The invention relates to a vertical
magneto-sensitive TMR sensor with a continuously adjustable
linear region, belongs to the technical field of magnetic sensors, and solves the problems that a vertical
magnetic field is difficult to measure and the
linear region of the same sensor cannot be regulated and controlled in the prior art. The sensor comprises a
Si substrate, a piezoelectric film layer, an
electrode layer, a seed layer, a vertical magnetic free layer, a tunneling
barrier layer, a vertical magnetic fixed layer and a protective layer from bottom to top, and the vertical magnetic free layer sequentially comprises a first magnetic material layer, a first ultrathin
metal layer and a second magnetic material layer from bottom to top. And the vertical magnetic fixed layer comprises a ferromagnetic layer, a second ultrathin
metal layer and an
antiferromagnetic coupling layer from bottom to top. According to the sensor, the vertical
magnetic anisotropy of the vertical magnetic free layer of the vertical
magneto-sensitive TMR sensor is regulated and controlled by utilizing the stress generated by the piezoelectric material, continuous regulation and control in a
linear range can be realized, the application scene of the sensor is remarkably expanded, and the preparation process is good in compatibility, convenient to
package, low in cost and suitable for large-scale
mass production.