227 results about "Light scan" patented technology

The invention discloses a shield muck volume estimation method and system based on image processing, and particularly relates to the technical field of tunnel engineering monitoring, and the method comprises the steps: obtaining muck RGB and depth images through an image collection device, generating high-precision three-dimensional point cloud data through the combination of laser scanning and a multispectral technology, and calculating the muck volume through a slicing method. And fusing the mass flow and water content data of the belt weigher, dynamically generating a calibration factor, and correcting a volume estimation result in real time. The system comprises an image acquisition module, a point cloud processing module, a volume calculation module and a dynamic calibration module, has the characteristics of automation, high precision, real-time feedback and the like, effectively solves the problems of large error and slow response of a traditional manual metering and single weighing mode, and is suitable for continuous and accurate monitoring of the volume of muck in the shield construction process.

The invention relates to the field of robot navigation, and discloses a logistics robot navigation method based on vision and laser fusion navigation, which is used for solving the problem of echo energy attenuation or signal loss during robot navigation, and comprises the following steps: acquiring information reliability parameters of each space sub-region in a current laser scanning period; a reflection attenuation index is obtained through evaluation according to the information reliability parameter, whether signal attenuation occurs in the space sub-region or not is judged, if it is judged that signal attenuation occurs in a certain space sub-region, the space sub-region is marked as a low-confidence region, the initial depth information is corrected according to the corresponding reflection attenuation index, and actual depth information is obtained; the corrected environment model is obtained according to the actual environment depth information, the geometric structure of the corrected environment model is optimized and adjusted according to the reflection attenuation index change rate and the depth correction residual error of each space subarea, and the navigation precision and the operation safety of the robot in the storage environment are effectively improved.

The invention discloses an automatic calculation and compensation method and system for dynamic strike delay of a laser weeding robot, and belongs to the technical field of agricultural intelligent equipment.The method is achieved through the following steps that in the static calibration stage, a laser galvanometer, a camera and collaborative parameters of the laser galvanometer and the camera of a robot system are corrected; laser scanning nonlinear errors, camera imaging distortion errors and pose and mapping errors between a galvanometer coordinate system and a camera coordinate system are eliminated; in the dynamic testing stage, the robot advances at a constant speed, laser striking is conducted on the wood chips with preset marks, and the position deviation between an actual striking point and a theoretical target point is obtained through the image recognition technology; reversely deducing system delay time based on the deviation and the speed of the robot, and iteratively updating compensation parameters; finally, after the iterative optimization strike deviation is smaller than the set precision, the compensation parameters are solidified to a control system; the method is suitable for a laser weeding robot and other dynamic visual striking systems.

The invention discloses a sapphire window-based nuclear magnetic resonance device and a coal seam free gas volume correction method, the sapphire window-based nuclear magnetic resonance device comprises a computer, a gas cylinder assembly, a nuclear magnetic bearing platform, a coal sample holder, a stable displacement pump and a laser emitter, the gas cylinder assembly is connected with a left end inlet of the coal sample holder, and the coal sample holder is arranged on the nuclear magnetic bearing platform; a sapphire window is arranged on the coal sample holder, laser emitted by the laser emitter faces the sapphire window to observe a cylindrical coal sample in the coal sample holder, an outlet at the right end of the coal sample holder is connected with a test pipeline, and the coal sample holder is connected with a confining pressure control pipeline. Advanced technologies such as nuclear magnetic resonance and laser scanning are applied to the free gas content simulation experiment of the coal bed gas reservoir, and the tested data are more accurate. The device can also be used for permeability testing, methane adsorption experiments, displacement experiments and the like, test results are used for evaluating distribution characteristics of free gas in geological media such as coal seams and shale, and theoretical data support is provided for energy development in China.

The invention discloses a coaxial laser confocal processing and measurement integrated system and an in-situ morphology measurement method thereof, and belongs to the technical field of ultrafast laser precision processing and in-situ measurement. The system comprises a laser confocal morphology measurement module, an ultrafast laser scanning processing module, a CCD (Charge Coupled Device) microscopic imaging module, a beam splitter prism, a low-pass dichroscope, a long-working-distance achromatic laser processing objective lens and a combined three-axis precision displacement table, the laser confocal morphology measurement module generates a measurement light beam to realize morphology measurement of a sample; the ultrafast laser scanning processing module generates a processing light beam to scan and process the surface of the sample; the CCD microscopic imaging module generates an illumination light beam to realize illumination of a processing position and acquisition of image information of a sample surface; a measurement light beam, a processing light beam and an illumination light beam form coaxial light beams through a low-pass dichroscope, the coaxial light beams are focused at the same position of the surface of a sample through a long-working-distance achromatic laser processing objective lens, and the coaxial in-situ measurement condition is achieved.

The invention relates to the technical field of laser scanner parameter calibration, in particular to a multi-line laser scanner internal parameter modeling and internal and external parameter joint calibration method in an unmanned aerial vehicle laser scanning system. In combination with systematic errors existing in the scanning process of each wire beam of the laser scanner, six calibration parameters are used for conducting error modeling on the horizontal angle of each wire beam of the laser scanner, so that the horizontal angle of each wire beam is corrected, and coordinates of corrected scanning points in a laser scanner coordinate system are obtained; then, internal and external parameters of the laser scanner are jointly calibrated, six calibration parameters of the horizontal angle of each wire harness of the laser scanner and three placement angle parameters of the laser scanner are jointly calibrated, and optimal internal and external parameters are solved; the method can effectively improve the precision and consistency of the point cloud.

The invention discloses a binocular vision depth estimation method and system based on knowledge embedding, and the method comprises the steps: collecting data through employing a binocular camera and rotating laser scanning, carrying out the preprocessing of the data, constructing a data set, and dividing the data set into a training set and a test set. Secondly, constructing a binocular vision depth estimation model based on a convolutional neural network, and constructing a physical knowledge embedding loss function according to the relationship between the real parallax and the predicted parallax; and then training the binocular vision depth estimation model based on physical knowledge embedding by using the training data set. And finally, using the trained binocular vision depth model to predict the stereo image of the test set to obtain a disparity map which is consistent with the original image in size and conforms to the physical characteristics of the scene, and completing depth estimation. According to the method, the disparity map conforming to the physical characteristics of the scene can be obtained, and the precision of disparity estimation and the generalization performance of the model are improved.

The invention relates to the technical field of tunnel monitoring, in particular to a construction tunnel laser scanning point cloud attitude correction method based on multi-feature fusion, and the method comprises the steps: S1, synchronously extracting a ground baseline feature, a haunch symmetry axis feature and a vault circle center feature from a tunnel section laser scanning point cloud; s2, constructing confidence quantitative models for the three types of features respectively; s3, calculating the weight of each feature through a normalized exponential function based on the confidence of the three types of geometric features obtained in the step S2; setting a confidence threshold value, and forcibly returning to zero weight to shield failure features when the confidence threshold value is lower than the threshold value; when all the weights return to zero, activating a degradation protection mechanism to give equal weights; and finally, weighting and fusing the horizontal rotation angles of the three types of features according to weights, and outputting a correction angle. According to the method, the problem of systematic deviation caused by interference of a single reference is solved, and the correction precision and robustness in a complex construction environment are remarkably improved.

The invention relates to a stable foundation flatness laser measuring instrument and a method thereof, and belongs to the field of engineering measurement and foundation detection.The method comprises the steps that S1, a disturbance isolation base, a self-stabilizing suspension measuring head and a sensing assembly are arranged; s2, starting an air source connected to the disturbance isolation base, and attenuating and limiting the physical shake of the self-stabilizing suspension measuring head within a low-frequency range; s3, starting work of the sensing assembly, rotating the laser scanner to obtain original polar coordinate data of the surface of the foundation, and capturing attitude data of the self-stabilizing suspension measuring head by the high-frequency inertial measurement unit; and S4, stopping acquisition, constructing an absolute coordinate system taking a gravity vector as an axis based on attitude data, calculating an instantaneous deflection relationship of a scanning plane of the rotary laser scanner, performing elevation reduction on original polar coordinate data, and fitting a least square plane to evaluate the flatness of the foundation. According to the invention, an original observation platform with extremely high stability is provided for the laser scanner and the inertial measurement unit, and the signal-to-noise ratio of measured data is ensured from the physical level.

The invention relates to the technical field of laser scanners, in particular to a tracking type laser scanner precision calibration method, which comprises the following steps: selecting a standard block gauge with a corresponding thickness from a standard block gauge set, and constructing a gap simulation test piece or a step difference simulation test piece through lapping; acquiring a reference value of the simulation test piece by using high-precision metering equipment, driving a to-be-calibrated tracking type laser scanner to scan the simulation test piece at a plurality of measurement positions for multiple times, and recording original measurement data; based on the reference value and the original measurement data, a measurement error and a repeatability error are calculated, and the measurement precision of the tracking type laser scanner is evaluated; and if the measurement precision does not meet the preset standard, establishing a segmented error model through multi-distance data acquisition, calibrating compensation parameters and dynamically correcting a measurement value in real time. The precision of gap and order difference measurement of the tracking type laser scanner can be improved, the cost is low, and the operation is convenient.

The invention discloses a hole array laser machining method and system based on AOD and galvanometer cooperation. The method comprises the following steps that the laser scanning track of each area to be drilled in an area array to be drilled and the target position of laser pulses on the laser scanning track are determined; determining an AOD scanning breadth covering all the areas to be perforated according to the array shape of the areas to be perforated, and determining a galvanometer scanning track and a galvanometer scanning speed in the AOD scanning breadth; the machining sequence of the laser beams during hole forming is determined; acquiring the AOD displacement of each laser pulse under the AOD coordinate system; and controlling the laser device to output laser pulses, controlling the galvanometer system to scan along the galvanometer scanning track at the galvanometer scanning speed, and controlling the AOD system to deflect each laser pulse according to the AOD displacement so as to form a hole array. Through the synergistic effect of the AOD system and the galvanometer system, efficient and high-quality machining of the hole array structure can be achieved.

The invention discloses an automatic welding process combining laser scanning with visual inspection. The process specifically comprises four working procedures of laser scanning before welding, automatic wire feeding, automatic welding and online tracking detection in welding. The specific implementation effects of each process are as follows: the pre-welding laser line scanner scans a weldment by emitting a laser beam to extract three-dimensional information of the weldment, so that a welding route is conveniently planned, and a walking route is fed back to the control cabinet; the control system can receive an instruction to control the driving system to carry out an automatic welding process, so that the welding gun reaches a specified position to carry out automatic welding; in the welding process, the infrared laser tracker dynamically tracks the welding gun, corrects the walking route and guides the compound eye camera to conduct visual inspection so as to judge the welding quality, and the machining targets that components at the welding seam connecting position are uniform, and the welding seam surface is high in quality and low in defect are achieved.

The application relates to the field of oral medicine diagnosis and discloses an AI-enhanced real-time occlusion detection system based on intraoral images, which comprises a multi-source intraoral image acquisition module, which is used for acquiring dynamic oral image data through a high-definition oral endoscope, recording the three-dimensional structure of a tooth surface in combination with a laser scanning device, and collecting the force distribution of an occlusion contact point through a pressure sensor array; the multi-source intraoral image acquisition module comprises a time stamp synchronization unit, which performs multi-source synchronization on the oral image frame sequence and the occlusion force distribution data by using a unified time mark; through the multi-source intraoral image acquisition module, the synchronous acquisition of dynamic images, three-dimensional structure data and occlusion force distribution is realized, and the time sequence consistency of the data is ensured through the time stamp mark. Compared with the acquisition mode of a traditional single data source, multi-source acquisition can comprehensively record the dynamic characteristics in the occlusion process, provide rich and accurate input for subsequent AI analysis, and avoid data omission or acquisition deviation.

The utility model relates to an intelligent loading double-radar laser scanning device, which comprises a horizontal top frame and radar laser scanning assemblies, and is characterized in that the number of the radar laser scanning assemblies is two, one radar laser scanning assembly is arranged on the X-direction side of the horizontal top frame, and the other radar laser scanning assembly is arranged on the Y-direction side of the horizontal top frame; protective cylinders in one-to-one correspondence with the radar laser scanning assemblies are fixed to the lower surface of the horizontal top frame, lifting cylinders in one-to-one correspondence with the protective cylinders are inversely arranged on the upper surface of the horizontal top frame, connecting columns are arranged at the lower ends of cylinder rods of the lifting cylinders, and the lower ends of the connecting columns are fixedly connected with the top surfaces of shells of the radar laser scanning assemblies; a cover plate is fixed to the bottom face of a shell of the radar laser scanning assembly, limiting spigots corresponding to the cover plate are formed in the lower ends of the protection cylinders, air inlet connectors are formed in the side walls of the protection cylinders, an air pump is arranged on the horizontal top frame, a filter screen layer is arranged at an inlet of the air pump, and an outlet of the air pump is connected with the air inlet connectors in the two protection cylinders through pipelines. The device can ensure the detection precision even in a severe working environment.

The invention belongs to the technical field of screen detection, and discloses a screen shell size detection method and device, equipment and a storage medium. The method comprises the steps that a mechanical arm drives a laser scanner to move to scan reflective mark points around a to-be-detected screen shell according to a first preset path, and the reflective mark points are standard round points of a fixed size; driving a laser scanner to move through a mechanical arm to scan the outer surface of the to-be-detected screen shell according to a second preset path, and obtaining original point cloud data including the to-be-detected screen shell; the standard model of the screen shell is converted into a point cloud format, and a standard point cloud is obtained after downsampling; obtaining a to-be-measured point cloud based on the reflective mark point and the original point cloud data; and performing rigid registration on the standard point cloud and the to-be-detected point cloud to realize detection of the size of the screen shell. According to the mode, size detection is carried out through three-dimensional model registration and feature point matching, manual scanning is not needed, the automation degree is higher, and the detection precision is higher.

An image scanning microscope includes: an excitation unit that generates excitation light; an objective lens pointing to the sample space and guiding the excitation light into the sample space and receiving the detection light from the sample space; a scanning unit arranged along a beam path between the excitation unit and the objective lens and selectively directing the excitation light into different regions of the sample space via the objective lens; a detection arrangement comprising at least one spectral coding element that changes a spatial distribution of the intensity of the detection light based on the wavelength of the detection light and at least one array detector that detects the spatial distribution of the intensity of the detection light; a main beam splitter that directs the excitation light into the objective lens via the scanning unit and directs the detection light into the detection arrangement; and a control unit that controls the excitation unit to set the excitation modality and determines a spatial distribution of concentrations of at least two different fluorophore species in a sample arranged in the sample space based on a spatial distribution of the intensity of the detection light and based on the excitation modality and / or the photon arrival time.

The invention relates to the technical field of microscopic imaging, and particularly provides a stimulated Raman scattering microscopic imaging system capable of simultaneously scanning double Raman frequency shift spectrums, which comprises a laser light source driving and modulating unit and a signal detecting and data processing unit, the laser light source driving and modulating unit comprises a dual-channel laser synchronous excitation module, a light beam polarization regulation and power distribution module, a pulse broadening and spectrum focusing module, a dual-channel dual-phase modulation module, a common-path different-time dual-frequency difference module and a laser scanning and telecentric focusing module; and the signal detection and data processing unit comprises a dual-channel orthogonal demodulation module and a scanning driving and signal synchronous acquisition module. Compared with the prior art, the dual-Raman frequency shift spectrum scanning stimulated Raman microimaging device has the advantages that dual-Raman frequency shift spectrum scanning stimulated Raman microimaging with higher acquisition speed, high resolution and wide spectrum coverage range is realized, and the problem of long time consumption for acquiring the complete spectrum of the to-be-tested sample by the traditional single-frequency resonance spectrum scanning stimulated Raman microimaging is solved.

The invention discloses an adjustable laser scanning device for special equipment detection, and relates to the field of laser scanning, the adjustable laser scanning device comprises a base and a mounting rack arranged on the base, a laser scanning unit is mounted in the mounting rack, the base is provided with a conveying belt along the length direction, and a small gas storage tank to be detected is placed on the conveying belt. According to the adjustable laser scanning device for special equipment detection, through mutual cooperation of a guide ring, a matching gear ring, a power gear, an electric drive shaft, a detection seat and an auxiliary unit, the laser scanning unit can be driven to rotate by 360 degrees with the central axis of the guide ring as a rotating shaft in the working process; the laser scanning unit is arranged on the small gas storage tank to be tested, the angle of the laser scanning unit in the vertical direction can be adjusted according to needs, meanwhile, the state of the small gas storage tank to be tested can be adjusted during testing, the laser scanning unit can automatically scan the small gas storage tank without dead corners, and therefore the actual state of the small gas storage tank can be accurately displayed.

The utility model provides an interactive transparent display screen system, which comprises a transparent screen with variable transparency; the projection system comprises a projector mounted on a lifting frame, the projector is used for projecting to the transparent screen, the lifting frame is mounted on a building, and the position of the projector is adjusted through lifting; the control system is connected with the transparent screen and the projection system and is used for adjusting parameters of the transparent screen and the projection system; the top of the transparent screen is provided with a radar and a laser scanner. The radar, the laser scanner and the camera are used for scanning in real time to obtain environment and object information. The interactive transparent display screen system provided by the utility model is easy to set and install, and has a relatively intuitive science popularization display effect.

Embodiments of the present application provide a kind of undercut structure measurement method and undercut structure measurement system, it is related to display field, to accurately measure the width of undercut area in undercut structure in line. Undercut structure measurement method includes: applying vibration to the carrying substrate of carrying substrate with to be measured substrate, wherein, to be measured substrate includes undercut structure, undercut structure has undercut slot, undercut structure includes solid area and undercut area, undercut slot is located in undercut area;Control light source emits detection light towards to be measured substrate, and the relative position relationship between control light source and carrying substrate is changed, to make detection light scan to be measured substrate along first path, wherein, first path at least passes through the first edge of undercut structure and first boundary, first boundary is the boundary of undercut area and solid area, and first boundary is opposite to first edge;Control probe receives the detection light reflected back by to be measured substrate;According to the path of reflection light spot received by probe, the width of undercut area is obtained.

A measurement vehicle (100) is provided with a first laser scanner (111) and a second laser scanner (112) that are used for measuring overhead wiring, and a first slide mechanism (115) and a second slide mechanism (116). When the measurement vehicle (100) travels on a road, the first slide mechanism (115) and the second slide mechanism (116) slide in the transverse direction to fit within the width of the vehicle, thereby placing the first laser scanner (111) and the second laser scanner (112) within the width of the vehicle. When the measurement vehicle (100) moves along a railway track to measure overhead wiring, the first slide mechanism (115) and the second slide mechanism (116) spread to the outside of the width of the vehicle to place the first laser scanner (111) and the second laser scanner (112) outside the width of the vehicle.

The invention belongs to the technical field of high-temperature protective coatings, and particularly relates to a method for rapidly generating a pre-oxidation layer on the surface of an MCrAlY coating. The method comprises the following steps: firstly, preparing an MCrAlY coating on a high-temperature alloy matrix by adopting a multi-arc ion plating technology, and sequentially carrying out vacuum heat treatment, sand blasting treatment and laser scanning treatment on the coating; according to the MCrAlY prepared through the method, a compact and continuous pre-oxidation layer with Al2O3 as the main component phase can be rapidly generated on the surface of the MCrAlY, the effects of resisting oxidation, enhancing the binding force between coatings and achieving good covering protection are achieved, meanwhile, the adopted ultraviolet laser basically has no damage to the coatings, a base body and an interface below the coating, and the coating quality is improved. The research of quickly generating a compact and continuous Al2O3 pre-oxidation layer on the surface of a high-temperature protective coating such as MCrAlY and the like is realized.

The invention provides a profile cutting processing point laser deviation correction method which comprises the following steps: calibrating a cutting tool and a point laser sensor according to a robot TCP calibration principle, and determining a relative relation; specification data and a theoretical cutting path of the to-be-machined profile are obtained; generating a point laser scanning detection path according to the theoretical structural characteristics of the profile; in the laser scanning detection process, the measurement value of the point laser sensor is monitored in real time, and the pose of the robot and the point laser measurement value are recorded; after laser scanning detection is finished, whether the specification of the profile to be cut is correct or not is recognized according to a measurement result, and a profile deviation value is calculated; correcting the theoretical cutting path according to the profile deviation value; executing the corrected cutting path; the difference between the to-be-cut profile and the standard component is detected in real time, the cutting path is corrected, self-adaptive cutting is achieved, the cutting precision, the material utilization rate and the production efficiency are improved, and the abnormal loss of equipment is effectively reduced.

The application belongs to the technical field of fiber grating preparation, and provides a special fiber grating suitable for a vehicle-mounted environment and a preparation method thereof, which comprises the following steps: performing uniformity analysis on a grating period written by femtosecond laser, judging whether a grating period distortion phenomenon occurs, if the phenomenon occurs, performing construction and comparison of a writing data group about laser scanning speed and repetition frequency on normal grating periods and distorted grating periods, judging whether the root cause of the grating period distortion phenomenon is disconnection of the laser scanning speed and the repetition frequency, if yes, performing fluctuation analysis on the laser scanning speed and the repetition frequency, determining a priority adjustment object and a corresponding adjustment limit value or adjustment combination, and then implementing targeted adjustment, which can effectively solve the grating period distortion problem, realize the uniformity of the grating period, and guarantee the quality and stability of the femtosecond laser written grating.

The application discloses a groove machining method. The groove machining method is specifically characterized in that, in the process that a laser beam and an air jet act on the surface of a workpiece to be grooved, a water jet is applied to the surface of the workpiece, the water jet is in an inclined posture with respect to the direction perpendicular to the surface of the workpiece, and the impact point of the water jet is spaced apart from the action point of the laser beam. The water jet offset from the laser beam by a certain offset distance is obliquely incident on the surface of the workpiece at a suitable angle, and a flowing water film is formed on the surface, which collides with the air jet to form a plume. The laser scanning direction needs to be opposite to the direction of the water jet, so that the impact point of the water jet is always on the surface of the workpiece, thereby ensuring the stability of the water film. The molten and gasified material generated by ablation of the workpiece can be removed along with the plume, and correspondingly, the heat generated by laser ablation can also be effectively taken away by the high-speed plume, thereby forming a nearly non-heat-damaged groove.

The invention discloses a facility agriculture intelligent management device and system, and the device comprises a spectral imaging module and a laser scanning module, the spectral imaging module and the laser scanning module are jointly connected with a checking module, the checking module is connected with a construction module and a camera module, the construction module is connected with a storage module and a monitoring module, and the storage module is connected with the camera module. The invention relates to the technical field of agricultural intelligent management. According to the facility agriculture intelligent management equipment and system, the spectral imaging module and the laser scanning module perform multispectral imaging and 3D laser scanning processing on an agricultural planting area, the checking module performs checking processing on two groups of scanning data, and when the checking data deviates or is missing, the checking module performs checking processing on the two groups of scanning data. Multi-spectral imaging and 3D laser scanning blind spots are subjected to camera shooting processing through the camera shooting module so as to complement the overall information of an agricultural planting area and improve the precision of model construction, and multi-spectral imaging data, 3D laser scanning data and camera shooting data are integrated and constructed through the construction module.

A depth data measurement head, measurement device, and measurement method are disclosed. The measurement head includes: a projection device for projecting linear light onto an imaging area; and an image sensor comprising N groups of pixels uniformly distributed on the imaging surface, each group of pixels having an exposure switching period t with a phase interval of 2π / N between them. e Exposure is performed. The projection device completes one pattern scan within a scanning cycle, which includes multiple cyclic sub-cycles. In each cyclic sub-cycle, the projection period t is... p The image sensor comprises N waveform projection areas, each 2π / N wide, with light intensity encoded based on an imaging pattern. Thus, during a single pattern scan within a scanning cycle, each of the N groups of pixels in the image sensor images a different stripe pattern, and there is a 2π / N phase shift between the N stripe patterns. This invention enables the acquisition of multiple images from a single linear light scan, significantly improving the speed of depth map synthesis and making it suitable for capturing moving targets.

The utility model discloses a laser scanner, and belongs to the technical field of scanning. The laser scanner comprises a casing comprising a first cover, a side frame and a second cover which are connected in sequence; the preassembling module is arranged in the machine shell and comprises a switching support, an image collecting assembly, a laser emitting device and a main control assembly, the switching support is installed on the first cover, the image collecting assembly and the laser emitting device are installed on the switching support and electrically connected with the main control assembly, and the main control assembly is electrically connected with the image collecting assembly. The main control assembly is in positioning fit with the adapter bracket and is connected to the side frame; and the interaction assembly is mounted on the second cover and is electrically connected with the main control assembly. The adapter bracket, the image acquisition component, the laser emitting device and the main control component are integrated into the preassembled module, so that modular assembly is realized, the steps of disassembling and reassembling are simplified, repeated assembling and disassembling operations in a function debugging process are reduced, the operation difficulty of maintenance and replacement is reduced, and the portability is improved.

Provided are an illumination apparatus and an illumination method capable of uniformly illuminating a visual field region detected by a detector. The present disclosure provides an illumination apparatus including: a drive unit configured to drive an optical member such that illumination light scans, in one direction, a visual field region that is a region extending in the one direction on a sample; and a control unit configured to control the drive unit to cause the illumination light to scan in synchronization with a transfer of a sensor that receives light from the visual field region illuminated by the illumination light.