The invention discloses a cavity film bulk acoustic resonator and a preparation method thereof, belonging to the technical field of acoustic resonators. The preparation method comprises the steps of growing a film structure layer in the acoustic resonator on a preparation substrate; fixing both the preparation substrate and the film structure layer growing on the preparation substrate on a support substrate through one side of the film structure layer so as to form a cavity between the support substrate and the film structure layer; and stripping the film structure layer off the preparation substrate. The film structure layer comprises a support layer, or comprises a support layer and a bottom electrode, or comprises a support layer, a bottom electrode and a piezoelectric film, or comprises a support layer, a bottom electrode, a piezoelectric film and a top electrode, so as to form a structure comprising the support substrate, the support layer, the bottom electrode, the piezoelectric film and the top electrode that are sequentially overlaid. Bad effects on a resonance structure in removing of a sacrificial layer in the conventional process are eliminated, so that the cavity film bulk acoustic resonator prepared by the method has better performances.