Internal fiber integration type miniature Michelson interferometric sensor and manufacturing method thereof

Abstract

The invention discloses an internal fiber integration type miniature Michelson interferometric sensor and a manufacturing method thereof. The sensor comprises two single mode fibers with different external diameters and the same core diameters; the single mode fiber with small external diameter is fusion-jointed on the single mode fiber with large external diameter by axis dislocation; the core parts of the two single mode fibers are overlapped; the uncovered part of the end face of the core of the single mode fiber with large external diameter is the reflecting surface of a reference arm; the core end of the exposed end of the single mode fiber with small external diameter is the reflecting surface of a measuring arm; the cores of the two fibers are made of SiO2. The sensor has the beneficial technical effects of simple manufacturing, low cost, small volume, good electromagnetic interference resistance, good high temperature resistance and good electric insulativity.

Description

technical field [0001] The invention relates to an optical fiber sensing technology, in particular to an integrated miniature Michelson interference sensor in an optical fiber and a manufacturing method thereof. Background technique [0002] Optical fiber sensing technology is an emerging technology in the late 1970s. It has become a research hotspot all over the world and has kept pace with optical fiber communication. Optical fiber sensors are favored because of their superior performance, which has the following advantages: small size, It has the advantages of light weight, anti-electromagnetic interference, high sensitivity, wide measurement bandwidth, and long distance between detection electronic equipment and sensors, which can form a sensor network. The optical fiber interferometer adopts optical interference technology, and its measurement accuracy is higher than that of ordinary optical fiber sensors. [0003] Optical fiber interferometric sensors are favored by p...

AI Technical Summary

Problems solved by technology

The online enamel cavity is made by arc welding, and the material used is SiO 2 , it has the advantages of stable structure, high integration, high temperature resistance, etc., but due to SiO 2 The thermal expansion is relatively small, so the temperature sensitivity is not high

However, the traditional miniature Michelson interferometric sensor is a system composed of two plane mirrors and a beam splitter, which requires high assembly precision; the fiber optic micro Michelson interferometric sensor is separated from the reference arm and the sensing arm, and the reference arm is greatly disturbed by external vibration and temperature.

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