Spectral synchronous phase-shift common-path interference microscopic-detection device and detection method
What is Al technical title?
Al technical title is built by PatSnap Al team. It summarizes the technical point description of the patent document.
A synchronous phase-shifting and interference microscopy technology, which is applied to measuring devices, optical devices, instruments, etc., can solve problems such as low measurement accuracy and complicated operation, and achieve simple mapping relationship, convenient and flexible operation, and simple device structure Effect
Inactive Publication Date: 2013-01-23
HARBIN ENG UNIV
View PDF4 Cites 15 Cited by
Summary
Abstract
Description
Claims
Application Information
AI Technical Summary
This helps you quickly interpret patents by identifying the three key elements:
Problems solved by technology
Method used
Benefits of technology
Problems solved by technology
[0006] The purpose of the present invention is to solve the problems of complex operation and low measurement accuracy of the existing optical phase-shifting inter
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more
Image
Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
Click on the blue label to locate the original text in one second.
Reading with bidirectional positioning of images and text.
Smart Image
Examples
Experimental program
Comparison scheme
Effect test
specific Embodiment approach 1
[0038] Specific implementation mode one: the following combination Figure 1 to Figure 4 Illustrate this embodiment mode, the light-splitting synchronous phase-shift common optical path interference microscope detection device described in this embodiment mode, it comprises light source 1, it also comprises polarizer 2, collimation beam expander system 3, first beam-splitting prism 4, the second beam-splitting prism Prism 5, first λ / 4 wave plate 6, correction objective lens 7, microscope objective lens 8, object to be measured 9, second λ / 4 wave plate 10, third λ / 4 wave plate 11, rectangular window 12, first Fourier lens 13, one-dimensional periodic grating 14, second Fourier lens 15, depolarization beam splitter prism 16, four-quadrant polarizer group 17, image sensor 18 and computer 19, wherein λ is the light wavelength of light source 1 emitting light beam ,
[0039] The light beam emitted by the light source 1 enters the light receiving surface of the collimated beam expa...
specific Embodiment approach 2
[0049] Specific implementation mode two: the following combination figure 2 Describe this embodiment mode, this embodiment mode will further illustrate Embodiment 1, the first dichroic prism 4 and the second dichroic prism 5 are non-polarizing dichroic prisms, the second λ / 4 wave plate 10 and the third λ / 4 wave plate 11 The direction of the fast axis is the same.
specific Embodiment approach 3
[0050] Specific embodiment three: this embodiment will further illustrate embodiment one or two, the first dichroic prism 4 and the second dichroic prism 5 are polarization beam splitters, the second λ / 4 wave plate 10 and the third λ / 4 wave The directions of the fast axes of the sheets 11 are perpendicular to each other.
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more
PUM
Login to view more
Abstract
The invention discloses a spectral synchronous phase-shift common-path interference microscopic-detection device and a detection method, which belongs to the field of optical interference detection. The invention is designed for solving the problem that the existing optical phase-shift interference detection method is complicated and difficult in operation and low in measurement accuracy. The scheme of the invention is as follows: a beam emitted by a light source, after passing through a polaroid, enters into a light receiving surface of a beam collimating and expanding system, after the beam is subjected to beam collimating and expanding by the beam collimating and expanding system, an emergent beam enters into a first beam splitter prism, and then a reflected beam of the first beam splitter prism, as a reference beam, enters into a rectangular window after passing through a second lambda/4 wave plate; the reference beam and object beams which are abreast converged into the rectangular window respectively pass through a first Fourier lens, a one-dimensional periodic grating, a second Fourier lens, a non-polarizing beam splitter prism and a four-quadrant polaroid set again, a polarized beam emitted from the four-quadrant polaroid set generates an interference pattern on a plane of an image sensor, and a computer carries out processing on the acquired interference pattern so as to obtain the phase distribution of an object to be detected.
Description
technical field [0001] The invention relates to a light-splitting synchronous phase-shift common optical path interference microscopic detection device and a detection method, belonging to the field of optical interference detection. Background technique [0002] Interference microscopy combines interference technology and microscopic magnification technology, which can accurately analyze the three-dimensional shape of objects and the phase information of phase-type objects. It is an ideal method for measuring the three-dimensional shape and phase distribution of tiny objects. [0003] In 2006, the Swiss company Lyncee Tec launched the DHM-1000 digital holographic microscope for the first time, which can be used to measure the three-dimensional shape and phase distribution of tiny objects. However, due to the off-axis holographic optical path, the CCD resolution and spatial bandwidth product cannot be fully utilized; at the same time, the phase distortion caused by the obje...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more
Application Information
Patent Timeline
Application Date:The date an application was filed.
Publication Date:The date a patent or application was officially published.
First Publication Date:The earliest publication date of a patent with the same application number.
Issue Date:Publication date of the patent grant document.
PCT Entry Date:The Entry date of PCT National Phase.
Estimated Expiry Date:The statutory expiry date of a patent right according to the Patent Law, and it is the longest term of protection that the patent right can achieve without the termination of the patent right due to other reasons(Term extension factor has been taken into account ).
Invalid Date:Actual expiry date is based on effective date or publication date of legal transaction data of invalid patent.
Login to view more 
Login to view more