The application discloses a bionic
petal-shaped
elastomer structure integrated with a
silicon-based piezoresistive
strain gauge array and belongs to the technical field of six-dimensional
force sensor core structures. In order to solve the technical problems of traditional six-dimensional force sensors, such as serious elastomechanical
coupling, low precision of artificial patching, poor batch consistency, large temperature
drift error and insufficient flexible adaptability, the application adopts a symmetrical bionic
petal flexible
elastomer structure, realizes uniform dispersion of six-dimensional load through elastic arms arranged uniformly in a multi-
petal ring, reduces dimensional
coupling interference from the source of structure, simultaneously adopts a
silicon-based piezoresistive
strain gauge array prepared by a MEMS process, replaces a traditional artificial patching structure through an embedded integration process, completely eliminates
assembly error, improves strain detection precision and
structural consistency, matches a
silicon-based temperature compensation module and a flexible insulation packaging structure of the same material, effectively offsets temperature
drift error and guarantees the working stability in high and low temperature environments. The application realizes integrated integration of an elastic bearing structure and a high-precision sensing array, has the advantages of low
coupling, high sensitivity, high consistency, good
temperature resistance and strong flexible adaptability, can significantly improve the
measurement precision, dynamic response speed and environmental adaptability of the six-dimensional
force sensor and is widely applicable to high-precision force sensing scenes such as flexible robots, human-computer interaction, bionic prostheses and precise industrial
assembly and has a wide application prospect.