The invention discloses a
waveguide grating for realizing
diffraction efficiency gradual change, a preparation method and equipment. And the
grating depth and the duty ratio are monotonically increased along the
etching direction, so that the spatial gradient distribution of the
diffraction efficiency is obtained. The method comprises the following steps of: firstly, forming periodic
photoresist stripes on a substrate by utilizing an interference photoetching technology to obtain an initial
grating pattern; and then, the substrate is placed in a
plasma etching system, and the depth and duty ratio of the grating are monotonically increased along the
etching direction by regulating and controlling the etching time or
etching rate of different areas, so that the spatial gradient distribution of
diffraction efficiency is realized. The
waveguide grating disclosed by the invention effectively compensates attenuation of light in a
waveguide transmission process, and the uniformity and
imaging quality of AR display application and the like are remarkably improved. The problem of uneven brightness caused by
light energy transmission attenuation of the
waveguide grating in the prior art can be effectively solved, the manufacturing cost is low, the process expandability is high, and the
waveguide grating is suitable for various waveguide optical display scenes such as
mixed reality (MR) and
virtual reality (VR).