The invention discloses a monometallic
waveguide GaN-based
terahertz quantum cascade laser, which is characterized in that the bottommost layer of the structure is a substrate, an n-type highly-doped n + + layer, a QCL active region and an n-type doped layer are sequentially arranged on the substrate, a
cathode electrode layer is arranged on the n-type highly-doped n + + layer, an
anode electrode layer is arranged on the n-type doped layer, and an
anode electrode layer is arranged on the
anode electrode layer. Wherein the substrate is a GaN substrate, an AlN substrate or a
SiC substrate. The invention also discloses a preparation method. On the basis of systematic research on
refractive index related parameters of GaN under THz frequency, absorption of single-
metal waveguide structure parameters on QCL
light field limiting factors and free carriers is analyzed, and QCL with high
light field limiting factors and low loss of different substrates is designed. Besides, according to the designed active region structure, the
gain can reach 88 / cm at 10K and can reach 34 / cm at 280K, the corresponding
wavelength is 6.6 THz, and the frequency which cannot be achieved by a traditional GaAs
system is achieved.