The invention discloses an accurate view field distortionless scanning high-resolution
microscopic imaging method and device based on position feedback. The piezoelectric deflection mirror
system is used for replacing a traditional scanning
system, a position feedback
signal of the deflection mirror is utilized,
clock signals of
light source switching and
signal detection are obtained, the
light source is controlled to be turned on when the deflection mirror is located at a target view field and turned off when the deflection mirror is located at other positions, and therefore the view field is accurately controlled, and the scanning precision is improved. The photosensitive sample can be protected on the hardware level, so that the
utilization rate of the sample is improved; position feedback signals of the deflection mirror under different
voltage amplitudes and different scanning frequencies are processed, a
linear section proportion which can be considered to be in distortionless scanning imaging in a scanning
stroke is extracted, the variable is deduced, a more accurate fitting relational expression is provided, and the
linear section proportion is calculated. A correct
voltage amplitude capable of enabling a target view field to be in a
linear section in a scanning
stroke is applied to the deflection mirror, so that distortionless target view field scanning is realized. The method and the device have a wide application range.