Germanium channel quantum well field effect transistor with low power consumption and high performance
A field-effect transistor, high-performance technology, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of low stability, affect transistor performance, affect device reliability, etc., achieve large operating current, and improve device operating current. Effect
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[0020] In order to describe the present invention more specifically, the technical solution of the present invention and its related principles and manufacturing process will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0021] Such as figure 1 As shown, the present invention provides a quantum well field effect transistor with low power consumption and high performance germanium channel, including a semiconductor germanium substrate 101; the semiconductor germanium substrate 101 has a source implantation region 102 and a drain implantation region 103 The surface of the semiconductor germanium substrate 101 between the source injection region 102 and the drain injection region 103 covers the two-dimensional material passivation layer 104, the gate insulating layer 105 and the gate electrode 106 in sequence; the source injection region 102 and the drain The end injection regions 103 are all provided with N+ or P+ active i...
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