polarizing beam splitter, a quarter wave plate, a super resolution filter, an adjustable stop, and a splitter, which are arranged on one optical path. The long focal length super resolution two-time confocal measuring device further comprises a data processing device for attaining and recording the optical signals detected by a point detector when a focusing objective lens is driven by a micro-drive apparatus to be different positions, and converting a plurality of optical signals of the detector into phase values via four-step phase shifting method. The invention pupil filter to compress the transverse diffraction mode of measurement light spot, and expand axial diffraction mode, thereby improving transverse resolution and expanding axial measurement range without reducing axial resolution.

A super-resolution structure detection confocal coherent imaging device and an imaging method thereof relate to an imaging device and an imaging method thereof. The objective of the invention is to solve the problems that the resolution of the confocal spacing technology is difficult to improve and the confocal imaging is not clear. The device provided by the invention comprises a laser source; a collimation device, a beam splitter prism, a 1/4 wave plate, a scanning system, an illumination object lens, an industrial sample, a collection lens and a CCD detector are arranged in order in the ray propagation direction of the laser source; and integration is performed on the detection surface to change the luminous sensitivity corresponding to the detection position so as to allow the system CTF bandwidth to be enlarged. The spatial-cut-off frequency of a confocal coherent imaging system is improved, and the space frequency domain bandwidth is broadened, so that the transverse resolution of the imaging system is substantially improved; and moreover, the super-resolution structure detection confocal coherent imaging device and the imaging method thereof are suitable for the measurement field of the industry morphology imaging.

The invention belongs to the technical field of optical precision measurement, and provides a super resolution moving grating confocal imaging device and a confocal imaging method. The super resolution moving grating confocal imaging device is provided with a modulation moving grating, a demodulation moving grating and a signal processing device. The modulation moving grating and the demodulation moving grating are the same in type and in space cycle, and do linear motion or circumferential rotation at a conjugate position between an object space and an image space in constant speed in opposite directions. The signal processing device has a filtering or time integral function. The confocal imaging method includes the steps of using the modulation moving grating to carry out space-time modulation on light passing through samples in a confocal system, carrying out demodulation through the demodulation moving grating before the modulation light enters a light intensity detector, obtaining the instantaneous light intensity signals of scanning points, and carrying out signal processing to obtain the light intensity of the scanning points. The super resolution moving grating confocal imaging device and the confocal imaging method can improve spatial-cut-off frequency of the confocal system, even can enable implicit vector wave components to participate in imaging, broaden space frequency band width, and remarkably improve horizontal resolving ability, and is especially suitable for the measuring field for improving numerical aperture and achieving the measuring field of near-field implicit vector wave components imaging in a far field.

A super-resolution acousto-optic modulation confocal imaging device and method belongs to the technical field of precise optical measurement. The device is provided with a Raman-Nath diffraction modulation acousto-optic grating and a Raman-Nath diffraction demodulation acousto-optic grating, which are the same in type and spatial period, and are driven ultrasonically at the same frequency in opposite directions in the conjugate position of the object space and the image space, and is provided with a signal processing device with a filtering or time integration function; the method is characterized in that light, passing through a sample, in a confocal system is subjected to space-time modulation by using the modulation acousto-optic grating, the modulation light is demodulated before entering into the demodulation acousto-optic grating so as to obtain a scanning spot instantaneous light intensity signal, and signal processing is carried out finally to obtain scanning spot light intensity. Even if no moving parts are required to be led into the device and the method, the spatial-cut-off frequency of the confocal system can be improved, even the implicit vector wave component can be enabled to participate in imaging, the space frequency domain bandwidth is widened, the transverse resolution of the system is improved remarkably, and the device and the method are especially suitable for increasing the numerical aperture and realizing the measuring field of the near-field implicit vector wave component during the far-field imaging.

The invention discloses a method for improving phased array ultrasonic detection capability of an R region of a complex-shaped component, and belongs to the field of high-end equipment manufacturing and detection. The method comprises the following steps: establishing a phased array ultrasonic detection model of an R region of a component with a complex shape; designing a phased array ultrasonic surface adaptation method (SAUL), and combining the SAUL with a receiving focusing detection scheme; reading the sound time from each aperture array element to the corresponding focus by using a finiteelement model, and calculating a phased array ultrasonic detection receiving focusing rule of the R region of the complex-shaped component; transmitting ultrasonic waves by utilizing SAUL, receivingthe scanning signal A in parallel by each array element, and carrying out receiving focusing processing to obtain an imaging result of phased array ultrasonic surface self-adaption method combined with receiving focusing. According to the method, on the basis of SAUL, receiving focusing is combined to improve the transverse resolution of phased array ultrasonic detection of the R area of the component in the complex shape, so the detection noise is reduced, the artifacts are avoided, and a support is provided for high-quality detection of defects of the R area of the component in the complex shape.

A super-resolution structure detection array confocal coherent imaging device and the imaging method thereof provided by the invention relate to an imaging device and an imaging method thereof. The objective of the invention is to solve the problems that the resolution of the confocal spacing technology is difficult to improve and the confocal imaging is not clear. The device provided by the invention comprises a laser source; a collimation device, a microlens array, a collimating lens, a beam splitter prism, a 1/4 wave plate, a scanning system, an illumination object lens, an industrial sample, a collection lens and a CCD detector are arranged in order in the ray propagation direction of the laser source; and integration is performed on the detection surface to change the luminous sensitivity corresponding to the detection position so as to allow the system CTF bandwidth to be enlarged. The transverse resolution of the confocal system is improved while the imaging rate of the structure detection confocal coherent imaging system is enhanced; and moreover, the super-resolution structure detection array confocal coherent imaging device and the imaging method thereof are suitable for the measurement field of the industry morphology imaging.

The invention discloses a shallow transverse high-resolution Rayleigh wave exploration method and system. The method comprises the steps that: seismic wave data in a to-be-measured area are acquired;extracting Rayleigh wave data from the seismic wave data; calculating a frequency dispersion curve of Rayleigh waves by adopting an adjacent channel phase difference method; based on the obtained frequency dispersion curve, obtaining a depth profile corresponding to the Rayleigh wave phase velocity by adopting a depth-half wavelength conversion principle; and interpreting the profile according toa geological task to obtain the quality of a foundation reinforcing member and the strength of a geological anomalous body. According to the method and system of the invention, quality detection or evaluation can be carried out on the foundation reinforcing member (such as a mixing pile gravel pile, a dam diaphragm wall and the like) accurately; and the transverse resolution capability of the underground small geological anomalous body can also be improved.

The invention provides a tectonic background-based gravity fracture image recognition method. The tectonic background-based gravity fracture image recognition method comprises the steps: 1, bouguer gravity anomaly preprocessing is conducted, and basic data for carrying out processing and explaining is formed; 2, gravity difference trend surface field source separation is conducted, and gravity anomaly responses of a target strata are quantitatively depicted; 3, gravity anomaly enhancing and processing conversion are conducted, linear structure weak information is enhanced, and small-level fracture linear images are highlighted; 4, multiple processing conversion results are jointed to establish a nonlinear target function of a narrowing gradient zone; and 5, comprehensive analysis on the fracture linear images is conducted, and different levels of fracture occurrences and combination forms are determined. According to the tectonic background-based gravity fracture image recognition method, the effectiveness and practicability that gravity data fine depict a fracture target are improved, the lateral resolving capacity is improved, the fracture boundary characteristic is highlighted,and a fracture tectonic framework can be clearly recognized.