This invention relates to the field of
laser processing technology, specifically to a
laser processing calibration device and method based on
coherent imaging. The device includes a fixed module, which is fixedly connected to a reference arm module and a sample arm module. The sample arm module is fixedly connected to a
laser processing equipment, which contains a
galvanometer and a field lens. The fixed module includes a fixed box, inside which a
beam splitter is installed. The connecting optical fibers between the fixed module, the reference arm module, and the sample arm module are all fixedly installed in the fixed box. This application, through an original rigid integrated structural design, solidifies the vibration-sensitive interferometer
core optical fiber and optical components into a single unit, significantly suppressing vibration-induced
optical path noise from a physical source. This effectively solves the core problems of imaging blurring, large processing errors, and low
system reliability caused by
fiber vibration in existing technologies, significantly improving the accuracy,
repeatability, and long-term stability of
laser processing.