This invention provides an on-
chip terahertz
signal generator and its fabrication method. A
radio frequency signal with a frequency of is input via a probe. An
intensity modulator and a phase modulator modulate a continuous
laser beam to generate an electro-optic
frequency comb with equal frequency intervals. When the electro-optic
frequency comb passes through the
signal generation module, a terahertz signal is generated through
sideband parametric down-conversion of the optical frequency based on second-order
nonlinear optics. Finally, the terahertz signal is radiated outward through the signal
radiation module without introducing significant
phase noise, thus improving the quality of the generated terahertz signal. Furthermore, this invention integrates the electro-optic
frequency comb generation module, the signal generation module, and the signal
radiation module on the same substrate, eliminating the complex spatial
optical path alignment and
waveguide coupling of traditional discrete component systems. This greatly improves the
system's stability, reliability, and compactness. In addition, this invention avoids dependence on expensive
femtosecond pulsed laser sources, reducing the cost of generating terahertz signals.