The invention relates to the technical field of
semiconductor materials, and discloses a Si-doped epsilon-Ga2O3 material with
high conductivity and deep
ultraviolet light absorption performance and a preparation method, the
doping concentration of Si in the Si-doped epsilon-Ga2O3 material is 0.83 at%-2.5 at%, and Si atoms replace tetrahedral coordinated Ga (1) atoms in epsilon-Ga2O3. By accurately controlling the Si
doping concentration to be 0.83-2.5 at% and enabling Si atoms to replace tetrahedral coordinated Ga (1) atoms in epsilon-Ga2O3, the
electronic structure of the material is effectively improved, the
Fermi level moves upwards to enter a
conduction band after Si
doping, and Si3s orbital electrons occupy the
conduction band bottom (CBM), so that the carrier concentration is increased, the effective
mass of the electrons is reduced, and the
conductivity of the material is remarkably improved; tests show that compared with an intrinsic epsilon-Ga2O3 material, the
conductivity of the doped material is improved by 1-3 orders of magnitude, strict requirements of high-power electronic components and the like on the
conductivity of the material are met, heat loss of the electronic components due to resistance is reduced, and the working efficiency and stability of the components are improved.