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4988 results about "Semiconductor technology" patented technology

MEMS metal-oxide semiconductor gas sensor and manufacturing method thereof

The invention provides an MEMS metal-oxide semiconductor gas sensor and a manufacturing method thereof. A sensitive material thin film is made of a hollow nanostructure material which includes at least one sort of metallic oxide. The manufacturing method includes the following steps that (a) an MEMS gentle heating disk is formed by the adoption of a semiconductor technology; (b) the hollow nanostructure material is synthesized through a hydrothermal method, and a solid nanostructure material is obtained through the methods of hydro-thermal synthesis, grinding and the like; (c) the hollow nanostructure material, the solid nanostructure material and a plurality of functional additives are prepared into slurry according to a certain proportion, and stable suspension liquid ink is obtained by means of stirring and ultrasonic dispersion; (d) the suspension liquid ink is printed in a sensitive electrode measuring area of the MEMS gentle heating disk; (e) low-temperature drying and high-temperature sintering are carried out, and accordingly the MEMS metal-oxide semiconductor gas sensor of a stable and reliable structure is formed. The MEMS metal-oxide semiconductor gas sensor has the advantages of being small in size, low in power consumption, high in sensitivity, short in response time, long in service life, capable of being integrated easily and the like.
Owner:武汉微纳传感技术有限公司

Chip temperature predicating method based on ANSYS finite element heat analysis

The invention discloses a chip temperature predicating method based on ANSYS finite element heat analysis. The chip temperature predicating method comprise steps as follows: a chip interior structure solid model is established by ANSYS according to acquired chip model parameters; the chip interior structure solid model is subjected to finite element mesh generation; the heat generation rate and the boundary conditions are loaded, then, the chip interior structure solid model after finite element mesh generation is subjected to steady-state heat analysis, and the maximum temperature of a chip is obtained; the heat generation rate of the chip is changed, and the maximum temperature of the chip under different heat generation rates is acquired through steady-state heat analysis; the relation curve of the heat generation rate and the chip temperature is fitted, and a relation function of the heat generation rate and the chip temperature is obtained; and the actual heat generation rate is substituted into the relation function of the heat generation rate and the chip temperature, and the actual temperature of the chip is obtained. According to the method, the temperature predication is placed at the physical design stage of the chip, the cost is reduced and the operation is simple and convenient; and the method can be widely applied to the technical field of semiconductors.
Owner:SYSU CMU SHUNDE INT JOINT RES INST +1

Light-emitting diode epitaxial wafer and preparation method thereof

The invention discloses a light-emitting diode epitaxial wafer and a preparation method thereof, and belongs to the technical field of semiconductors. The light-emitting diode epitaxial wafer comprises a sapphire substrate, a low-temperature buffer layer, a high-temperature non-doped GaN layer, a first defect barrier layer, an N-type GaN layer, a stress release layer, a multi-quantum well layer, a P-type electron blocking layer, a P-type GaN layer and a P-type contact layer, wherein the low-temperature buffer layer, the high-temperature non-doped GaN layer, the first defect barrier layer, the N-type GaN layer, the stress release layer, the multi-quantum well layer, the P-type electron blocking layer, the P-type GaN layer and the P-type contact layer are sequentially laminated on the sapphire substrate; a second defect barrier layer is inserted into the N-type GaN layer; the first defect barrier layer comprises alternately laminated AlGaN layers and GaN layers; the second defect barrier layer comprises alternately laminated SiN films and N-type AlGaN layers; and the stress release layer comprises alternately laminated InGaN layers and GaN layers. According to the light-emitting diode epitaxial wafer, extension of defects formed by lattice mismatch into the multi-quantum well layer is effectively suppressed; stress release is enhanced; the crystal quality is improved; leakage passages are reduced; the anti-static electricity capacity of an LED chip is improved; and the product yield is improved.
Owner:HC SEMITEK SUZHOU
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