The invention discloses a displacement measurement method and
system based on orbital
angular momentum light beam conjugate interference, and the method comprises the steps: enabling
linearly polarized light emitted by a
laser to pass through an
optical attenuator, a
light beam expander, a quarter-wave plate and a vortex wave plate to form a
light beam with orbital
angular momentum, and enabling the light beam to pass through a
beam splitter to be divided into a reference light beam and a measurement light beam. A measurement light beam is vertically incident on a reflection
grating, and the mth-order
diffraction light is incident on a first cube-corner
prism and is reflected back to a
diffraction grating to be subjected to secondary
diffraction. And after the
reference beam passes through the second cube-corner
prism, the topological charge symbol of the
reference beam is changed by the
Dove prism. The reference light beam and the measurement light beam generate conjugate interference at the
beam splitter prism, a
petal-shaped interference pattern collected by the CCD is demodulated, and in-plane and out-of-plane two-dimensional displacement of the
grating is calculated. The
system has the characteristics of simple and compact structure, strong anti-interference capability, high precision and the like, and can be widely applied to the fields of high-end equipment manufacturing,
semiconductor industry, precision metering and the like.