The invention discloses a super-junction groove type 4H-SiC
MOSFET integrated with a
heterojunction, and belongs to the technical field of
semiconductor power chips. The device is composed of drain
metal, an N + substrate region, an N-drift region, a P-super junction region, a P +
polysilicon gate, an N-polysilicon region, an N-
body region, an N + polysilicon source region, an N + body source region, source
metal, a source trench, a gate trench and a P + separation gate. A
heterojunction structure with a low potential barrier is introduced into the device, current does not flow through the body
diode when the device works reversely, and the bipolar degradation effect existing when the device works in a third quadrant is effectively eliminated. In order to optimize the performance of the device, an accumulation type
conducting channel is further designed, the accumulation type
conducting channel conducts
electricity by means of majority carriers, scattering of the carriers is little, the mobility is increased, the switching speed of the device is effectively improved, and the on-resistance of the device is reduced. In addition, the device is excellent in reliability and breakdown characteristic.