The application belongs to the technical field of sensing, and particularly relates to a
semiconductor sensor capable of rapidly identifying gas molecules and a preparation and use method thereof. A gas sensor based on an
oxide nanorod sensitive film is obtained by vacuum glancing angle
sputtering of a
metal oxide nanorod array film on a low-thermal-
conductivity insulating substrate plated with an interdigital
electrode; the sensitive film is simultaneously used as a heating layer, the
working temperature of the sensitive film is controlled by
Joule heat generated by self-heating of the sensitive film, a
transient response signal of the sensor under self-heating modulation is collected, a
machine learning
algorithm is used to extract features of different gas molecules, and gas molecule identification application is performed. Since the sensitive film is simultaneously used as a
heating film, the heat conduction rate is fast, the sensor can reach a set temperature within ms, and therefore, rapid self-heating modulation can be performed for molecule identification, meeting the demand of
rapid identification of target gas under the condition of rapid dynamic change of outdoor polluted gas. In addition, the preparation method is compatible with conventional micro-nano
etching process, and meets the demand of uniformity and batch preparation of the sensor.