The utility model belongs to the technical field of insulating
layers, and particularly relates to a composite precise insulating layer structure, which adopts an atomic deposition
system, a first layer adopts a precursor source and a
metal source to form a high
refractive index layer; the second layer adopts a precursor source and a
metal source to form a low-refractive-index layer; the third layer to the N layer adopt precursor sources to alternately form a periodic
refractive index gradient structure, the total layer number N is larger than or equal to 3, the single-
layer thickness is
lambda / (4n),
lambda is the target regulation and control
optical wavelength, and n is the film layer
refractive index. According to the utility model, more than three
layers are alternately stacked, so that films with high and low refractive indexes can be obtained through insulating
layers formed by different precursor sources, and as a Bragg structure, the
reflectivity is improved; in addition, the third layer starts to form a gradient structure with a periodic refractive index, and the regulation and control requirements of the light-emitting device on light overflow and
light reflection are facilitated.