A method of computing a manufacturing yield of an 
integrated circuit having device shapes includes sub-dividing the 
integrated circuit into 
failure mechanism subdivisions (each of the 
failure mechanism subdivisions includes one or more 
failure mechanism and each of the failure mechanisms includes one or more defect mechanisms), partitioning the failure mechanism subdivisions by area into partitions, pre-
processing the device shapes in each partition, computing an initial average number of faults for each of the failure mechanisms and for each partition by numerical integration of an average 
probability of failure of each failure mechanism, (the numerical integration produces a 
list of defect sizes for each defect mechanism, and the computing of the initial average includes setting a maximum integration 
error limit, a maximum sample size for a 
population of each 
defect size, and a maximum number of allowable faults for each failure mechansim), and computing a final average number of faults for the 
integrated circuit by iterativelly reducing a 
statistical error of the initial average number of faults for each of the failure mechanisms until the 
statistical error is below an 
error limit.