The application discloses a SAW
resonator of an aluminum
nitride-based heteroacoustic layer, and is used for improving
resonator performance. The
resonator comprises a heteroacoustic layer (HAL) structure, an input
interdigital transducer (IDT), an output IDT, a first phononic
crystal and a plurality of second phononic crystals. The HAL structure comprises a piezoelectric layer and a
composite substrate, the piezoelectric material of the piezoelectric layer is
scandium-doped aluminum
nitride material. The input IDT and the output IDT are arranged on the piezoelectric layer respectively. The first phononic
crystal is embedded into the piezoelectric layer and located between the input IDT and the output IDT, and is used for constructing a defect band through the first phononic
crystal, so that the
sound wave of the input IDT is propagated to the output IDT through the defect band. The input IDT comprises an input
bus bar, and the output IDT comprises an output
bus bar. The plurality of second phononic crystals are embedded into the piezoelectric layer respectively and located at two ends of the input
bus bar and two ends of the output bus bar respectively, and are used for reflecting the
sound wave through the second phononic crystals.