Resonant type Fabry-Perot optical fiber sensor, manufacturing method and air pressure detecting method

Abstract

The invention provides a resonant type Fabry-Perot optical fiber sensor which comprises a sensor body and a through hole penetrating through the sensor body. One end of the through hole is provided with a graphene thin film for sensing the to-be-detected air pressure in an attached mode, and the other end of the through hole is provided with transmission optical fibers which penetrate through the through hole and are matched with the through hole. According to the resonant type Fabry-Perot optical fiber sensor, the air pressure of gas is calculated in the mode that graphene thin film resonant frequency changes are caused by damp of the gas to the graphene thin film, so that a closed Fabry-Perot cavity is not needed, and the manufacturing difficulty is reduced; the the original measurement thin film deformation quantity is replaced by resonance to further conduct air pressure measurement, and thin film material creeping caused by repeated film deformation is effectively reduced; digital frequency signals after probe laser detection are output after the sensor conducts detection, and result analysis can be conveniently carried out compared with light wave signals of an interferometric sensor. Stimulation and detection are carried out through the single transmission optical fibers, and long-distance air pressure measurement can be achieved, and the applicability of the sensor is greatly improved.

Description

technical field [0001] The invention belongs to the technical field of air pressure measurement devices, and in particular relates to a graphene film resonant Fabry-Perot optical fiber sensor, its manufacture and air pressure detection method. Background technique [0002] Most of the existing air pressure measurement devices use fiber-optic Fabry-Perot optical fiber sensors with simple structure and accurate detection. Cavity, when the gas in the Fabry-Perot cavity is excited and expanded to generate air pressure to act on the elastic diaphragm, the diaphragm is deformed, thereby changing the cavity length of the Fabry-Perot cavity. The resulting reflected light interferes with the spectral change, and the air pressure measurement can be realized. However, detection by the above principle requires the Fabry-Perot microresonator to be completely sealed by the diaphragm. Therefore, most of the fiber-optic Fabry-Perot air pressure sensors detect the air pressure by detecting...

AI Technical Summary

Problems solved by technology

Commonly used sealing methods are rubber seal or CO 2 Heating, but the strictly sealed production process increases the complexity and difficulty of sensor manufacturing; at the same time, the repeated deformation of the film can cause the diaphragm material to creep during use, thereby reducing the mechanical stability of the sensor after a period of time; In terms of demodulation, the method used to measure spectral changes is not conducive to fast and simple acquisition of air pressure signals, so the above-mentioned defects lead to deviations when using optical fiber Fabry-Perot optical fiber sensors for measurement, resulting in inaccurate measurement results

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