Spectral synchronous phase-shift common-path interference microscopic-detection device and detection method
A synchronous phase-shifting and interference microscopy technology, which is applied to measuring devices, optical devices, instruments, etc., can solve problems such as low measurement accuracy and complicated operation, and achieve simple mapping relationship, convenient and flexible operation, and simple device structure Effect
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specific Embodiment approach 1
[0038] Specific implementation mode one: the following combination Figure 1 to Figure 4 Illustrate this embodiment mode, the light-splitting synchronous phase-shift common optical path interference microscope detection device described in this embodiment mode, it comprises light source 1, it also comprises polarizer 2, collimation beam expander system 3, first beam-splitting prism 4, the second beam-splitting prism Prism 5, first λ / 4 wave plate 6, correction objective lens 7, microscope objective lens 8, object to be measured 9, second λ / 4 wave plate 10, third λ / 4 wave plate 11, rectangular window 12, first Fourier lens 13, one-dimensional periodic grating 14, second Fourier lens 15, depolarization beam splitter prism 16, four-quadrant polarizer group 17, image sensor 18 and computer 19, wherein λ is the light wavelength of light source 1 emitting light beam ,
[0039] The light beam emitted by the light source 1 enters the light receiving surface of the collimated beam expa...
specific Embodiment approach 2
[0049] Specific implementation mode two: the following combination figure 2 Describe this embodiment mode, this embodiment mode will further illustrate Embodiment 1, the first dichroic prism 4 and the second dichroic prism 5 are non-polarizing dichroic prisms, the second λ / 4 wave plate 10 and the third λ / 4 wave plate 11 The direction of the fast axis is the same.
specific Embodiment approach 3
[0050] Specific embodiment three: this embodiment will further illustrate embodiment one or two, the first dichroic prism 4 and the second dichroic prism 5 are polarization beam splitters, the second λ / 4 wave plate 10 and the third λ / 4 wave The directions of the fast axes of the sheets 11 are perpendicular to each other.
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