The invention provides a multilayer heterogeneous material ultrafast
laser integrated connection method and device, and the method specifically comprises the steps: stacking and fixing a
chip bonding pad, a spring pin and
quartz glass on a three-dimensional motion platform, and adjusting the platform to enable a
laser focal plane to be located at the center of the pin; aiming at the connection of a bonding pad and a pin, high-repetition-frequency ultrafast
laser with a high
Rayleigh length is obtained through spatial shaping, a two-dimensional
galvanometer is used for carrying out
spiral line or concentric circular ring scanning to act on the periphery of the pin,
metal plasma is excited,
molten metal is formed and deposited in a
contact hole of the pin and the bonding pad, and the
molten metal is continuously accumulated along with reverse heating, so that the
metal is formed.
Dissimilar metal welding is achieved; aiming at the connection of the pin and the glass, laser penetrates through the
quartz glass,
plasma is excited on a
metal interface,
molten metal with increased volume is formed, a material interface gap is filled, and
welding from non-optical contact to optical contact is regulated and controlled; and two heterogeneous materials are successfully welded through single scanning until
welding of the whole
pin array is completed, and efficient integrated packaging is achieved.