The invention discloses a direct drive type reversible
wafer transmission
robot. A lifting and dropping and swing mechanism is installed on the inner portion of a base seat, the lifting and dropping and swing mechanism is connected with one end of a big arm, the other end of the big arm is connected with one end of a small arm, the other end of the small arm is connected with one end of a reverse
wrist, and the other end of the reverse
wrist is connected with a vacuum adsorption
tail end. When the
wafer transmission
robot moves, a three-connection rod which composed of the big arm, the small arm and the reverse
wrist fixes a
specific speed movement, and a straight line expansion movement in the radial direction is achieved; a motor is used for driving the vacuum adsorption
tail end, so that a reverse movement of the reverse wrist is achieved; by the adoption of the direct
drive motor to drive directly, an interior structure of the
robot is simplified, the number of intermediate links is reduced, and the rotating precision and the rotating efficiency of the robot are improved. Due to fewer part mechanisms, the robot is convenient to assemble and produce. A
steel belt is used rotatably, so that the rotating precision is provided, the reliability of the robot is enhanced, the production of contaminant particles is lowered, and the level of cleanliness of the robot is improved. The degree of freedom of reversing of the robot is increased by the reverse wrist, and the range of application of the robot is enlarged.