1 results about "Spatial change" patented technology

This application relates to the field of optical measurement technology, and in particular to a thickness detection method and a non-contact optical scanning system, comprising: acquiring a two-dimensional characterization image of the sample to be measured; determining an effective detection area; planning a detection path; acquiring raw thickness data of multiple feature sampling points along the detection path; identifying candidate anomalies among the feature sampling points, wherein candidate anomalies are feature sampling points whose spatial change rate exceeds a set threshold; after identifying candidate anomalies, a first correction process can be executed, including: performing region segmentation on the two-dimensional characterization image to generate an attribute mask for distinguishing regions with different physical properties; extracting local neighborhood attribute features of the corresponding positions of candidate anomalies in the attribute mask; correcting the attributes of candidate anomalies; and filtering the raw thickness data of multiple feature sampling points based on the corrected attributes to generate the thickness of the sample to be measured. This application can demonstrate extremely high efficiency in high-precision measurement and large-scale automated production.