The utility model discloses a
magnet device for magnetron
sputtering coating, which belongs to the technical field of magnetron
sputtering coating, and comprises a back plate, a magnetic bar base and magnetic bars, the magnetic bar base is connected onto the back plate through a plurality of adjusting bolts, the magnetic bar base is provided with three horizontal clamping grooves for correspondingly placing the magnetic bars, the magnetic bars comprise square tubes, and the square tubes are arranged in the clamping grooves. The magnets are arranged in the square tubes, and the
magnetic poles of the magnets arranged in the adjacent square tubes face opposite directions. A fixing position is provided through the effect of the back plate, the generated
peripheral magnetic field intensity is changed by adjusting the distance between the magnetic rod base and the back plate, the collision
ionization effect is changed, the thickness of the film layer is adjusted accordingly, and the production application range is wide; the
magnet device adopts the stainless
steel square tube to
package the
magnet, effectively prevents the magnet
assembly from being damped and corroded, ensures the position stability of the magnet, avoids the influence of position change on the
magnetic field effect, and improves the stability and reliability of the device; and the magnet is convenient to disassemble and assemble and can be reused, so that the production cost is reduced.