The present application relates to the
chip advanced packaging and precision bonding technical field, specifically discloses a kind of
chip advanced packaging bonding
system and method based on pad / bump feature targeting.The present application uses the geometric barycenter, edge profile, array spacing of pad, bump (including
copper column bump, micro bump) on
chip and substrate as the only targeting feature, completely get rid of the dependence on special alignment mark (Mark point), for 2.5D / 3D packaging, flip
welding,
copper copper bonding and other advanced packaging scenarios, innovative use "visual-bonding axis in position +
array feature targeting solution + whole-process dynamic closed-loop correction" architecture, through the clear
correction algorithm and trigger mechanism, real-time dynamic correction bonding coordinate in the whole
bonding process, compensate the alignment deviation caused by
thermal deformation, mechanical drift, patch pressure deformation, realize bonding alignment accuracy≤0.5 μm.The present application is different from the existing conventional bump alignment technology, the core innovation lies in the
deep integration of
array feature targeting solution and dynamic closed-loop correction, solve the industry pain point of traditional bonding "pre-alignment deviation accumulation", can greatly improve advanced packaging yield and reliability, have unavoidable underlying technical barriers.