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2127results about How to "Lower melting temperature" patented technology

Polyceramic e-chuck

The present invention discloses an electrostatic chuck for clamping work substrates, said chuck comprising three layers, where the dielectric constant of included non-conductive layers is selected to provide overall lower capacitance to the chuck. In the chuck assembly of the present invention, the top dielectric layer that is in contact with a substrate, such as, for example, a wafer, has a dielectric constant that is preferably greater than about 5, with a resistivity that is preferably greater than about 1E6 ohm.m, whereas the bottom dielectric layer has a dielectric constant that is preferably less than about 5 and a resistivity that is preferably greater than about 1E10 ohm.m. The intermediate layer preferably has a conductive layer where the resistivity is less than about 1 ohm.m. The electrostatic chuck may be bonded to heat sinks coated with anti-arc dielectrics. The heat sink can also be used as an RF electrode. The heat sink may have provisions for coolants and gas channels to feed a cooling gas to the backside of a wafer. The heat sink may have feed thrus to power the segmented electrodes in the electrostatic chuck. The passages for the feed thrus, gas feed holes and lift pins may be lined with ceramics or polymers to prevent any discharge to the heat sink. The electrostatic chuck is for clamping work substrates like Si, GaAs, SiO2, etc. used in semiconductor tools.
Owner:FM INDS

Blast-furnace smelting method for vanadium titano-magnetite

The invention discloses a blast-furnace smelting method for vanadium titano-magnetite. The method is realized in a way that: vanadium titano-magnetite accounts for 30-60% of ferrous burden which is fed into a blast furnace, and the burden comprises 40-65% of agglomerate, 30-50% of pellet and 5-10% of lump ore; the diacidic basicities CaO/SiO2 of agglomerate, pellet and blast-furnace slag are respectively controlled at 1.6-2.5, 0.6-1.0 and 1.05-1.20; the content of MgO in blast-furnace slag is controlled at 7.5-9.0%; by adding two batches of ore and three batches of coke and using the charging operation of the development center, manganese oxide ore or sintered manganese ore powder, and fluorite are incorporated into injection coal and injected into the blast furnace along with the coal powder; and thus, the content of MnO in the slag and the content of CaF2 in the slag are respectively controlled at 1.0-4.5% and 0.50-2.0%, and the oxygen-enrichment percentage of the blast furnace is controlled at 2.0-4.0%. Compared with the smelting blast furnace using the same quality and structure of the burden, the comprehensive coke ratio of the invention is reduced by 20-50kg per ton of iron, the content of TFe in the slag is reduced by 50%, and the comprehensive cost per ton of iron is reduced by 30-50 yuan. The invention has wide prospects for popularization and application.
Owner:CENT SOUTH UNIV
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