The invention discloses a method and a structure for integrating a double-gate
JFET (junction
field effect transistor) device in a
bipolar junction transistor process, and the method comprises the steps: providing a substrate, and forming a buried layer structure, an epitaxial layer and an isolation structure of the
bipolar junction transistor and the
JFET device on the substrate; carrying out penetration
doping and well region
doping in the epitaxial layer; forming a collector crystalline region, a base crystalline region, a
bottom gate crystalline region, a top gate crystalline region, a source crystalline layer and a drain crystalline region above the epitaxial layer; depositing a
dielectric layer on the epitaxial layer,
etching to form a base region window, and forming a heavily doped collector region, a heavily doped outer base region, a heavily doped
bottom gate, a heavily doped top gate, a source region and a drain region through the base region window; s500, forming an emitter region window, and forming an emitter crystalline region in the emitter region window; and forming electrodes of the
bipolar junction transistor and the
JFET device on the
dielectric layer. According to the invention, the high-speed bipolar junction
transistor and the JFET device can be integrated in a single manufacturing process under the condition that a large amount of
process complexity is not increased.