204 results about "Periodic grating" patented technology

A library of simulated-diffraction signals for an integrated circuit periodic grating is generated by generating gets of intermediate layer data. Each set of intermediate layer data corresponding to a separate one of a plurality of hypothetical layers of a hypothetical profile of the periodic grating. Each separate hypothetical layer has one of a plurality of possible combinations of hypothetical values of properties for that hypothetical layer. The generated sets of intermediate layer data are stored. Simulated-diffraction signals for each of a plurality of hypothetical profiles are generated based on the stored generated sets of intermediate layer data.

A hybrid beam combining system or method combines a plurality of coherent and incoherent light beams into a composite high power diffraction limited beam. N oscillators each transmit light at one of N different wavelengths and each wavelength is split into M constituent beams. M beams in each of N groups are phase locked by a phase modulator using phase correction signals. The phase locked beams are amplified and coupled into an M×N fiber array. Beams emerging from the array are collimated and incident on a diffractive optical element operating as a beam combiner combining the M outputs at each N wavelength into a single beam. The N single beams are incident and spectrally combined on a grating which outputs a composite beam at a nominal 100% fill factor. A low power sample beam, taken from the N beams emerging from the diffractive optical element, is measured for phase deviations from which the phase correction signals are derived and fed back to the phase modulators. The diffractive optical element may include a weak periodic grating for diffracting the low power sample. The diffractive optical element may also be combined with the spectral combining grating into a single optical element.

Overlay measurements for a semiconductor wafer are obtained by forming a periodic grating on the wafer having a first set of ridges and a second set of ridges. The first and second sets of ridges are formed on the wafer using a first mask and a second mask, respectively. After forming the first and second sets of gratings, zero-order cross polarization measurements of a portion of the periodic grating are obtained. Any overlay error between the first and second masks used to form the first and second sets of gratings is determined based on the obtained zero-order cross polarization measurements.

A method and apparatus for determining optical mask corrections for photolithography. A plurality of grating patterns is printed onto a wafer utilizing a photomask having at least one grating. Each grating pattern within the plurality of grating patterns is associated with known photolithographic settings. Each grating pattern is illuminated independently with a light source, so that light is diffracted off each grating pattern. The diffracted light is measured utilizing scatterometry techniques to determine measured diffracted values. The measured diffracted values are compared to values in a library to determine a profile match. A 2-dimensional profile description is assigned to each grating pattern based on the profile match. A database is compiled of the profile descriptions for the plurality of grating patterns. Photomask design rules are then generated by accessing the database containing the 2-dimensional profile descriptions. In preferred embodiments, the design rules are used to create and correct masks containing OPC corrections, phase-shifting mask corrections and binary masks. In a preferred embodiment the at least one grating is a bi-periodic grating. In a preferred embodiment, the scatterometry technique is optical digital profilometry utilizing a reflectometer or ellipsometer.

A system for filtering light propagating in a waveguide is described. The system utilizes an adjustable periodic grating which induces mode coupling of predetermined frequencies of light propagating in the waveguide.

An optical authentication component visible in reflection having a structure imprinted on a substrate of index n0, a thin layer, made of a dielectric material having a refractive index n1, deposited on the structure, and a layer made of a material having an index n2 similar to n0, encapsulating the structure coated with the thin layer, is disclosed. The structure has a first pattern modulated by a second pattern, the first pattern is a bas-relief with an array of facets, having shapes which are defined to simulate an image in relief of an object in relief, and the second pattern is a periodic grating that modulates the first pattern which produces, after the thin layer has been deposited and the structure has been encapsulated, a first color at a first viewing angle and a different second color at a second viewing angle, obtained by azimuthal rotation of the component.

A system for filtering light propagating in a waveguide is described. The system utilizes an adjustable periodic grating which induces mode coupling of predetermined frequencies of light propagating in the waveguide.

In accordance with one exemplary embodiment the invention provides a multi-parameter fiber optic sensing system with an aperiodic sapphire fiber grating as sensing element for simultaneous temperature, strain, NOx, CO, O2 and H2 gas detection. The exemplary sensing system includes an aperiodic fiber grating with an alternative refractive index modulation for such multi-function sensing and determination. Fabrication of such quasiperiodic grating structures can be made with point-by-point UV laser inscribing, diamond saw micromachining, and phase mask-based coating and chemical etching methods. In the exemplary embodiment, simultaneous detections on multi-parameter can be distributed, but not limited, in gas / steam turbine exhaust, in combustion and compressor, and in coal fired boilers etc. Advantageously, the mapping of multiple parameters such as temperature, strain, and gas using sapphire aperiodic gratings improves control and optimization of such systems directed to improve efficiency and output and reduce emissions.

An optical pickup includes a diffraction grating partitioned into three areas, in which the phase of periodic grating groove structure in an area is successively shifted from that in the adjacent area by 90°. In the generation of a differential push-pull signal, an amplification factor K for sub push-pull signals is varied depending on the type of the optical disk. By such composition of the optical pickup, amplitude deterioration of the tracking error signal accompanying displacement of the object lens is reduced.