Super-resolution structure detection array confocal coherent imaging device and imaging method thereof

Abstract

A super-resolution structure detection array confocal coherent imaging device and the imaging method thereof provided by the invention relate to an imaging device and an imaging method thereof. The objective of the invention is to solve the problems that the resolution of the confocal spacing technology is difficult to improve and the confocal imaging is not clear. The device provided by the invention comprises a laser source; a collimation device, a microlens array, a collimating lens, a beam splitter prism, a 1 / 4 wave plate, a scanning system, an illumination object lens, an industrial sample, a collection lens and a CCD detector are arranged in order in the ray propagation direction of the laser source; and integration is performed on the detection surface to change the luminous sensitivity corresponding to the detection position so as to allow the system CTF bandwidth to be enlarged. The transverse resolution of the confocal system is improved while the imaging rate of the structure detection confocal coherent imaging system is enhanced; and moreover, the super-resolution structure detection array confocal coherent imaging device and the imaging method thereof are suitable for the measurement field of the industry morphology imaging.

Description

technical field [0001] The invention relates to an imaging device and an imaging method thereof, in particular to a super-resolution structure detection array confocal coherent imaging device and an imaging method thereof, belonging to the technical field of optical precision measurement. Background technique [0002] Optical microscopy is a long-established and important non-destructive technique widely used in fields such as biology and materials science. Confocal microscopic measurement technology is a three-dimensional optical microscopy technology suitable for micron and submicron scale measurement. The tomographic capabilities of reflective confocal microscopy systems make them important in the field of 3D imaging. [0003] In the mid-to-late 1950s, the confocal microscope was invented by Minsky. In 1977, C.J.R. Sheppard and A.Choudhury first clarified that the confocal microscope system under the action of the dot pinhole mask, at the expense of the field of view, th...

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Problems solved by technology

[0005] The purpose of the present invention is to solve the problems that the resolution of the existing confocal microscopy technology is difficult to improve, the imaging rate is low, and the confocal imaging is not clear

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