161results about How to "Uniform intensity distribution" patented technology

An intensity distribution of an electric field of a high frequency power used for generating plasma is controlled by using an electrode made of a homogeneous material and a moving body. There is provided a plasma processing apparatus for introducing a processing gas into an evacuable processing chamber 100 and generating plasma by a high frequency power and performing a plasma process on a wafer W by the plasma. The plasma processing apparatus includes a dielectric base 105a having a multiple number of fine holes A; a varying member 200 as the moving body provided with a multiple number of rod-shaped members B capable of being inserted into and separated from the fine holes A; and a driving mechanism 215 configured to drive the varying member 200 to allow the rod-shaped members B to be inserted into and separated from the fine holes A.

A plasma processing apparatus includes a processing chamber in which a target substrate is processed; an application electrode and a facing electrode provided to face each other in the processing chamber, a plasma generation space being formed between the application electrode and the facing electrode; and an RF power supply connected to the application electrode, an RF power being supplied from the RF power supply to the application electrode. At least one of the application electrode and the facing electrode includes a base formed of a metal, and a dielectric body inserted into the base, one or more metal plate electrodes being buried in the dielectric body.

A method and system for exposing a light sensitive material using device for forming a row of spots of light onto the light sensitive material located on a focal plane, device for modulating each of the spots according to imaging data so that at any point of time, the row of spots forms a data pattern according to the imaging data, device for generating relative motion between the imaging mechanism and the light sensitive material on the focal plane, the direction of motion substantially parallel to the direction of the row of spots on the light sensitive material; and data synchronizing device for shifting the imaging data into the modulating device at a rate determined by the speed of relative motion to maintain the image of any data pattern substantially stationary on the light sensitive material.

A parallel-beam optical tomography system for imaging an object of interest includes a parallel ray beam radiation source that illuminates the object of interest with a plurality of parallel radiation beams. After passing through the object of interest the pattern of transmitted or emitted radiation intensities is magnified by a post specimen optical element or elements. An object containing tube is located within an outer tube, wherein the object of interest is held within or flows through the object containing tube. A motor may be coupled to rotate and/or translate the object containing tube to present differing views of the object of interest. One or more detector arrays are located to receive the emerging radiation from the post specimen magnifying optic. Two- or three-dimensional images may be reconstructed from the magnified parallel projection data.

The present invention relates to embodiments of a process for subjecting a holographic storage medium to illuminative treatment to: (1) enhance or optimize recording of holographic data; (2) enhance or optimize reading of recorded holographic data; and/or (3) erase recorded holographic data. The present invention also relates to embodiments of a system comprising: (a) an illuminative treatment beam; (b) means for reducing the coherence of the beam and (c) means for transmitting the reduced coherence beam to cause illuminative treatment of: (1) an unrecorded portion of a holographic storage medium to provide pre-cured portions having increased ability to stably record holographic data; (2) a recorded portion of a holographic storage medium to provide a post-cured portion having reduced residual sensitivity; and/or (3) a recorded portion of a holographic storage medium having holographic data to provide an erased portion wherein at least some of the recorded holographic data is erased.

In a gas turbine having a plurality of moving blades provided on a rotary shaft in a circumferentially adjoining condition, a seal pin is provided in a spacing between the shanks of the adjacent moving blades for preventing leakage of cooling air from a blade root portion side to an airfoil side; an arcuately depressed portion is formed on the shank of each of the moving blades; and vibration of each of the moving blades is suppressed in such a manner that the seal pin serves as a spring system while the airfoil portion, the platform, the shank, and the blade root portion serve as a mass system.

An LED is mounted on a flexible wiring board, and this flexible wiring board is adhered by a both-surface adhesive tape to a back of a light guiding plate to which a light reflecting film is adhered by an adhesive layer. The LED is kept at a desired set position by retaining the LED by a retaining section formed integrally with the light guiding plate in a state where a light emitting surface of the LED air tightly contacts a light entrance end surface of the light guiding plate, and by adhering a rear surface of the LED to an inner surface of the retaining section by an adhesive agent.

A lighting apparatus includes a bilaterally symmetrical light engine comprising first and second light emitting diode (LED) devices or planar LED device arrays facing opposite directions, and an envelope including phosphor spaced apart from and surrounding the bilaterally symmetrical light engine. The phosphor is effective to convert light emitted by the light engine to emission light. The bilaterally symmetrical light engine may be configured to emit light having a bilaterally symmetrical intensity distribution that is uniform except at emission angles within 10° of the symmetry plane of the bilaterally symmetrical light engine. Each of the first and second LED devices or planar LED device arrays may comprise at least one hemispherically emitting LED device including an LED chip and an encapsulant encapsulating the LED chip and shaped to refract light emitted by the LED chip into a uniform distribution over a hemispherical solid angle.

A module and an arrangement for, as well as a method of, generating a generally uniform distributed line pattern of light on a symbol to be read by image capture employs a light source for generating light along an optical axis in a distribution having different extents along intersecting directions generally perpendicular to the axis, a linear lens array having a plurality of compound curvature lenses spaced apart from one another along one of said directions, for receiving the light from the light source, and for optically modifying the light from the light source to generate the generally uniform distributed line pattern of light on the symbol, each lens having a concave curvature for diverging the light along said one direction, and a convex curvature for collimating the light along the other of said directions, and a solid-state imager having an array of image sensors for capturing return light from the symbol over a field of view having different extents along the intersecting directions.

An image projection apparatus includes a light source module, a lens unit, a light valve, and a projection lens. The light source module includes at least one laser array, at least one reflecting unit, a diffusing member, and a light uniformizing unit. The laser array includes a plurality of laser units that are arranged in a matrix. The reflecting unit has a plurality of reflecting surfaces that are non-parallel to each other, and that are disposed to receive and reflect laser beams emitted by the laser units. The diffusing member is disposed to receive and diffuse the laser beams reflected from the reflecting surfaces so as to form an illumination beam. The light uniformizing unit is disposed to receive and uniformize the illumination beam from the diffusing member.

In a projection objective for imaging a pattern arranged in the object plane of the projection objective into the image plane of the projection objective, at least one optical component is provided which has a substrate in which at least one substrate surface is covered with an interference layer system having a great spatial modulation of the reflectance and/or of the transmittance over a usable cross section of the optical component, the modulation being adapted to a spatial transmission distribution of the remaining components of the projection objective in such a way that an intensity distribution of the radiation that is measured in a pupil surface has a substantially reduced spatial modulation in comparison with a projection objective without the interference layer system.

An optical system with laser beam uniform irradiation, comprises: a wave-guide space-dividing a laser beam from a light source into divided beams; a superposition lens by which the divided beams are superposition-irradiated on an irradiation face; a delay plate by which beam intensity on the irradiation face is uniform. The wave-guide makes width of the divided beams more than 1/2 times large of a space interference distance on a laser beam section; the delay plate makes a delay of the adjacent divided beams longer than an interference distance of the time of the laser beam, and reduces interference on the irradiation face. An other optical system comprises: a laser beam dividing component for dividing the laser beam into divided beams; a superposition-irradiation component for superposition-irradiating the divided beams on the irradiation face; a homogenization component for homogenizing beam intensity on the irradiation face. The homogenization component includes an optical delay component which makes a delay of the adjacent divided beams longer than an interference distance of the time of the laser beam, a light rotation component which makes polarization directions of the adjacent divided beams actual orthogonal.

An improved optical system is provided for diffusing light uniformly over a wide angle, including, a diffractive element for diffracting light received by the system in multiple diffraction orders, and a diffusing element which diffuses the diffracted light. The diffractive element provides diffracted light having an angular distribution of intensities over the diffraction orders which is correlated to the power spectrum of the diffusing element such that the system produces a predetermined intensity distribution of diffused light. The diffraction period of the diffractive element is selected such that the angular separation between the zeroeth and first diffraction orders is approximately one-half the angular extent of the full-width-at-half-maximum of the power spectrum of the diffusing element. The strengths of the diffraction orders are selected such that the combination of diffused light from each diffractive order provides uniformity in the intensity of the diffused light from the system.

This invention makes it possible to provide a charged-particle beam exposure apparatus which implements highly accurate pattern drawing by detecting the intensity distribution of irradiation charged-particle beams and controlling the distribution to be uniform. The charged-particle beam exposure apparatus splits a charged-particle beam irradiated from a charged-particle beam source into a plurality of charged-particle beams by a plurality of apertures formed in an aperture array (3a). The charged-particle beam exposure apparatus includes a detection unit which detects the intensity of the charged-particle beam passing through the aperture formed in the aperture array (3a), and a grid array which adjusts the intensity of the charged-particle beam on the basis of the detection result obtained by the detection unit. The charged-particle beam exposure apparatus makes the intensity distribution of the charged-particle beams which reach a wafer (5) through the plurality of apertures uniform.

The invention discloses concrete based on micro-nano powder and a preparation method of the concrete, relates to the field of building materials and solves the problems of low strength, poor durability and high probability of cracking of concrete. Raw materials of the provided concrete based on the micro-nano powder comprise components in percentage by mass as follows: 8%-20% of cement, 15%-30% of sand, 40%-60% of stone, 1%-5% of micro powder, 0.1%-2% of nano powder, 0.02%-0.2% of an amphoteric dispersing agent, 0.01%-0.5% of shrinkage reduction substances and 5%-10% of water, wherein the shrinkage reduction substances are shrinkage reducing agents or expanding agents. The provided concrete based on micro-nano powder has the advantages of high strength, good durability and low probability of cracking.

An illumination device includes: a light source that emits first light at a first wavelength; an integrator optical system that the first light enters; a wavelength conversion element that converts the first light transmitting through the integrator optical system into second light at a second wavelength different from the first wavelength; a wavelength separation element provided on an optical path of the first light between the integrator optical system and the wavelength conversion element; a pickup optical system that is provided between the wavelength conversion element and the wavelength separation element and receives the first light and the second light; and a chromatic aberration-correcting optical element provided at least one of between the integrator optical system and the wavelength separation element on the optical path of the first light and at downstream of the wavelength separation element on an optical path of the second light.