A method of computing a manufacturing yield of an
integrated circuit having device shapes includes sub-dividing the
integrated circuit into
failure mechanism subdivisions (each of the
failure mechanism subdivisions includes one or more
failure mechanism and each of the failure mechanisms includes one or more defect mechanisms), partitioning the failure mechanism subdivisions by area into partitions, pre-
processing the device shapes in each partition, computing an initial average number of faults for each of the failure mechanisms and for each partition by numerical integration of an average
probability of failure of each failure mechanism, (the numerical integration produces a
list of defect sizes for each defect mechanism, and the computing of the initial average includes setting a maximum integration
error limit, a maximum sample size for a
population of each
defect size, and a maximum number of allowable faults for each failure mechansim), and computing a final average number of faults for the
integrated circuit by iterativelly reducing a
statistical error of the initial average number of faults for each of the failure mechanisms until the
statistical error is below an
error limit.