The invention relates to a
vertical cavity surface emitting laser (VCSEL) device (100) of a self-mixing
interferometric sensor (300) for recording three-dimensional images, the VCSEL device (100) comprising a VCSEL array, a plurality of detectors (140), a first electric
laser contact (105) and at least one second electric
laser contact (127), wherein the VCSEL array comprises a plurality of
laser diodes (122), wherein each
laser diode (122) comprises an optical
resonator, wherein the optical
resonator comprises a first
distributed Bragg reflector (115), a second
distributed Bragg reflector (135) and an
active layer (120) for emitting light, wherein the
active layer (120) is arranged between the first
distributed Bragg reflector (115) and the second distributed Bragg reflector (135). A distributed Bragg reflector (135) is provided, wherein a first electric laser contact (105) and the at least one second electric laser contact (127) are arranged to provide an
electric drive current to electrically pump an optical
resonator of a
laser diode (122), wherein the first electric laser contact (105) is a common contact for all laser diodes (122) of a VCSEL array, wherein the at least one second electric laser contact (127) is arranged to be able to make electrical contact with at least a subset of the plurality of laser diodes (122) of the VCSEL array, wherein each
detector (140) is arranged to generate an electric self-mixing
interferometry signal associated with at least one
laser diode (122) upon receiving
laser light (10). The present invention also relates to a self-mixing
interferometry sensor (300) for recording three-dimensional (3D) images, a VCSEL device, and a method for manufacturing such a VCSEL device.