327 results about "Modulation effect" patented technology

Disclosed is a voice synthesis system for performing various voice synthesis functions. At least one voice synthesizer synthesizes voices, and a TTS (Text-To-Speech) matching unit for controlling the voice synthesizer converts a text coming from a client apparatus into voices by analyzing the text. The system also includes a background sound mixer for mixing a background sound with the synthesized voices received from the voice synthesizer, and a modulation effective device for imparting sound-modulation effect to the synthesized voices. Thus, the system provides the user with more services by generating synthesized voices imparted with various effects.

The invention relates to the technical field of terahertz spectrums, in particular to a graphene-based all-optically controlled ultra-high speed terahertz intensity modulator. The technical problems of low modulation speed and narrow spectrum range of the conventional terahertz intensity modulator are solved, and the application range of a system is widened. According to the graphene-based all-optically controlled ultra-high speed terahertz intensity modulator, gold nanoparticles are adopted, so that the photon absorption efficiency of graphene is enhanced, the concentration of photon-generated carriers is improved, the absorption of terahertz waves is further enhanced, and the modulation effect of the modulator is enhanced. The graphene-based all-optically controlled ultra-high speed terahertz intensity modulator comprises a terahertz wave generation device, a pumping light wave generation device, a terahertz intensity modulator and a terahertz wave detection device, which are connected to finish the design of the graphene-based all-optically controlled ultra-high speed terahertz intensity modulator. The graphene-based all-optically controlled ultra-high speed terahertz intensity modulator is mainly applied to the fields of terahertz communication systems and terahertz researches.

The invention discloses a contour and boundary detection algorithm based on a visual color theory and homogeneity inhibition, belongs to the cross field of computer vision and pattern recognition, and aims at extracting the contour and boundary of a target from a complex natural scene. Through the research of the visual information processing mechanism of human eyes, the method carries out the mathematic modeling of a receptive field of a nerve cell of a visual pathway at each stage, and employs the modulation effect of a non-classical receptive field to inhibit the texture edge, thereby highlighting the contour and boundary. The innovation of the invention lies in introducing the visual information processing mechanism of human eyes to a contour and boundary detection model, detecting the color and brightness boundary through setting imbalance vision cone input, maintaining the contour integrity, giving consideration to the homogeneity of the texture region and the homogeneity inhibition on a classical receptive field from the non-classical receptive field, employing the homogeneity inhibition to inhibit the texture edge, and extracting the contour and boundary of a natural image.

The invention provides a tunable nanometer antenna and a preparation method thereof. The tunable nanometer antenna comprises three layers which comprise an upper layer metal structure, a middle layer single-layer grapheme and bottom substrate materials; the upper layer metal structure is a bowknot structure; the bowknot structure is formed by two isosceles trapezoids and a square. The preparation method of the tunable nanometer antenna comprises the following steps of covering the layer of single-layer grapheme on a silicon dioxide substrate through a chemical vapor deposition method; coating resist coating in a rotary mode on the single-layer grapheme; achieving structural corrosion and developing through the electron beam lithography technology; achieving evaporation of a golden layer through the vacuum electron beam evaporation technology; obtaining a final nanometer optical antenna through a lift-off process. The tunable nanometer antenna has the advantages of being small in size due to the fact that the thickness of a metamaterial structure is in the dozens of nanometer level and beneficial to application in integration optics; being high in signal intensity due to the fact that magnetic field enhance through the nanometer optical antenna can achieve more than 20000 times under illumination of incident light under specific frequency; being obvious in modulation effect.

A reverse conducting type insulated gate bipolar transistor without a snapback effect belongs to the technical field of semiconductor power devices. A P floating region (7) is introduced between an N collector region (9) and an N buffer region (8) of a conventional RC-IGBT (Reverse Conducting-Insulated Gate Bipolar Transistor) so that the snapback effect of the reverse conducting type insulated gate bipolar transistor is eliminated, and the turn-off loss of the devices is reduced. The novel structure reduces the cellular length and the effective area of the N collector region (9) and increases the short-circuit resistance of a collector, the transmission efficiency of the P floating region (7) is higher than that of a P collector region (10), and the resistance of an N-drift region (6) is reduced through a conductance modulation effect, so that the snapback effect is eliminated. When the reverse conducting type insulated gate bipolar transistor reversely works, a parasitic transistor formed by the N-drift region (6), the P floating region (7) and the N collector region (9) is opened, so that a current path is provided, so as to form positive feedback of a PNPN (Positive-Negative-Positive-Negative) four-layer structure with the a P body region (5), the on-resistance when each device is reversely conducted is reduced, and the relatively low on-state voltage and the rapid shutdown are realized.

The invention provides an integrated-imaging double vision 3D (Three-Dimensional) display device based on polarization gratings. The integrated-imaging double vision 3D display device comprises a display screen for displaying a microimage array, a microlens array, the polarization grating I and the polarization grating II, wherein the display screen is positioned on the focal plane of the microlens array; the horizontal central axis and vertical central axis of the display screen are respectively and correspondingly aligned to those of the microlens array. The polarization grating I is closely attached with the display screen, and the polarization grating II is closely attached with the microlens array. By virtue of the polarization grating I, light passing through the polarization grating I becomes linear polarization lights with different polarization directions, the polarization grating II has a modulation effect for the linear polarization lights, sub-image elements in two sub-microimage arrays rebuild 3D scenes to the left side or right side of the integrated-imaging image display equipment by lens elements corresponding to the sub-image elements, so that integrated-imaging double vision 3D display is realized.

The invention discloses a high-speed electrically-modulating terahertz modulator. The high-speed electrically-modulating terahertz modulator comprises a medium substrate (4), wherein the medium substrate (4) is made of a material which is transparent to terahertz waves; an array which is formed by high electron mobility transistors (3) is distributed on the surface of the medium substrate (4); a frequency selecting surface structure (2) is attached to the surface of the medium substrate and the surface of the array of the high electron mobility transistors, and is a graphical conductive film with a bandpass filtering structure; the source electrode (b), the drain electrode (c) and the grid electrode (a) of each high electron mobility transistor are formed on the part of the conductive film, which corresponds to each high electron mobility transistor; and the electron mobility of the high electron mobility transistors is more than 1,500cm<2> / Vs. A high-speed modulation effect on the amplitude of the terahertz waves is achieved by the high-speed electrically-modulating terahertz modulator in an electrically modulating mode, a modulating speed can be more than 10MHz, and a relative modulating depth is over 50 percent.

The invention relates to an online projection objective wave aberration detection device and method. The detection device comprises a light source, a rotary scatterer, a first focusing lens, an optical fiber array, a second focusing lens, a scattering optical element, an object plane optical grating, an image plane optical grating, a two-dimensional photoelectric sensor, a phase-shift control module and a computer, wherein the rotary scatterer is composed of a support, an electric motor and a circular diffusion scattering optical element, and is combined with the multimode optical fiber array for converting a coherent light or partially coherent light source into incoherent light; ten interference fringe patterns with phase shifting amounts of 0, pi / 6, pi / 3, pi / 2, 2pi / 3, 5pi / 6, pi, 5pi / 3, 3pi / 2 and 11pi / 6 respectively are acquired to calculate a phase position and the influence of multilevel diffraction light interference of the optical grating on the phase position extraction precision is eliminated. The device and the method can improve the modulation effect of the object plane optical grating on the optical field spatial coherence so as to achieve a high-precision alignment effect, reduce the system error of phase position extraction in wave aberration detection and improve the wave aberration detection precision of an optical system.

The invention discloses a switch-capacitor integrator adopting novel C-class inverters and a switch-capacitor integrator realizing form of a pseudodifferential structure. The switch-capacitor integrator in a pseudodifferential structure comprises two novel C-class inverters (60) and capacitors such as a sampling capacitor CS, a compensation capacitor CC, an integrating capacitor CI, and the like, switches such as an NMOS switch S2, an NMOS switch S4, an NMOS switch S7, an NMOS switch S8, a CMOS switch S3, a CMOS switch S5, a bootstrap NMOS switch S1, a bootstrap NMOS switch S6, a bootstrap NMOS switch S9, and the like and a common mode feedback circuit (61) in the prior art, wherein the two novel C-class inverters (60) are respectively positioned in a positive branch and a negative branch of the integrator and differentially symmetrized to be in the pseudodifferential structure. The invention overcomes the effects of indexes of working efficiency, establishing time, integrating accuracy, power consumption, and the like on the switch-capacitor integrator by technical deviation through the bulk potential modulation effect of a bulk potential modulator in the novel C-class inverters and greatly improves the stability and the robustness of the integrator without obviously increasing the power consumption.

The invention relates to a wind turbine generator blade detecting technique, and discloses a wind turbine generator blade on-line detecting method and a wind turbine generator blade on-line detecting device. The wind turbine generator blade on-line detecting method provided by the invention can be used for demodulating the blade amplitude of oscillation data from reflective light based on a laser radar detecting technique by adopting lasers to irradiate wind turbine generator blades and utilizing the modulation effect to reflective lasers by blade oscillation. The wind turbine generator blade on-line detecting device provided by the invention comprises a laser emitting unit, a laser receiving unit, and a signal processing and controlling unit. According to the invention, continuous or quasi-continuous lasers are projected to the wind turbine generator blades, and any oscillation of blades can generate a modulation effect to lasers projected to the blades, and the important physical parameter-amplitude of oscillation can be collected by receiving and demodulating lasers reflected by the blades. The wind turbine generator blade on-line detecting method and the detecting device provided by the invention do not need to modify the blades, cannot affect the structure safety of wind turbine generator blades, are convenient to use, and are wide in application.

The invention discloses a linear slowly-changed memristor and a preparation method therefor. According to the memristor, a diffusion modulation layer which has a modulation effect on ion diffusion rate is inserted in the interface between an electrode and a resistive switching material. Different modulation effects on the formation of conductive thin wires of the memristor and the ion diffusion rate in the fusing place can be achieved through the inserted diffusion modulation layer, so that the optimization on the memristor characteristic can be realized, and the device can present the characteristics of continuous and linear changes of the resistance value and closer approach to biological synapse; meanwhile, the device has the advantages of low power consumption and compatibility between the preparation process and the conventional CMOS process; and therefore, the linear slowly-changed memristor is of great significance to the final implementation of neural network computing hardware.

The invention discloses a field-circuit coupling analysis method for radial electromagnetic vibration of a motor. The method comprises the steps of a) performing calculation by utilizing a closed slotfinite element model of the motor to obtain an air-gap magnetic field of a permanent magnet; b) according to a characteristic of synchronous rotation of harmonics in the magnetic field of the permanent magnet, performing analysis; c) according to the arrangement of a motor winding, performing harmonic analysis on armature reaction magnetomotive force; d) performing FFT analysis for a magnetic field model obtained by magnetic permeance of each harmonic, and in combination with a time harmonic number and a rotation direction in the magnetomotive force, obtaining a space number, a rotation direction, an initial phase and a magnetic field amplitude value of the magnetic field of each harmonic; e) performing vector synthesis on the magnetic fields of all the harmonics obtained by analysis in the steps a)-d); f) transmitting a radial force wave acting on the surface of a stator to a yoke part through a modulation effect of stator teeth to generate vibration; and g) performing scanning analysis on a stator mode by adopting a frequency sweeping method to obtain a resonant frequency of each low order. According to the method, the locating of a source of the radial electromagnetic vibrationof the motor is more accurate; and the vibration characteristic can be quickly assessed.

An Early voltage and beta current compensated cascode current mirror includes a cascode current mirror having an input stage responsive to an input current, a current mirror circuit having a first stage responsive to the input stage and a second stage responsive to the first stage, and an output stage responsive to the second stage for providing an output voltage and current; and a compensation circuit, responsive to the cascode current mirror, having a first compensation stage, a second compensation stage and a bootstrapping buffer, the first compensation stage, in response to a change in the output voltage, impressing a corresponding change in voltage on the second compensation stage, the second compensation stage thereby providing a change in current to the cascode current mirror for cancelling current errors induced by base current modulation in the output stage, the bootstrapping buffer, in response to the change in voltage, impressing a corresponding change in voltage on the first compensation stage to prevent errors from base current modulation effects in the first compensation stage, the first and second compensation stages further providing a base current to the cascode current mirror for cancelling base current errors in the output current induced by the cascode current mirror.

A single-electrode, push-pull semiconductor PIN Mach-Zehnder modulator (10) that includes first and second PIN devices (12, 14) on a substrate (16). Intrinsic layers (22, 28) of the devices (12, 14) are the active regions of two arms (50, 52) of a Mach-Zehnder interferometer. An outer electrode (38) is connected to the N layer (24) of the first PIN device (12) and a center electrode (40) is connected to the P layer (20) of the first PIN device (12). An outer electrode (42) is connected to the P layer (26) of the second PIN device (14) and the center electrode (40) is connected to the N layer (30) of the second PIN device (14). An RF modulation signal biases the PIN devices (12, 14) in opposite directions and causes the index refraction of the intrinsic layers (22, 28) to change in opposite directions to give a push-pull modulation effect.

The invention relates to a speed changing device, which comprises a first permanent magnet motor, a coaxial magnetic gear and a second permanent magnet motor, wherein the first permanent magnet motor, the coaxial magnetic gear and the second permanent magnet motor constitute a concentric type structure of a coaxial topological structure set. The speed changing device realizes harmonic driving and speed regulation by a magnetic field modulation effect of a non-uniform magnetic circuit. Because the coaxial magnetic gear realizes non-contact speed variable driving by the interaction of permanent magnets, the speed changing device can overcome the defects of friction loss, mechanical noise and vibration, and the need of regular maintenance and lubrication brought by the mechanical gear when the speed changing device is used for an automobile under hybrid and electric force two modes.

The invention discloses a structural microcrack vibration sound modulation detection system and a structural microcrack vibration sound modulation detection method based on a nonlinear vibrator. The structural microcrack vibration sound modulation detection system comprises a signal generator (1), a low-frequency vibration source (2), a first piezoelectric ceramic wafer (3), a second piezoelectric ceramic wafer (4), a structure (5) with cracks, a permanent magnet (6), a magnet system (7), a signal recording analyzer (8) and a power amplifier (9). The structure with microcracks is used as a cantilever beam to form nonlinear vibrator system, the limitation of a linear vibrator can be overcome by utilizing the nonlinear vibrator, and obvious vibration sound modulation effect in a wide frequency band range can be realized. The system and the method have the technical advantages that the vibration sound modulation detection of the microcrack can be carried out at the non-resonant frequency, so that the high-efficiency detection can be carried out by utilizing the optional ambient vibration. In addition, the system and the method also have the advantages of simple principle, strong interference resistance, high universality and the like.

A novel methodology for the construction and operation of logical circuits and gates that make use of and contact to a fourth terminal (substrates / bodies) of MOSFET devices is described in detail. The novel construction and operation provides for maintaining such body-contacted MOSFET devices at a lower threshold voltage (VTh) when actively on (to increase overdrive and performance), and at a higher relative threshold voltage when off (to reduce leakage power). Because the threshold potential of a gate moves inversely to its body potential, it follows then that in general, the body of a given device must be tied to the inverse of the device's drain voltage to achieve such a desirable threshold potential modulation effect for improved device, circuit, gate and logical family operation.

The invention discloses an improved doherty power amplifier. The improved doherty power amplifier comprises a hybrid coupler, a carrier amplifier, a broadband input matching peak value amplifier, a phase compensator, second lambda / 4 impedance transformation line and a combiner; the first signal output end of the hybrid coupler is connected with the signal input end of the carrier amplifier; the signal output end of the carrier amplifier is connected with the first signal input end of the combiner; the second signal output end of the hybrid coupler is connected with the signal input of the phase compensator; the signal output end of the phase compensator is connected with the signal input end of the peak value amplifier; the signal output end of the peak value amplifier is connected with the second signal input end of the combiner. With the adoption of the improved doherty power amplifier, the efficiency is increased, the uniformity and consistency of load modulation effect and efficiency characteristics of a broadband modulation signal belt are improved, and the broadband modulation signal transmission system applies. The invention further discloses a design method of the doherty power amplifier; the starting characteristics of the peak value amplifier are consistent under relatively wide frequency band.

The invention discloses a method for modulating angular movement of an isolation carrier in an inertial navigation system through rotation. The method comprises the steps of calculating rotation angular velocity, relative to a navigation coordinate system, of a rotating platform at the k control moment according to the rotating scheme of the rotating platform; controlling the rotating platform to rotate, so that an IMU coordinate system p coincide with a carrier coordinate system b; modulating the inertial navigation system to enter the navigation state through rotation, so that control angular velocity of an inner ring shaft and control angular velocity of an outer ring shaft in the rotating platform within the first control cycle are obtained; predicting movement angular velocity, relative to the navigation coordinate system, of the carrier within the (k+1) control cycle and rotation control angular velocity, relative to the carrier coordinate system, of the rotating platform; obtaining the control angular velocity of inner ring shaft and the control angular velocity of the outer ring shaft in the rotating platform; controlling the control angular velocity of inner ring shaft and the control angular velocity of the outer ring shaft, and eliminating influence of the angular movement of the carrier, so that isolation of angular movement of the carrier is achieved. By means of the method for modulating angular movement of the isolation carrier in the inertial navigation system through rotation, the rotation modulation effect is guaranteed, and precision of the navigation system is improved.

The invention provides a terahertz modulator in a graphene and optical grating composite structure. The terahertz modulator is connected with a power supply to modulate a terahertz wave. The terahertzmodulator comprises a lower insulated medium layer, a graphene thin film layer, an upper insulated medium layer and an optical grating layer orderly arranged from bottom to top, wherein the optical grating layer is has a sub-wavelength period; the graphene thin film layer is single-layered; at least one electrode is arranged on the graphene thin film layer; the electrode and the sub-wavelength grating are electrically connected with the power supply; further the terahertz modulator has a reflection layer and a lining layer; and the reflection layer and the lining layer are orderly arranged onthe bottom of the lower insulated medium layer from top to bottom. An F-P resonant cavity is formed by the lower insulated medium layer and the upper insulated medium layer; the F-P effect reinforcesinteraction between a photo mode local electric field and graphene on the resonant frequency point; quick modulation and great modulation depth can be achieved; reflection rate of the reflection layer can be enhanced; and great modulation effect can be provided.

The invention discloses a resonator optical gyroscope based on resonant intracavity modulation. The resonator optical gyroscope comprises a light source, an isolator, a coupler C0, a coupler C1, a coupler C2, an inactive Y-branch coupler, a resonant cavity, a modulator, a first prober, a second prober, a first signal processing circuit, a second signal processing circuit and a modulation signal output circuit. The gyroscope provided by the invention uses the resonant intracavity modulation to replace an external two-circuit modulator structure, so that a gyroscope model is simplified and the integration degree of the gyroscope is greatly improved. The resonance characteristic of the resonant cavity provided by the invention enhances the modulation characteristic, so that a modulation voltage is reduced. Furthermore, the gyroscope provided by the invention is only provided with a modulation arm, however, a double modulation effect is achieved and the power consumption of the system is reduced. The modulation manner corresponding to the intracavity modulation provided by the invention uses a simple periodic square wave modulation curve, so that the non-linear error of the triangular wave is removed when being compared with the triangular wave modulation curve which is commonly used in external modulation; the asymmetry of a waveform is avoided; the gyroscope is beneficial to improvement on the entire precision of the gyroscope.

The invention relates to an SERF atom magnetometer device and method based on optical frequency shift modulation. A conventional modulation-type SERF atom magnetometer method employs a coil for generating an AC magnetic field to achieve the modulation of atomic spinning, so the method is liable to cause the magnetic field noise interference. According to the method provided by the invention, a laser beam with the wavelength being nearby a base metal atom D1 ray, and is enabled to act on the base metal atom to generate the optical frequency shift modulation effect through the modulation of a liquid crystal phase retarder. Because the optical frequency shift is equivalent to a virtual magnetic field for the base metal atom, the device and method provided by the invention can be used for replacing a conventional magnetic field modulation device and method, and can eliminate the noise interference caused by the magnetic field modulation.

The invention discloses a wind power generation system based on an open winding structure. The wind power generation system comprises a wind power generator, two machine-side converters and a controller, wherein the wind power generator comprises three phases of windings, and each machine-side converter is of a three-phase six-bridge arm structure; and one end of any one phase of the winding of the wind power generator is connected with a center-to-center connection point of an upper bridge arm and a lower bridge arm of the corresponding phase in the first machine-side converter, and the other end is connected with the center-to-center connection point of the upper bridge arm and the lower bridge arm of the corresponding phase in the second machine-side converter. The wind power generation system disclosed by the invention utilizes the open winding power generator structure and two groups of two-level converters to realize the modulation effect of controlling three levels by a motor, the harmonic wave of output current is reduced, and the capacity of the converters and the voltage stress of devices are reduced. Simultaneously, the invention further discloses a fault tolerance control method of the wind power generation system, which can ensure that the system can normally and stably run when the converter devices have faults.

The invention discloses a laser-stabilized SERF atom magnetometer signal detection system based on an acousto-optic modulator, and the system can achieve the great improvement of the laser power stability and laser pointing stability through the closed-loop feedback control and system optical path design based on the modulation and diffraction effects of the acousto-optic modulator on incident laser; and the signal detection function of the SERF atom magnetometer is achieved by combining the modulation effect of the frequency-adjustable pulse optical switch of the acoustic optical modulator. The system is mainly composed of a laser, an acoustic optical modulator, a beam splitter, a polarization splitting prism, a proportional integral differential (PID) controller, a photoelectric detector, a balance photoelectric detector, a signal generator, a data acquisition and analysis system and an SERF atom magnetometer system. The laser-stabilized SERF atom magnetometer signal detection systemhas the advantages of being small in size, easy and convenient to debug, excellent in laser stability, low in system noise, small in environmental influence and high in modulation sensitivity, and the measurement sensitivity of the SERF atomic magnetometer and instrumentation and miniaturization of the SERF atomic magnetometer can be improved.

The invention discloses a method and system for achieving the edge enhancement imaging, and the method comprises the steps: projecting an expanded beam and a collimated Gaussian beam to an object; carrying out the first Fourier transform of the beam passing through the object, modulating the beam after the first Fourier transform, performing the second Fourier transform of the modulated beam and then performing imaging, wherein the obtaining process of a filtering function for modulating the beam comprises the following steps: combining the modulation effect of the amplitude and phase for theedge enhancement imaging, and superposing four Gaussian functions to obtain a point diffusion function, wherein a condition that there is no surplus sidelobe around a main lobe is met; performing thereverse calculation of the point diffusion function through the Fourier transform, thereby achieving the high-resolution and isotropic edge enhancement imaging in a Fourier plane of a second Fourier lens.

The invention provides an H6 one-phase non-isolated photovoltaic grid-connected inverter, comprising six switch tubes, a filtration module and a modulation circuit module, wherein a source of the first switch tube is connected with the drain of the second switch tube and one end of an alternating current side; the source of the second switch tube is connected with the source of the fourth switch tube and the drain of the six switch tube; the drain of the fourth switch tube is connected with the source of the third switch tube and the other side of the alternating current side; the drain of the third switch tube is connected with the drain of the first switch tube and the source of the fifth switch tube; the drain of the fifth switch tube is connected with the positive electrode end of a direct current side; the source of the six switch tube is connected with the negative electrode end of the direct current side. By using the inverter, the common mode current harm is effectively eliminated, and the modulation method has a three-level modulation effect; in addition, only two switch tubes work at high frequency, the other four switch tubes work at a half of the frequency, the total harmonic distortion of grid-connected current is reduced, and the efficiency is improved. The invention also provides a modulation method of the H6 one-phase non-isolated photovoltaic grid-connected inverter.

The invention provides a direct-current power modulating method for a high-voltage direct-current power transmission system. According to the method, a dynamic new balance point is used as a control target, the system power oscillation caused by small disturbance can be fast damped, a higher modulation effect is realized, in addition, the debugging method uses the new balance point as the control target, the better modulation effect is also realized on large disturbance, and the robustness is high. Through simple system parameter determination and conversion, the direct-current power modulation quantity can be obtained, an electric power can fast damp the interval power oscillation under the conditions of fault generation and disturbance receiving, and the stability of the electric system is effectively recovered.

The invention relates to a large-scale silicon-based lithium niobate thin film electro-optic modulator array. The invention has the advantages that the difficulty of preparation process of a lithium niobate crystal layer is reduced through a structural design, the precision requirement of bonding of lithium niobate and silicon is reduced, the preparation and the bonding of a large-scale array typelithium niobate crystal layer can be simultaneously completed at one time, and the production efficiency of the silicon-based lithium niobate thin film electro-optic modulator array is greatly improved; and through the structural design and optimization of the silicon crystal layer, light can be naturally alternated and transmitted mutually in silicon waveguide and lithium niobate waveguide, anda high-performance lithium niobate thin film electro-optic modulation effect is realized. In addition, the method utilizes the maturity advantage of a standardized silicon-based integration technologyand concentrates a complex chip preparation process on the silicon crystal layer, thereby reducing the process error in the chip manufacturing process and ensuring the performance stability of the whole silicon-based lithium niobate thin film electro-optic modulator array.

The invention discloses a thin barrier enhanced AlGaN / GaN high-electron-mobility transistor device and a manufacturing method thereof, and mainly solves the problems of poor breakdown performance and low output current of the existing similar devices. The technical scheme is that a self-aligned technology is introduced in the SiN passivation layer growth process of the device, and an aligned LDD-HEMT is formed by utilizing the modulation effect of thin and thick SiN passivation layers on channels. The device comprises a substrate, an AlN nucleating layer, a GaN buffer layer, an AlN inserting layer, an AlGaN barrier layer, SiN passivation layers and gate, source and drain electrodes which are arranged from the bottom to the top. There are two SiN passivation layers. After completion of manufacturing of the gate electrode, the first SiN passivation layer is deposited by utilizing the self-aligned effect of the gate electrode, and then the second SiN passivation layer is deposited close to the drain electrode region between the gate electrode and the drain electrode so that the aligned LDD structure is formed. Breakdown voltage and saturation output current of the device are high, and damage introduced in the manufacturing process is low.