Super-resolution structure detection confocal coherent imaging device and imaging method thereof

A technology of an imaging device and an imaging method, which is applied to measurement devices, optical devices, instruments, etc., can solve the problems of difficulty in improving the resolution of confocal microscopy, unclear confocal imaging, etc., so as to improve the spatial cutoff frequency and improve the lateral resolution. force, and the effect of broadening the bandwidth of the spatial frequency domain

Active Publication Date: 2016-05-04
HARBIN INST OF TECH
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Problems solved by technology

[0005] The purpose of the present invention is to solve the problem that the resolution of the exi

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  • Super-resolution structure detection confocal coherent imaging device and imaging method thereof
  • Super-resolution structure detection confocal coherent imaging device and imaging method thereof
  • Super-resolution structure detection confocal coherent imaging device and imaging method thereof

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Embodiment Construction

[0032] The specific embodiment of the present invention is described in conjunction with the accompanying drawings. A super-resolution structure detection confocal coherent imaging device of the present invention includes a laser light source 1, and a collimating beam expander 2 and a beam splitting prism are sequentially provided along the light propagation direction of the laser light source 1. 3. 1 / 4 wave plate 5, scanning system 7, illumination objective lens 8, industrial sample 9, collection lens 4 and CCD detector 6.

[0033] The scanning system includes a scanning galvanometer, and the scanning galvanometer changes the beam deflection angle to scan the object plane of the industrial sample.

[0034] An imaging method based on the super-resolution structure detection confocal coherent imaging device, comprising the following steps:

[0035] Step 1, the step 1 specifically includes: the detection surface adopts a non-uniform detection method, so that the detection sensit...

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Abstract

A super-resolution structure detection confocal coherent imaging device and an imaging method thereof relate to an imaging device and an imaging method thereof. The objective of the invention is to solve the problems that the resolution of the confocal spacing technology is difficult to improve and the confocal imaging is not clear. The device provided by the invention comprises a laser source; a collimation device, a beam splitter prism, a 1/4 wave plate, a scanning system, an illumination object lens, an industrial sample, a collection lens and a CCD detector are arranged in order in the ray propagation direction of the laser source; and integration is performed on the detection surface to change the luminous sensitivity corresponding to the detection position so as to allow the system CTF bandwidth to be enlarged. The spatial-cut-off frequency of a confocal coherent imaging system is improved, and the space frequency domain bandwidth is broadened, so that the transverse resolution of the imaging system is substantially improved; and moreover, the super-resolution structure detection confocal coherent imaging device and the imaging method thereof are suitable for the measurement field of the industry morphology imaging.

Description

technical field [0001] The invention relates to an imaging device and an imaging method thereof, in particular to a super-resolution structure detection confocal coherent imaging device and an imaging method thereof, belonging to the technical field of optical precision measurement. Background technique [0002] Optical microscopy is a long-established and important non-destructive technique widely used in fields such as biology and materials science. Confocal microscopic measurement technology is a three-dimensional optical microscopy technology suitable for micron and submicron scale measurement. The tomographic capabilities of reflective confocal microscopy systems make them important in the field of 3D imaging. [0003] In the mid-to-late 1950s, the confocal microscope was invented by Minsky. In 1977, C.J.R. Sheppard and A.Choudhury first clarified that the confocal microscope system under the action of the dot pinhole mask, at the expense of the field of view, the late...

Claims

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Application Information

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IPC IPC(8): G01B9/02
CPCG01B9/02042G01B9/02048
Inventor 王宝凯张甦邹丽敏谭久彬
Owner HARBIN INST OF TECH
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