The invention discloses a displacement measurement
system design method based on imaging scanning. The displacement measuring
system is characterized in that the displacement measuring
system is composed of a
light source, a collimating lens, a scale
grating, a
linear array CCD and a
signal processing circuit, the scale
grating is composed of an absolute code and an increment code, the absolute code is coded through a natural binary system and used for obtaining absolute position information, and the increment code is a
periodic grating scribed line and achieves high
subdivision of signals. Compared with a traditional method, the system has the advantages that only one scale
grating is used for imaging scanning, the light path structure is simplified, and the measurement system is more compact; the scale grating absolute code has a positioning effect, so that the influence of accumulative errors on a measurement result is reduced, and micron-
level measurement precision is achieved through high-power
subdivision of the increment code; the absolute code and the incremental code of the scale grating are arranged in the same code channel, the problem of multi-code-channel coding of traditional absolute coding is solved,
signal receiving of multiple sets of photoelectric detectors is avoided, the
system structure is further simplified, and the
system stability is improved. The
micrometer displacement sensor can be used for
micrometer displacement measurement and can be widely applied to digital display,
numerical control machine tools and measuring instruments.